Chen Zhou first summarized the 10 sets of experimental data compiled by Shen Jing, and then began to refer to the research method of the film preparation process.

First of all, through a large number of literature, all the problems are laid out and solutions are found.

Combined with the 10 sets of experimental data from the 43 institutes, trial and error were carried out through the wrong question set.

And Shen Jing was assigned the same task as Zhang Yifan by Chen Zhou.

That is, he needs to work with Fang Jieming to build an analytical model of doping experiments.

"The choice of the p-doped boron source is B(CH3)3, which should be no problem. ”

"Because B(CH3)3 is used as a boron source, it is beneficial for boron atoms to be incorporated into the alternative position in the diamond lattice, which can improve the boron incorporation efficiency......"

“...... Effect of different diamond substrate crystals on the carrier mobility of boron-doped diamond prepared ......"

“...... According to the experimental data and literature, the preparation of boron-doped diamond layers on (100), (110) and (111) single crystal diamond substrates ......"

“...... The lattice defects of the (111) and (110) diamond substrates trap a large number of boron atoms, reduce the incorporation efficiency of boron atoms, and there is strong impurity scattering, which makes the mobility lower than that of the (100) diamond substrates......"

"So ......"

The idea in Chen Zhou's mind was very clear.

All the content about p-type doped diamonds was constantly filtered and screened in his mind.

He's shifting his mind to a clear direction.

At the same time, the pen in Chen Zhou's hand was also constantly writing on the scratch paper.

To outsiders, there may be no pattern to what he writes on scratch paper.

But in Chen Zhou's eyes, he is approaching his goal step by step.

11 a.m.

Peng Fei came to this small office.

The excited look on his face had not completely faded, and his whole mental state was still extremely excited.

When Chen Zhou saw his appearance, he was a little worried, would this person suddenly ...... Poured?

However, before Chen Zhou could speak, Peng Fei had already said: "The task you gave me has been completed! All the information has been sent to the computer in front of you through the intranet!"

Chen Zhou minimized the pages on the computer, looked it up in the computer, and saw the information compiled by Peng Fei.

Chen Zhou looked up at Peng Fei and said, "I saw it." ”

Peng Fei walked to Chen Zhou's side at this time, just looked at Chen Zhou like this, and didn't speak.

Chen Zhou looked up at him strangely: "What's wrong?"

Peng Fei then said, "Is there anything else you need help with?"

Seeing the glint in Peng Fei's eyes, Chen Zhou couldn't help but smile, can this guy be addicted to helping?

Shaking his head slightly, Chen Zhou said, "Not for the time being." ”

Hearing Chen Zhou's words, Peng Fei felt a moment of loss.

Noticing the change in Peng Fei's expression, Chen Zhou thought for a while and added, "I suggest you go and rest first, there will be a lot of things later." ”

Hearing this, Peng Fei immediately looked at Chen Zhou and hurriedly said, "No problem! I'll go to bed after eating!"

At noon, Chen Zhou and Shen Jing also had a simple lunch in the canteen of the 43rd Institute.

During the meal, Shen Jing couldn't help but joke: "Chen Zhou, that Peng Gong is about to become your fan brother......

Chen Zhou didn't say much about this.

It doesn't matter if you're a fan or not, the main thing is that you feel like a helper, it's really good~

After lunch, after a short break of ten minutes, Chen Zhou sat down in front of the computer again.

The problem of p-type doping is relatively simple, and his direction has been figured out.

After thinking about it, Chen Zhou looked at Shen Jing and asked, "Senior, how is the analytical model you built?"

Shen Jing turned around and said, "It's still a little close." Because the model you require should be targeted, we have fully considered all aspects of the experiment to construct the p-type doped, n-type doped, and co-doped models. However, it's also coming soon. ”

"Good. Chen Zhou replied and stopped talking.

Since Shen Jing and Fang Jieming have already followed, let's start with the trial and error of p-type doping in the afternoon.

The issue of n-type doping and co-doping will be put aside for the time being.

On the set of wrong questions, the content of the experimental theory of p-type doping has experienced a wave of parabola.

In the morning, when Chen Zhou first started to study the p-type doping problem, the wrong problem set was comparable to a printing press.

printed all the content that Chen Zhou had seen until he reached a peak.

Later, as Chen Zhou's research deepened, the content recorded in the problem collection began to change.

Some old content is overwritten with new content, and some content is completely gone.

The fact that the old content is covered by the new content means that the research direction is clear.

The disappearing content means that Chen Zhou has solved the corresponding problem.

