"Very good!" Yang Ziguang nodded excitedly and said, "It is of great strategic value for our country that you can run ahead of all companies in this regard, and you must firmly occupy the commanding heights of this technique, so that our country will not be negotiated by foreign countries." ”

Later, Yang Ziguang also inspected Ruixing Technology Company, and when Yang Ziguang saw the third-generation high-end 1 lithography machine that Ruixing Technology Company was testing and experimenting.

The krypton fluoride laser light source jointly developed by Ruixing Technology Company and Yanjing Institute of Physical and Chemical Technology has become mature in previous years, providing a stable and reliable light source for Ruixing Technology Company.

At the same time, Ruixing Technology Co., Ltd. also developed a mask table, workpiece table position measurement device and measurement method according to Yang Jie's technical scheme, and applied for a national patent.

This set of devices uses a number of laser interferometers instead of capacitive sensors, so that the degree and vertical direction of the sensor are consistent, and a set of exclusive algorithms is explored, and the weight distribution of the measurement interferometers in each direction is introduced in the measurement process, so that the position of the mask table is measured more accurately.

After several years of hard research and development, Ruixing Technology Co., Ltd. has finally controlled the motion accuracy of the workpiece table and mask table at the level of three nanometers, all of which is the result of Ruixing Technology Co., Ltd. and the Machine Tool Research Institute and several research institutes working together, and the number of technical staff involved in such a system alone has reached thousands.

After applying the ultra-high-precision grinding machine of the Machine Tool Research Institute and the slurry supplied by Tianma Technology Company, the optical aperture value of these lid-sized lenses was finally increased to 1.33, which is close to the limit of optical lenses.

The German Zeiss can achieve the optical aperture value of the optical lens to 1.4, which is close to the limit of 1.49, and it is very remarkable that the Three Sunshine School Factory can achieve this point.

These lenses are hand-ground by a veteran technician with decades of experience in lens grinding at Sanguang School Factory with the cooperation of ultra-high-precision grinding machines and measuring instruments.

Although the output of such optical lenses is small and the production time is very long, it has made Sanyang School Factory enter the ranks of first-class optical equipment manufacturers in terms of optical lens skills.

Ruixing Technology Company also developed a shock absorber for this lithography machine, using an internal closed frame to isolate the workbench from the external environment, maintain the degree, reduce external vibration interference, and maintain a stable temperature and pressure.

In order to meet these requirements, all the staff of Ruixing Technology Company have sharpened their heads and kept trying to solve various engineering difficulties, and finally produced the first immersive lithography machine of the krypton fluoride laser light source with a double workpiece table.

This also means that the lithography machine of Ruixing Technology Company can support the extreme process of 32 nanometers, if the three sunshine factories can improve the optical aperture value of the lens to the limit during this period, then it can support the process technology to 22 nanometers!

Rising Technology did not announce this news to the outside world, and is also waiting for the launch in the first half of next year to give a good earthquake to Esmoore and Canon and Nikon lithography machine manufacturers.

"You really have any treasures that you like to hide from being seen!" Yang Ziguang said with a sigh.

"Chief, our company has a complete set of testing and experimental procedures and standards, we don't want to see the shortcomings of the previous lithography machine products, Ruixing Technology Company to ensure that every equipment handed over to customers is very reliable. ”

"How much R&D have you invested in this lithography machine?" asked Yang Ziguang.

"It adds up to more than 5 billion. Yang Jie replied.

"You have invested so much, can you recover the capital?" Yang Ziguang asked with concern.

"Please rest assured, I am very confident in our lithography machine," Yang Jie said with a smile: "This set of equipment is very reliable in the process of testing and experimenting with Ruixing Technology Company, and it is also the world's first immersive lithography machine with a krypton fluoride light source. ”

"How much are you going to sell for such a lithography machine?" asked Yang Ziguang.

"Ruixing has also done internal calculations, and it is more appropriate to set the export price at 40 million US dollars, and it is cheaper in China. ”

Yang Ziguang opened his mouth, and only after a few seconds did he say: "Your export price is worth two Thunder Dragon fighters!"

Now the price of the Thunder is about 20 million US dollars per plane, and it is also the highest real product exported by Huaxia now, but the 1 lithography machine is going to replace it immediately.

In the memory of the previous life, after Acemoore made a breakthrough in immersive lithography machines, the high-end lithography machine foundations of Nikon and Canon were beaten, and only a few low-end old lithography machines in the mainstream semiconductor production line were still Nikon or Canon, and the other foundations were Esmoore's world.

Nikon's lithography machine can only be sold super cheap to grab the market, the unit price of the lithography machine is only more than 20 million US dollars, while the same type of Esmore krypton fluoride lithography machine is sold for about 70 million US dollars.

In contrast, Nikon and Canon are in a state of embarrassment.

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