"Is this your solution?"

Wang Zhongjun flipped through the documents in his hand and couldn't help frowning as he read them.

"Have you considered the amount of work involved in making probes using the isotropy of corrosives?"

"Using nitric acid and hydrofluoric acid, which control the rate of erosion, we calculated the possible ratios and did at least a thousand sets of experiments. ”

Zhong Dahua's voice did not fluctuate much, after Wu Mu proposed this idea last night, the two of them had already collected relevant information through the agency, but the situation was a little unexpected.

In the U.S. database, there is no technology associated with this idea.

In fact, since the 80s, wet etching has been a backward technology in the United States. With the improvement of process technology, the mainstream of the industry is now that dry etching is better, because dry etching is more anisotropic, and the yield of chips is naturally higher.

In other words, on the route of wet etching, the industry did not come to the end and changed the route.

In order to overcome the shortcomings of wet etching, Applied Materials directly launched the PVD technology of dry etching, and simply opened another stove! Dry etching is to directly hit the wafer with plasma, from a chemical reaction to a physical reaction, and there is no isotropic problem.

Of course, the physical etching of dry etching could not meet the demand, so the industry picked up wet etching. However, it is also a wet etching based on PECVD after ionizing the chemical corrosive agent with an ion etching machine.

The problem of anisotropy was solved by the Americans back in the eighties.

Now Zhong Dahua and Wu Mu want to go back, but they actually chose a path full of thorns.

If you want to refer to and learn from it, there is no precedent to follow. In this way, it is inevitable that people will have some psychological drumming.

However, Zhong Dahua did not see any doubt or apprehension on his face, and in the face of the workload required for thousands of sets of experiments, it seemed like saying where to buy groceries after work.

"Thousands of experiments, I don't think it's enough!"

Wang Zhongjun shook his head and snorted: "This is the number of experiments you need to calculate the ratio and time control, but have you thought about it, what we want is not an ordinary needle tip, but a 50 nanometer wide needle tip! In addition to time and proportion, even a little weak air movement can make your experimental results skewed." In addition, temperature, humidity, air impurities, these are still imaginable interferences, and when you actually do experiments, you will find that more interference sources that you have never thought of will appear...... These must be eliminated one by one, can you guarantee the results of a thousand sets of experiments?"

"I promise...... No. ”

Zhong Dahua's voice still did not fluctuate, and he said calmly: "But there is no precedent for silicon probes, and even atomic force microscope probes cannot be produced by ourselves." But this project only gave us two months, and there was no possibility of achieving it step by step. ”

"To be honest, I think Wu Mu's idea is simply tailor-made for us. Although there is no mature technology for wet etching to make probes, the performance data of various corrosive agents are still very rich. The biggest advantage of this idea is that it does not require the foundation of the past, which is very suitable for technological leapfrog development. Whether it is sub-micron or micro-nano, 50 nanometer or even 10 nanometer, or even one day 1 nanometer probe, only need to increase investment to find out the parameters to be realized. ”

"I admit we have an element of gambling. ”

"This route has been successful, and we can leave the current technical route behind and take a completely different nanograting manufacturing system. ”

"It's true that no one has ever achieved it, but when we talk about science, it has a theoretical chance of success. ”

"And this possibility can only be realized by our new department. ”

"Oh, how do you say that?" Wang Zhongjun is actually satisfied with this idea, it is indeed difficult, but it is possible to achieve it.

But if only Xinke can achieve this, why is this? Is it because Hu Wenhai is handsome?

"I have a basis for this. ”

Zhong Dahua swore that Wang Zhongjun was obviously more interested.

"While searching for the relevant literature, we found a situation. In fact, compared with the U.S. database, more data is needed in the program from the research institute's data center. ”

"In the past ten years, we have more research data on the ratio of various corrosive fluids. ”

"In fact, this is not difficult to understand, because we know that now the process of integrated circuits has entered the sub-micron level, and wet etching has long been unsuitable for needs. But when it comes to power semiconductors, the smaller the process, the better. In fact, the IGCT process is basically above 3 microns, and the IGBT process is also between 1 and 3 microns. ”

"After the general upgrade of dry etching in the industry, as a major manufacturer of power semiconductors, ST is actually still using wet etching in large quantities, and has continued to invest in the improvement and upgrading of wet etching technology for many years. ”

The production and experimental data accumulated in this way have long exceeded the international advanced level. ”

Zhong Dahua and Wang Zhongjun didn't know that this was the advance planning dividend brought by Hu Wenhai. 591 net

IGBT is a power semiconductor, and the process not only does not need to follow the process of digital semiconductors, but even smaller processes are not more friendly to performance. In later generations, the semiconductor process has entered within 10 nanometers, and many IGBT processes are still only 0.5 microns, can you believe this?