Now, another wave of parabola is about to be staged on the wrong set.

"Crystal Plane Selection ...... for Diamond Substrates"

"Reaction pressure, temperature, ......"

"Doping concentration ...... boron source"

Combined with the data of 10 sets of experiments completed by the 43rd Institute, Chen Zhou began the trial and error of p-type doping experiments.

An hour later, Chen Zhou took out a new piece of scratch paper and wrote down a series of experimental parameters on the scratch paper.

Then he got up and walked to Shen Jing's side and threw the scratch paper to Shen Jing.

After Shen Jing got the scratch paper, he was slightly stunned, and immediately began to communicate with Fang Jieming to conduct model analysis.

Chen Zhou returned to his seat and sat down.

Next, it's time for n-type doping and co-doping.

The problem of n-type doping and co-doping is much more difficult than that of p-type doping.

"The first n-type doping of diamond was performed on a (111) diamond substrate, and the samples exhibited n-type semiconductor transfer characteristics over a wide temperature range......"

"At a temperature of 500 K, the Hall mobility is 23 cm?? /（V·s）......”

"However, compared with the (111) single crystal diamond substrate surface polishing is difficult, there are many defects, and the size is small, the surface of the (100) surface oriented substrate has an atomic level of flatness, small defects, and the quality of the epitaxial film is also better than that of the (111) surface diamond ......"

"But this is not absolute, and the problem of the crystal plane is not the most critical factor......

Thinking of this, the pen in Chen Zhou's hand stopped, and habitually dotted on the scratch paper.

This is the manifestation of Chen Zhou's thinking when he is blocked.

"Combing through the literature again......"

Thinking like this, Chen Zhou put down the pen in his hand and moved his gaze to the computer screen again.

The scroll wheel of the mouse in your hand is constantly sliding, and the content on the screen is constantly changing.

But Chen Zhou's eyes didn't blink.

He's already gone through it.

Looking at it now, it's just looking for what I missed out.

In order to open a gap in your blocked thinking.

"Doping concentration of phosphorus?"

"Electron scattering mechanism?"

"Not the content of this part......"

“...... 1.7eV？”

"How did you forget this data!"

When he saw this content, Chen Zhou's eyes instantly lit up.

N-type doping, or phosphorus doping diamond, is difficult.

This is because phosphorus atoms are larger than carbon atoms, making it difficult to embed in diamond lattices.

When phosphorus atoms enter the diamond lattice, they will cause the crystal lattice to distort, affecting the configuration, bond shape and charge distribution in the diamond.

There are a large number of vacancies in phosphorus-doped diamonds, which can also form phosphorus-vacancy defects with strong binding force to phosphorus atoms.

The energy level of this defect is located at about 1.7 eV at the bottom of the diamond conduction band, which compensates the donor and hinders the ionization of phosphorus atoms.

This makes it difficult to obtain high-quality phosphorus-doped diamond films.

Although the phosphorus energy level is 0.58 eV below the bottom of the conduction band, this defect still exists.

"Filling the ...... of defects"

The movement in Chen Zhou's hand accelerated, and the scroll wheel of the mouse kept sliding.

The content on the screen was pulled by Chen Zhou to the co-doped part.

[The nitrogen atom is in an alternate position in the diamond lattice, which will form a deep donor energy level with an excitation energy of 1.7 eV, which does not conduct electricity at room temperature......]

[Theoretically, phosphorus can be used as a shallow donor impurity, but the radius of phosphorus atoms is larger than the radius of carbon atoms, and it is difficult to incorporate into the diamond lattice......]

[Theoretically it is shown that the method of phosphorus-nitrogen co-doping may be an effective method to overcome the self-compensation of wide bandgap and ultra-wide bandgap semiconductors......

【......】

Seeing this, the speed in Chen Zhou's hand slowed down unconsciously.

If the nitrogen atom is able to fill the defect, there is room for the doping of the phosphorus atom......

Originally, it was planned to solve the problem of n-type doping first, but as a result, this thinking made the problem jump to co-doping?

Because the n-type doping experiment of the 43rd Institute uses phosphorus doping.

Therefore, in co-doping, they studied the method of phosphorus-nitrogen co-doping.

This also makes Chen Zhou connect the two together.

Chen Zhou couldn't help but smile in his heart, but he also decided to solve the problem of n-type doping and co-doping together.

In the co-doping experiment, PH3 was the first to be used as a phosphorus source, and N2 was used as a nitrogen source.

However, the results obtained in experiments with these two gases were not ideal.

The prepared doped diamond film has a high resistivity.

