Chapter 264: Liu Lin who admits defeat
What the situation
Now in front of the drawings, I can't do this with the gourd drawing, and I'm depressed?
Liu Lin felt a sense of powerlessness, all the technical parameters are ready-made, and there are detailed processing data, not that the processing equipment is not good, the accuracy of the super machining center is several times higher than the drawings.
Now copy the data, big brother, it's all done?
What went wrong?
Liu Lin rubbed his head, leaned back in the chair and kept thinking, where is this fatal flaw?
You must know that the technical research team has been established for almost a week, and if you want people to give people and equipment to equipment, no matter what you want from the head office, you will send it over as quickly as possible!
Even Luo Xiaowen, who was about to join Liu Lin's group, was pulled into this temporary research team, and in the end, even Liu Lin was involved, and the result, alas.
During this time, Liu Ke and they tried again and again, but the result was not unsatisfactory, you must know that Liu Ke and others, just pull one out, no worse than Huaguo's academician with a special sticker.
Now that the four of them have added Liu Lin, the entire technical masters of Jiu'an Technology have participated, and they have been full of despair since they were full of hope at the beginning.
High-tech research is a bottomless pit, and this sentence was vividly expressed by Liu Lin and others at this time.
In just a few days, the temporary research team led by Liu Ke, materials, equipment, etc., has spent nearly 20 million.
If you spend it, you spend it, but the problem is, it doesn't solve the problem now!
This money is equivalent to a waste, if it continues to fail like this, let alone Jiu Technology, even if the country comes, it will not be able to bear it.
After failure, it is necessary to identify the problem and sum up the experience.
However, now I don't know where the problem is, and the Mao problem is solved.
This is just one of the technical difficulties of the plasma etching machine, like this problem of the same difficulty RDD ion laser, there are more than a dozen, this is just the problem of the RDD ion laser, not counting the difficulty, plasma etching machine and floating lithography machine!
Liu Lin thought about it, reached out and picked up the materials for the RDD ion laser on the table.
RDD ion laser, also known as PDD laser plane marker, is a very commonly used processing equipment in industrial microelectronics.
RDD ion laser, is the most common form of dry etching, the principle of which is that the gas exposed to the electron region forms a plasma, and the resulting ionized gas and the gas composed of high-energy electrons are released, thus forming plasma or ions, and when the ionized gas atoms are accelerated by the electric field, they will release enough force to bond the material or etch the surface with the expulsion force of the surface.
To some extent, plasma cleaning is essentially a milder condition of plasma etching.
The equipment for the dry etching process includes a reaction chamber, a power supply, a vacuum part, the workpiece is sent to the reaction chamber evacuated by the vacuum pump, the gas is introduced and exchanged with the plasma, the plasma reacts on the surface of the workpiece, and the volatile by-products of the reaction are pumped away by the vacuum pump.
RDD ion lasers are actually a reactive plasma process, Reactive Laser Body (RIE), Downstream Laser Body (DS), Direct Laser Body (DP).
Inductive Laser Body Etching (EDRT) is the result of a combination of chemical and physical processes.
Its basic principle is that under vacuum and low air pressure, the RF output generated by the ED RF power supply is sent to the toroidal coupling coil, and a certain proportion of mixed etching gas is coupled with glow discharge to produce a high-density laser, and under the action of RT radio frequency of the lower electrode, these equal lasers bombard the surface of the substrate, and the chemical bonds of the semiconductor material in the substrate pattern area are interrupted, and the volatile substances are generated with the etching gas, which are separated from the substrate in the form of gas and are withdrawn from the vacuum pipeline.
Liu Lin looked at it, his brows were furrowed, because he had roughly glanced at it twice, he didn't look at it in detail, and the difficulty of it can be said to be very vague, after all, all the information is ready-made, no design is required, and there is no need for research and development, just follow the drawings to make it!
It seems that I think it is simple!
Liu Lin rubbed his temples with his hands, felt the pain in his temples, spit out a breath of turbidity, and flipped the information down!
Liu Ke and the others saw that Liu Lin was seriously flipping through the information, so they carefully observed the accessories on the table again, hoping to find out what the problem was.
The ED equipment mainly includes four parts: pre-vacuum chamber, etching chamber, air supply system and vacuum system.
Pre-vacuum chamber: The function of the pre-vacuum chamber is to ensure that the etching chamber is maintained at the set vacuum level, not affected by the external environment (such as: dust, water vapor), and isolate the dangerous gas from the clean workshop, which is composed of a cover plate, a manipulator, a transmission mechanism, an isolation door, etc.