In later generations, China's semiconductor industry also still has a place for wet etching. Because the vast majority of chips on the market do not actually require the most advanced manufacturing process. Like the vast majority of low-cost ICs, discrete devices, and micro-electromechanical devices, wet etching is still used.

Although wet etching can't do fine work, it also has advantages. For example, a specific corrosive agent can play a role in specifically corroding a certain material, only corroding the material without harming the photoresist and the underlying structure, and this selective etching property makes it safer in the rough process and ensures that the substrate will not be damaged.

In recent years, with the continuous investment of Xinke, the domestic wet etching technology has been almost eaten, and therefore has accumulated a lot of data that exceeds the industry level.

As Zhong Dahua said, if you want to take the route of wet etching, then Xinke is really unique.

Wang Zhongjun finally glanced at the information in his hand and nodded heavily.

"Okay, you wait, I'll report to Dean Ni. ”

......

With a creak, a military vehicle stopped in the square in front of the semiconductor institute building, followed by a series of buses, cars, and even jeeps.

"Get out of the car, whole team!"

A group of soldiers jumped down from behind the military card and quickly lined up in a neat line, and a squadron leader turned his head and ran towards Wang Zhongjun.

"Is it Comrade Wang Zhongjun, I am from the Third Squadron of the Armed Police Detachment, and my surname is Zhang. ”

"Fortunately, this is the researcher of the other research unit you have named, and it has finally been delivered safely as scheduled!"

Wang Zhongjun retracted his gaze at the convoy and shook hands with him: "Captain Zhang, you came so fast, thank you for your hard work!"

"Don't work hard, Comrade Wang, we still have a long time to get along next, and we don't need to be so polite. ”

"Then our next safety will be entrusted to Captain Zhang. ”

Wang Zhongjun's plan is submitted, and as the most important project in the institute at present, it will of course receive unconditional support.

There are many experiments and time is tight, and it is almost impossible to complete the experiment in two months with the semiconductor research institute alone. In order to develop a model of tackling key problems and transfer people from outside to share the work, we cannot ignore the issue of confidentiality.

Captain Zhang and his detachment not only protect their safety, but also have the responsibility of monitoring and quarantine.

In the current situation, the encoder project is of paramount importance, and no one dares to take the slightest risk.

And these people who came with him were also key personnel personally ordered by Wang Zhongjun and transferred from major research institutes near Xiucheng. With the sudden arrival of such a large number of people, the logistics staff of the semiconductor institute were simply busy.

However, this was obviously worth the money, and soon these people were assigned experimental tasks, and then they began to work in an orderly manner with the graduate students they had captured from various universities in Xiucheng.

There are people and plans, but fortunately, the experimental conditions are not particularly harsh under this idea. Cleanrooms were standard in semiconductor labs, other laboratory projects were making way for grating projects, and more atomic force microscopes were quickly sent in.

Atomic force microscope is still a rare commodity in China, but fortunately, this thing is not an embargoed material under the Wassenaar Agreement.

Today you lend me one, and tomorrow it's a big deal to pay you back two.

With such a rapid accumulation of people, money, and materials, the semiconductor institute is like a small scientific research battle.

Although it is a bit bitter, the researchers who know and don't know the inside story have no complaints. The family was organized to take care of it, and it was only two months, and the effort to do the experiment was over.

In the past two months, the changes in the international situation can be said to have taught everyone a lesson.

It is not only backward that they will be beaten, but whether they are the first to be beaten! It is impossible to say that the country has not held its breath because of this, and it is unjustifiable.

I want to teach Americans a lesson, and I want to say "NO!

With such emotions, the time went from midsummer to early autumn. The coldest temperature in Jiuquan in October has reached below zero, but when it should have been the dead of night, a convoy from all over the country met here in full swing.

No matter how cold the wind is, it can't quench their enthusiasm!

Wang Zhongjun jumped out of the car, hugged the box in his hand tightly, and saw such a scene in front of him.