The matter of the chip processing factory went according to plan, and Wang Anran also put down a big stone.

But this is just the beginning, Wang Anran wants to buy not only a stall of equipment, but also digestion technology.

In the case of the lithography machine, this equipment uses Nikon's GKL107 436 nanometer wavelength violet light source, which uses a high-pressure mercury lamp to filter the color wavelength.

This set of equipment will be obsolete in a few years.

Compared with the more advanced 248nm violet light source lithography machine on the market, it is two generations behind, and there is a generation of 365nm light source lithography machine in between.

You have to know that there is a chasm between 365 nm and 248 nm light sources.

The evolution of the 436 nm violet light source to the 365 nm violet light source can only be said to be a technological progress, and the light sources used are all high-pressure mercury lamps.

When it comes to the 248nm violet light source, it is the replacement of technology, and the light source used is a halogen laser light source.

Moreover, Wang Anran remembers very well that in 1995, the lithography machine of the 193nm violet laser light source has made a major breakthrough in technology and will be put into the market in the next few years.

You must know that the lithography machine, the core equipment of chip production, pays at least tens of billions of dollars in gold for each upgrade, and the more difficult it is in the future.

Historically, the replacement of 193nm violet lithography machine has killed a large number of old lithography machine manufacturers.

Originally, there were thirteen lithography machines in the world, and there were four in Japan, and after the 157-nanometer lithography machine, ASML could barely survive, and a large number of other manufacturers either went bankrupt or were half-dead.

The top Nikon and Canon in the island country also lost the competition between 157nm dry lithography and ASML immersion lithography machines because of the wrong direction.

In addition, ASML has developed a dual-table technology, which greatly improves the productivity and accuracy of the chip.

Let the two giants completely from the production of high-end lithography machines, reduced to the sale of low-end products, and can no longer afford the competition of the top extreme violet lithography machines.

By 9102, the world's high-end market only fed one ASML.

In fact, without the blood transfusion of chip giants such as TSMC, Intel, and Samsung, the only remaining ASML will also be swallowed up by the wave of the market, and TSMC and Samsung alone invested 2 billion euros in 2016 and smashed it on ASML.

It's difficult, it's really difficult, and it won't necessarily be successful, the research of lithography machine is a gold-swallowing monster, is there any meaning?

That's for sure.

It's not about money.

However, lithography machines, photoresists, etching machines, packaging equipment, Huaxin Technology alone, it is basically impossible to understand these technologies, which requires the mobilization of the strength of the whole society.

At the Institute of Optics of Qingdao University, Wang Anran had a sulky stomach.

In 1971, he participated in the development of China's first violet interferometric laser, and in 1980, he was responsible for the development of the country's first proximity JL_01 lithography machine.

He really can't stand it, his research work will be guided by a hairy young man.

And Wang Anran is also angry, he has invested tens of millions in the Institute of Optics, and now it is so difficult to add an immersion lithography machine to discuss and research?

"Mr. Wang, let me reiterate again, although the immersion lithography machine can reduce the projection map in theory, but in practice, it has been proven that this technology does not work, and it is a waste of money to study it. ”

"Professor Liu, I'm just suggesting that there be some more exploration on this, and this technology has not proven to work, but it has not worked. ”

Liu Benwei was dismissive.

"Mr. Wang, I tell you that this sentence is realistic, immersion lithography technology was established seven or eight years ago, and you don't know the difficulties to tell you.

I just want to make a point that if you have the energy to study immersion lithography machines and put your energy into the violet laser light source, the effect will be much better. ”

It seems that in this era, everyone's general awareness is that immersion lithography is a dead end.

Wang Anran took a deep breath, there were too many scientific researchers with hard mouths, and he was also one of them at the beginning, and when he was angry with Liu Benqing, he was angry with himself.

If these people are angry and can pierce the sky, the only solution is to convince people with virtue, oh no, convince people with reason.

"Ultra-high purity refractive index liquids, often with a speck of dust in the water, or a bubble, or a few more ions, can have a huge impact on processing.

In addition, the high-purity water floats on the wafer, and the molecules in the current photoresist will dissolve into the water, causing liquid medium pollution.

Liu Benqing was stunned when Wang Anran said the first sentence, what is the situation, he understands.

When Wang Anran combined the two major technical difficulties, Liu Benqing said: "Mr. Wang, ...... you?"

Wang Anran pretended not to see it, turned his back, and continued: "In addition to the two major problems, in actual operation, we will also face problems such as the stability of the platform, calibration system, exposure time, etc., which need to be debugged many times according to the type of each machine......"

Liu Benqing wanted to give Wang Anran a thumbs up and say that these materials are not easy to find.

"Mr. Wang, now that you know the defects of the immersion lithography machine, do you still need to continue to insist on it?"

Wang Anran nodded and said: "Why not, Professor Liu, we can develop high-purity water medium by ourselves or cooperate with foreign countries, we can also do the same with water-weary photoresist, of course, we can also consider spraying another water-proof film on the photoresist, I haven't tried it, how do you know if it doesn't work!"

"We've tried a lot of things!"

"Then try again until you solve it......"

Wang Anran is unceremonious, as an investor, he is here to issue orders, not to bargain with you.

Immersion lithography is certainly the way of the future, and the longer the wavelength, the more pronounced the effect of the miniature will be after refraction.

In addition, the wavelength of the lithography machine can completely determine the process of the chip, and the process can also be improved by specific exposure methods.

It has been proven that the 193-nanometer violet light source can also be produced in the 65-nanometer chip process.

In the previous life, if the understanding of semiconductor chip manufacturing, immersion lithography, and multiple exposure methods can be improved, it is completely possible to transform this second-hand Toshiba into a chip processing plant that can produce 800 nanometer process, and even the more advanced 320 nanometer process is not impossible.

It's just that the efficiency of chip production will definitely be much worse, but at least it shows that we have mastered this technology.

Moreover, through this process, Huaxin Technology can also accumulate this part of the patent and set up a set of patent barriers in front of ASML.

As for the use of this set of patents, Wang Anran can't evaluate it, according to his estimate, by that time, the American government should also intervene!

There are still five years to go, and Wang Anran wrote on paper the magnetic levitation double workbench and the immersion lithography system, two future development directions.

This time he does not intend to rely on the strength of domestic research institutions alone.

"It's time to look for foreign help!"

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