In subsequent experiments, the choice of phosphorus and nitrogen sources was constantly changed.

For example NH4H2P04 a single doping source containing phosphorus and nitrogen has also been applied to research.

However, the resistivity of the resulting diamond film is still very high.

Chen Zhou glanced at the experimental data of the 43rd Institute again, and then began to sort out the substances that could be used as nitrogen and phosphorus sources on the scratch paper.

While Chen Zhou was immersed in his research, the sky outside the room had gradually darkened.

"Chen Zhou. ”

Awakened by Shen Jing's voice, Chen Zhou raised his head and looked at Shen Jing suspiciously.

Shen Jing pointed to the computer: "The data analysis is complete." ”

"Oh. Chen Zhou answered, got up and walked to Shen Jing's side to take a look.

The results of the analysis were not much different from his expectations.

"Send it to me and I'll do the final touching. ”

Shen Jing nodded: "Okay." ”

Chen Zhou turned around and was about to walk back to his seat, when Shen Jing grabbed him and pointed to the lower right corner of the computer screen.

Chen Zhou glanced at it, and then realized that it was already half past six.

After thinking about it, Chen Zhou didn't plan to work overtime in the forty-third institute, so it was better to go back to the hotel more comfortably.

So, the two of them sorted out the information, talked to Peng Fei, and left the forty-three institutes.

Chen Zhou was originally surprised that Peng Fei didn't come to look for him in the afternoon, but he realized when he called.

Peng Fei is busy collecting finished diamond films.

The diamond film prepared using an improved process has been completed.

Listening to Peng Fei's meaning, Chen Zhou estimated that he would stay up late and work overtime again tonight.

And I don't know he's alone......

After a simple dinner outside, Chen Zhou and Shen Jing returned to the hotel.

Shen Jing originally planned to follow Chen Zhou's room as before, but was stopped by Chen Zhou.

"Have a good night's rest, tomorrow you'll be busy. Dropping such a sentence, Chen Zhou closed the door and entered the room.

Outside the door, Shen Jing looked at the closed door and muttered, "Could this be a retreat?"

In the room, Chen Zhou quickly turned on the computer and took out scratch paper and a set of mistakes.

"It's tonight......"

After just one glance, the afternoon's thoughts continued.

Chen Zhou was once again immersed in the study of n-type doping and co-doping.

What was originally a stack of brand new A4 scratch paper has thinned out over time.

And the refill he has been distressed about is also constantly flowing on the scratch paper at an unreasonable speed.

The content of the problem set is also constantly increasing and decreasing.

"Regardless of the nitrogen and phosphorus sources, there is only one purpose......"

"Regardless of the system inside the unit, it is always just for the production of doped diamond films......"

Chen Zhou's thinking became clearer, and the direction gradually became clearer.

In the co-doping experiments of the 43rd Institute, no redundant system was used as an aid in the device.

But in fact, with the help of other systems, the results may be better.

This is the inspiration given to Chen Zhou by a foreign document.

Take the full scratch paper to the side, replace it with a new one, and replace the refill with a full one.

Chen Zhou wrote on scratch paper:

[In the NiMnCo—C system, P2N5, carbonyl ion powder and phosphorus powder are mixed at high temperature and high pressure to provide nitrogen and phosphorus sources, and diamond is doped in this way......

After writing this sentence, Chen Zhou suddenly laughed.

"It's such a simple truth, why have I thought about it for so long?"

Compared with nitrogen-doped diamond alone, H atoms in the form of sp3-CH3 are easier to incorporate into the phosphorus-nitrogen doped diamond lattice, which improves the quality of co-doped diamond.

Because in the phosphorus-nitrogen co-doping system, many defects are produced after the phosphorus atom is incorporated, forming a hanging bond of carbon atoms, which is conducive to the incorporation of hydrogen atoms into the diamond lattice.

Hydrogen atoms, on the other hand, can etch the sp2 phase, which is beneficial for the deposition of high-quality diamond films.

"After the system, nitrogen and phosphorus sources are determined, the remaining problems of the co-doping experiment will be solved......"

Chen Zhou said, taking a few pieces of scratch paper that were placed aside.

This is a parametric study done by Chen Zhou for different situations when studying nitrogen sources and phosphorus sources.

This will be just the right time to verify.

The general substrate temperature, doping concentration, working pressure, etc., etc., can quickly obtain a rough range through trial and error of the wrong question set.

After the verification of the analysis model, it is then returned to the wrong set for further trial and error.

That's it!

As soon as the problem of co-doping is solved, the problem of n-type doping is the answer on paper.