After reading the book, the address of [Wanbenshen Station]: Avoid the pain of chasing books!

Today is the day when the equipment of the wafer factory of Zhongjing Micro Company in Hongshan District, Honghu City entered the factory, and two lithography machines of Ruixing Technology Company were stored in the constant temperature warehouse, which were transported to the factory today and needed to be hoisted into the plant with the assistance of a crane.

At this moment, a reserved door was opened on the outer wall of the second floor of the factory, and a transportation platform was temporarily erected under the door.

The hoisting crane roared, and the equipment box wrapped in layers of insulation materials on the transport truck was slowly lifted and sent to the platform on the second floor, and then the equipment box was opened by the installer on the platform, and the lithography machine wrapped in layers of insulation and dustproof film was pushed to the pulley table, and then carefully pushed the movable door.

As the two lithography machines, which were tightly wrapped in multiple layers of film, disappeared into the door, the staff slowly closed the door, and the engineers climbed onto the platform and began to seal the joints between the gate and the wall.

Tan Yunsong held the walkie-talkie at this time and gave orders: "A group of equipment is in place, immediately carry out a first-level dust removal on the lithography room, pay attention to temperature control, remove the first layer of dust-proof thermostat cover after three hours, remove all dust-proof thermostat covers before dawn tomorrow, and enter the installation procedure tomorrow, and must not delay the work schedule of the installers of Ruixing Technology Company!"

Yang Jie quietly watched him command beside Tan Yunsong, and felt a lot of emotion in his heart.

This is the first 0.18 micron 12-inch wafer fab to settle in Honghu City, and after more than a year of intense construction, it has finally entered the equipment installation and commissioning stage, which is also the first state-of-the-art wafer fab in Asia.

"Mr. Tan, it's amazing to be able to compress the construction period to more than a year!" Yang Jie said with a smile.

"The main reason is that Rising Technology's equipment can keep up. Tan Yunsong smiled and looked at He Yuguang and Xi Haiqing and the others on the side.

"Hehe, it is also Yanjing's laser physics and chemistry institute that finally produced a qualified krypton fluoride laser light source at the end of last year, and the company finally produced such a few lithography machines. He Yuguang said with a smile.

After Yanjing Laser Physicochemical Institute prepared an excimer laser light source with sufficient power, Ruixing Technology Company also stepped up the assembly and debugging work, and it took more than half a year to finally produce the lithography machine.

Long Hongwei looked at Yang Jie and sighed: "Or Xiaojie, you are thoughtful, you have prepared early, and prepared dozens of sets of lithography machine accessories, and now the Americans have completely banned these foreign manufacturers who produce lithography machine accessories from providing accessories to China, otherwise the domestic lithography machine will really be stuck by them." ”

"Our Ruixing Technology Company is poking at the sore spot of the Americans, naturally trying every means to strangle us, I have to be more attentive, but now the domestic lithography machine can not be purchased from abroad accessories, now can only wait for the domestic preparation of alternative product accessories, I also hope that the domestic can at least solve the production and manufacturing of optical lenses and most other accessories within seven or eight years. ”

Yang Jie said.

"I am still confident, Chairman Yang Ziguang also gave a death order, and the results must be produced within five years. Long Hongwei said.

He paused, and said to Yang Jie with a smile: "Huajing Technology Company also wants to use the 0.18 micron process technology, Xiaojie, you have to leave a few lithography machines and etching machines for Huajing no matter what." ”

"Minister Long, you have taken a big step forward!"

Long Hongwei no longer holds the post of minister of the Ministry of Information Industry, but has concentrated his energy on the management of Huajing Group Company.

"Although Huajing is still working on the 0.25 micron process technology, it can't be too far behind Huayue Electronics Company and your Zhongjing. ”

In recent years, Huajing Group has received a large number of chip orders from many domestic companies, and the life is quite moist, and with money in hand, Huajing is full of confidence in wafer factories with higher process technology.

At this stage, the United States allows Huaxia to import 0.35 micron wafer factory equipment, but Huajing has now mastered the 0.35 micron process technology, and Huayue Electronics Company and Zhongjing Microlight is production capacity is basically squeezed by Huaxing Technology Group Company, and domestic companies can only hand over orders to Huajing to complete, in the first half of this year, Huajing Group Company generated more than 4 billion revenues, compared with a few years ago loss business is simply a day and a place.

