"Modern lithography technology is divided into several steps, the first is the vapor phase bottom film, that is, the silicon wafer is first soaked after cleaning, baking and other processes.

Then there is rotary gluing, after the formation of the bottom film, the surface of the silicon wafer should be evenly covered with photoresist, at this time the silicon wafer is placed on the vacuum suction cup, the bottom of the suction cup is connected with the rotating motor, when the silicon wafer is stationary or rotates very slowly, the photoresist is dripping on the silicon wafer, and then the silicon wafer is accelerated to rotate to a certain speed, the photoresist is extended to the entire silicon wafer surface with the help of centrifugal action, and continues to rotate to shake off the excess photoresist, and a uniform photoresist film covering layer is obtained on the silicon wafer, and the rotation is until the solvent volatilizes, and the photoresist film is almost dry and stops。

Then there is soft baking, which is to soft bake the silicon wafer after coating the photoresist to remove the residual solvent in the photoresist and improve the adhesion and uniformity of the photoresist. Photoresists that are not soft-baked are prone to stickiness and particle contamination, resulting in insufficient adhesion and dissolution differences during development due to high solvent content, making it difficult to distinguish between exposed and unexposed photoresists.

There is also exposure, which is a process in which the surface of the silicon wafer is aligned and focused with the quartz mask, and then irradiated with ultraviolet light, the photoresist of the unobscured part of the mask undergoes an exposure reaction, and the circuit diagram is transferred from the mask to the silicon wafer.

Developing, which is the use of chemical developers to dissolve the dissolvable area of the photoresist caused by exposure, so that the visible pattern appears on the silicon wafer, and to distinguish between the area that needs to be etched and the area that is protected by the photoresist. After the development is completed, the excess developer is shaken off by rotation, washed with high-purity water, and then spun dry.

The purpose is to evaporate the remaining solvent to harden the photoresist and improve the adhesion of the photoresist to the surface of the silicon wafer.

The mold is followed by etching, which is an important process that selectively removes unwanted material from the surface of the silicon wafer by chemical or physical methods, and through etching, the desired electronic device can be built on the silicon wafer.

The last is degumming, which is to wash away the residual photoresist on the surface of the silicon wafer through a specific solvent after the etching is completed, and a small chip is basically completed at this time!"

Chengxian explained the working principle of this lithography machine very clearly, which made Zhou Ming feel refreshed.

"It's really amazing, our engraving machine doesn't have so many structures, no wonder people are so powerful, we can't compare in these small details!"

As a scientist, Professor Zhou Ming only seriously reasoned that if the United States is strong, it is strong, and if you don't admit it, you are deceiving yourself, unlike some people, who are stronger than you and don't admit it, such an attitude will never progress.

"Comrade Navy, you have been in contact with this production line for the longest time, so do you have any ways to improve it?"

Zhou Ming looked at Wang Haijun and asked.

Wang Haijun's head shook like a rattle when he heard this.

"I have a way, if I have a way, I'm a god!"

"Professor Zhou, I don't have any method, and I don't even know the composition of the lithography machine!"

Wang Haijun said truthfully.

"Well, I don't have a way, this kind of equipment can't be figured out by a few people, it seems that I can only find someone, maybe those guys can help!"

Zhou Ming said.

"Who? Professor Zhou, say it quickly!"

Liu Lang hurriedly asked, and the others were also dazzled.

"Twenty years ago, our country set up an optical equipment research and development team, and now they are all a bunch of old guys!"

Zhou Ming made a phone call.

"Old Xie, I'm Zhou Ming!"

It has been a few days since Zhou Ming made this call, not that he delayed the time, but that the other party was too busy and was not available after looking for it several times, and finally the other party called

"Lao Zhou, I know it's you......... Lao Zhou, why did you go to Shanghai when you didn't attend classes at Huaxia University?"

The other party asked with a smile.

Liu Lang was next to him, knowing that the other party's name was Xie Xide, and he was now the chief engineer of the third transistor factory in the capital, which was now the largest factory in China, with an annual output of more than 10 million transistors, and most of the transistors in domestic radios were products of this factory, and this Xie Xide, like Professor Zhou Ming, was also a semiconductor expert who came back from abroad in the early fifties, and the two were old friends for more than 20 years.

"Old Xie, isn't there an electronic industrial park in Shanghai now, and I am preparing for these things in Shanghai!"

Zhou Ming replied.

"Hmph, Shanghai has established an electronic industrial park? Why is Shanghai not the capital? The capital is not bad, right?"

When Xie Xide heard this, his tone suddenly became a little unkind.

"Hehe, Lao Xie! That's a decision of the state, not something you and I can say, besides, isn't the capital of Shanghai the same? It's all for our country! Look at me, aren't the teachers from Huaxia University also here?"

Zhou Ming said with a smile.

"You're a good guy......... Okay, what's the matter with you looking for me in such a hurry?"

"It's a good thing that I invite you to come to Shanghai to have a look!"

Zhou Ming said.

"Look, I don't know about you, a good old man, but you have a lot of flowers, you asked me to help, right?"

"I'm bored, you're so smart, there are a lot of things I can't do, so I'm looking for you to come and have a look!"

Zhou Ming was very polite to this Xie Xide.

"I don't have time, I still have a lot of work in my hands!

The other party replied.

"Something else, Lao Xie, we have that wafer production line made by islanders here, if you don't come, you'll miss it!"

Zhou Ming said unhurriedly.

When the state bought this set of equipment from the island countries, our factory was the first to propose it, but the result was that what was the ......... The Jiangnan Radio Factory has been robbed, what do they have? There is no one to ask for people, what is the result? After so many years, nothing has been done, and the state funds have been wasted...... Don't go, say nothing and don't go!"

The other party was in a hurry at that time.

Liu Lang listened to it funny, Zhou Ming told him about this, five years ago when the introduction of this set of equipment had several companies wanted, the capital of the third transistor factory as the largest semiconductor company in China, of course hope to introduce this production line with the world's advanced level, but this set of equipment is too expensive, worth tens of millions of dollars, although the state will give a certain subsidy, but the enterprise itself has to spend more than 100 million yuan, this money is too much, the enterprise alone can not be completed, can only be through the local government to help.

The capital did not pay this money, but the province of Su took out the money to buy this set of production lines, but although the Jiangnan Radio Factory got this set of equipment, no one could really operate it, but after a year of production, it was stopped because of the bad market, and it was put on for several years, if it were not for Wang Haijun and a few other people to maintain it month after month, this set of equipment may be scrapped.

From this incident, it can be seen that there is no unified plan for the layout of the country's industry, and whether a set of equipment can be used has not been figured out before it is bought first, and after it is bought, I don't know who will use it, otherwise Liu Lang would not have proposed the concept of industrial parks.

This incident made Xie Xide haunted all the time, so he became anxious when he heard this.

"Lao Xie, are you really not coming?"

Zhou Ming asked.

"Don't go, don't go, I won't go if I don't go!"

The other party said angrily.

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