Chapter 413: Lithography Machine
This production line can make 12-inch wafers, that is, 30 centimeters in diameter, and VIE's computers are now 8-inch chips, nearly double the size.
In this era, twice the size of the chip means that the computer is smaller, that is, the technology is higher, but after 30 years, the result is just the opposite, the larger the wafer, the higher the technology content.
The reason is very simple, the function of the chip in the 80s is really not good, and the PS word processing system of VIE is all the most powerful word processing programs in the world, but the function is even "garbage" in Liu Lang's eyes It's not counted, that is, the performance of computer chips in seven or eight years is much stronger than it, not to mention the chips in the Internet era, at that time, the size of the components on the chip was measured in nanometers, and the smallest components of the mobile phone chips designed by Apple thirty years later have reached a few nanometers in size, and then it will produce a quantum effect.
Therefore, the number of electronic components on the chip in this era is about the same, one or two thousand more, seven or eight hundred less, and on this basis, everyone is pursuing who can put these components on smaller wafers.
Thirty years later, the size of components has entered the nanometer level, and the pursuit is who can burn more components, so the wafers will become larger and larger, and larger chips are the embodiment of top technology.
Liu Lang also saw the internal structure of the wafer production line for the first time, and there were many equipment that he didn't understand.
Wang Haijun has studied this production line for many years, although he has not seen these complex equipment, but after comparing the instructions and finding countless materials, his understanding of the equipment is already the first in China.
Semiconductor chip production is mainly divided into three major links: design, manufacturing and packaging and testing, and chip design is mainly based on the design purpose of the chip for logic design and rule formulation.
Chip manufacturing also includes making masks based on design drawings for use in subsequent manufacturing steps, which is what Chengxian is mainly responsible for.
The production line of the Jiangnan plant is mainly for manufacturing, and this process is, in a word, to transfer the chip circuit diagram from the design mask to the silicon wafer, and realize the predetermined chip function.
How does this process work? It includes several processes, photolithography, etching, thin film deposition, chemical mechanical grinding, etc.
"Liu Lang, you see, in this production line, the highest technology content is this equipment!"
Wang Haijun pointed to a sealed instrument and said.
"This is the engraving machine, right?"
Zhou Ming said slowly on the side.
By the way, Professor Zhou, that's what we call in China, and it should be called lithography machine abroad!"
Wang Haijun replied.
"Lithography machine?"
Liu Lang moved slightly, he knew that this kind of instrument, he learned from his wife Hong Yu, this lithography machine can be called one of the most sophisticated instruments invented in human history, thirty years later, the world's only factory that can manufacture high-end lithography machines is a company in the Netherlands, they only produce a dozen units a year, each price is more than 100 million US dollars, Nikon in the island country also manufactures this instrument, but the accuracy is smaller than that of the Dutch company, but even so, the lithography machine manufactured has been booked by the world's chip giants a few years in advance, and China wants to buy the most advanced lithography machine until other companies buy it can not be obtainedThis time difference is the method of Western developed countries to suppress China, and I am afraid that you will learn the most advanced technology.
How good is the lithography machine?
Hong Yu once introduced the performance of the most advanced lithography machine to Liu Lang like a "nymphomaniac"!
For example, the light energy of the lithography machine is extremely destructive, all the parts and materials in the process challenge the limits of human technology, and even because the interference of air molecules will affect the light, so the production process must be in a vacuum environment, and the changes in temperature, humidity and pressure will also affect the focusing, so the temperature change inside the machine must be controlled at 5 thousandths, there must be a suitable cooling method, accurate temperature sensor, and more importantly, a lens and light source with high accuracy.
There are top-level lenses and light sources, but without extreme mechanical precision, it is also useless. There are two synchronous moving workpiece tables in the lithography machine, one carrier film and one film carrier, the two need to be synchronized at all times, the error is less than 2 nanometers, the two workbenches are static to dynamic, and the acceleration is similar to that of a missile launch, so that the mechanical action is accurate to the error of only one trillion seconds
Liu Lang still remembers that Hong Yu gave an example at that time, this kind of synchronization is equivalent to two large planes from take-off to landing, always going hand in hand. A knife stretched out from one plane and carved words on the rice grains of another plane, which could not be carved yet.
Of course, even a layman like Liu Lang thinks that this kind of instrument can be made by humans.
But human beings have just created it, and it will continue to develop in the future until the birth of quantum computers..........
However, Hong Yu is talking about the lithography machine after 30 years, and now the lithography machine in front of everyone naturally cannot be compared with his "grandchildren", the process of this lithography machine is only four microns, and the future is more than a dozen nanometers, the difference between the two is hundreds of times, to use machinery to describe the gap between the two, if the current lithography machine is compared to the engine of a domestic walk-behind tractor, then the future lithography machine is the engine of the space shuttle.
"This should be made into a 4-micron engraving machine, the technology is really advanced, much stronger than our country!"
Zhou Ming looked at it intently and sighed.
Zhou Ming once participated in the development of satellites more than 20 years ago and has a very good understanding of the country's semiconductor development.
The lithography machine is to coat the photosensitive glue on the silicon wafer, cover it with the circuit film designed by the integrated circuit for exposure, remove the photosensitive part, expose the silicon wafer on it for processing and final molding, in short, it is to use light for "engraving", because the electronic components are at the level of more than a dozen nanometers, where in the world can there be such a small "carving knife" can engrave these components on the wafer?
However, despite the fact that the lithography machine is so high-end, China is one of the first countries to develop such an instrument.
In the late fifties, the lithography machine was invented in the United States and then applied in practice, and in the early sixties, with the return of a large number of foreign semiconductor experts, the state also listed semiconductor technology as a national key development subject.
At that time, the country was full of talents in the field of semiconductors, and the famous scientists such as Huang Kun, Xie Xide, and Zhou Ming were all professionals who came back from abroad, and they led the country to begin to study lithography technology, when they developed germanium alloy transistors and magnetic membrane reservoirs.
In the early sixties, the United States proposed oxide semiconductor effect crystals and developed a dense circuit board of 1,000 components, which was the world's first 20-inch integrated circuit.
At the same time, China continued to use the ancient traditional photographic microscope to reduce exposure, using artificial lithography technology, that is, the coordinate value plus spraying black coated paper and scalpel, and the accuracy could also reach a few tenths of a millimeter, which was enough for the integrated circuits of that era.
By the mid-sixties, China had finally built its first contact lithography machines, and the technology was already among the best in the world.
In the past 70 years, because of the vigorous development of the large-scale integrated circuit industry, the lithography technology of the United States has finally ushered in a big explosion, entered the era of 8-micron technology, developed key process equipment technologies such as projection lithography machines, and established the world's first 12-inch integrated circuit production line in the mid-70s, that is, the four-micron process technology in front of everyone.
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