In comparison, there is still a big gap between Huajing Group and Zhongjing Micro and Huayue Electronics Co., Ltd.'s revenue, which is mainly due to the fact that the two companies produce all high-end chips, Huayue Electronics Co., Ltd.'s revenue last year is close to 20 billion, and Zhongjing Micro is also more than 16 billion, all of which are making a lot of money.

However, the senior management is very satisfied with the revenue of Huajing Group Company, and it also has such a brilliant achievement, and the senior management has strengthened its confidence in the development of semiconductors.

If it was a few years ago, if Zhongjing Micro had put into production such an advanced wafer factory, it was possible that even Chairman Yang Ziguang would come to inspect, but in recent years, there have been frequent successes in semiconductors in China, and the high-level has become accustomed to this, and Yang Jie does not want to make a lot of trouble, so he did not report to the central government, Chubei Province and Honghu City.

Everyone came to the conference room in the company's office building, and Yang Jie also asked about the details of He Yuguang and Xi Haiqing's research and development.

He Yuguang is currently going all out to tackle the double workpiece table intelligent linkage lens image field precision calibration system, he also said in detail a lot of technical difficulties, Xi Haiqing developed the etching machine also encountered a lot of problems.

In order to achieve very accurate exposure focusing, the company also convened people to develop the corona detection system ultraviolet focus control module, in order to overcome the double closed-loop control process of focusing and its software and hardware implementation methods, Yang Jie also provided some algorithms before, but helped the technical team find the cause of the error in the focus control process and reduce the focus error of the ultraviolet focusing system. Keep the image plane of the UV camera in focus at all times.

However, now in the process of testing, the lithography machine has been running for a long time, and there is still a reason for the decline in the success rate of focusing, and now He Yuguang is also crazy about this matter.

"Have you ever thought about the problem of thermistor components?" Yang Jie said: "Just now Mr. He said that the accuracy decreases after the temperature rises, and a big reason is that the lithography machine lacks a high-precision temperature measurement and temperature control stable system. ”

He Yuguang's eyes suddenly flashed: "Yes, why didn't I think of it?!"

Yang Jie smiled: "I also provide a direction to solve the problem, after Mr. He goes back, let the domestic manufacturers that provide thermistors let them produce thermistors with anti-interference ability and stable performance, and let them provide high-precision temperature measurement systems, and choose reasonable mathematical models and calorific value processing methods." ”

Yang Jie will not overstep his bounds, he knows that these two are experts in their respective fields, some technologies just provide an idea and they will open it up, and the rest is just a process of continuous verification and improvement, and he does not need to worry too much.

However, he was pleasantly surprised by the fact that with the help of the Machine Tool Research Institute, the etching machine equipment has made great progress.

It is no wonder that the difficulty of the etching machine is still less difficult than that of the lithography machine.

Because Xi Haiqing has a deep attainment in RF power supply, there has been a great breakthrough in the algorithm of RF power automatic matcher in recent years, and Loongson Semiconductor Company also organized a technical team to carry out technical research on this after getting the CMOS image sensor from Tsinghua University more than two years ago, and found experts in this area through the Japanese R&D center to join the team, and the image sensor technology has also made a great breakthrough, and the etching machine is equipped with a high-resolution sensor, which greatly improves the accuracy of the etching machine。

Yang Jie also encouraged the two experts and the technical team.

"Although the share of lithography machines and etching machines in the world is not very large, but it is the top priority, in order to motivate everyone to work hard, the head office will consider providing most of the accessories in China after the independence of Ruixing Technology Company, and then distribute equity to everyone. Yang Jie said.

Yang Jie has been throwing money into R&D in Ruixing Technology Company in recent years, at least billions of dollars, and now the number of R&D personnel has increased to nearly 2,000.

He will wait until Ruixing Technology Company boils up to the domestic supporting industrial chain before Ruixing begins to enter the international market, although this period may be as long as six or seven years, and it may be more than 20 billion yuan in the middle, but the current Huaxing Technology Group can still support it.

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