Etching cavity: Etching cavity is the core structure of ED etching equipment, which has a direct impact on etching rate, verticality and roughness of etching, and the main components of etching cavity are: upper electrode, ED radio frequency unit, RT radio frequency unit, lower electrode system, temperature control system, etc.
Gas supply system: The gas supply system is to deliver various etching gases to the etching chamber, and accurately control the flow rate and flow rate of the gas through the pressure controller (P) and mass flow controller (F).
Vacuum system: There are two sets of vacuum systems, one for the pre-vacuum chamber and one for the etching chamber.
The etching cavity is the assembly that is now stuck on the table.
Now the etching cavity is stuck in Liu Lin, and there are more than a dozen combinations of the same difficulty such as the exposure lens and the D camera.
The RDD ion laser process technology accuracy is 01μ!
When Liu Lin saw the accuracy, his temples couldn't help jumping again, you must know that the accuracy of the super machining center is only 0001, and they are all at the same level.
the groove
Liu Sen almost burst into a foul mouth, it's too cheating, it's weird if there is no problem, with the current technology, it basically can't be processed.
The super machining center is still used as a cheating method to get it out, okay, now I want to process it directly to 01μ, think too much, and put more pillows when I sleep at night.
There is everything in the dream, Liu Lin sees this, and he is basically sure that it is not that his technology is not good, but that the equipment he uses is not at all, and there is no way to manufacture the RDD ion laser.
Because it's not a one-level thing.
There is a family in the world, and if anyone can make it, Liu Lin can call him father directly.
Liu Lin glanced at the last page, which he didn't want to read, so let's take a second look, at least he knows what difficulties are waiting for him in the future!
Three minutes later, Liu Lin put down the information in his hand.
"Did the boss find anything?"
"It's me who thinks about the problem simply!" Liu Lin pondered for a few seconds, and finally said helplessly: "The H screen is much more difficult than I imagined, whether it is the material problem or the processing technology!"
"Now we are stuck in the basic processing technology, my microelectronic processing process is also because of material problems, the backup card has to move, now H screen a system technology, now there is no matching, all the technical infrastructure equipment is developed by ourselves!"
"We are a company, and it is very difficult to gnaw down the whole system technology, and you can see it now, just one assembly makes us stumped!"
"It's just the beginning, there are such problems, and who knows how many similar technical problems there will be later. Liu Lin rubbed his face vigorously with his hands and made himself sober!
"Boss, what should we do now?" Wu Can put down the accessories in his hand and thought for a while: "I think the problem is not in our materials, but in our equipment, I can't look at the details of the RDD ion laser more than five times." ”
"Although the above accuracy, logically speaking, our super machining center can be achieved, but it is certainly impossible to achieve the ideal accuracy in the middle of processing, let alone dozens of external parts together!"
"So I think it's the equipment that stuck us, and these accessories should have fatal defects, but our measuring instruments can't measure it at all, so we think it's qualified, and that's the only explanation!"
"You're not wrong, it's supposed to be this question, so"
"This means that our equipment is not up to the mark, or that we are missing some equipment to find the problem. Liu Lin took a deep breath, stood up and glanced at a few people, and then continued: "H screen research and development, just pause first!"
"Now you give priority to building a supercomputing center and a smelting laboratory, and then I will think of a way to solve the equipment, and then slowly solve the problems one by one, I was anxious before!"
"It's a whole processing level. Liu Lin finally reluctantly admitted his failure.
"Boss!" Wu Can heard Liu Lin's words and asked, "Yewu, we can look at this problem from a different angle." ”
Liu Lin looked at Wu Can.
Just when Liu Lin and others lost their hair for the combination!
Zhou Ying has already taken the expert group from the head office to the Shanghai Pudong Assembly Center!
When Zhou Ying communicated with Zeng Tian on the phone, the two pilots who served as the main and co-pilot were completely appointed by the above, and they didn't say anything, and the pilots thought that Liu Lin should not be able to go abroad in his life anyway.
So it doesn't matter who is the pilot, but it's okay for the pilot to be delegated, but not the flight attendant.
Although Liu Lin didn't say what requirements he had for the flight attendants, as long as he had a good image, let himself watch it.
Zhou Ying couldn't make up her mind about Liu Lin's request, looking for a young and beautiful woman, this should be a must, you can't find a forty-year-old woman, although Liu Lin let herself make up her mind, but you have to consider the image issue.
Before, Liu Lin asked the personnel department to screen it first!
Zhou Ying flipped through the information in her hand, there were a total of 6 people, all of them were first-class beauties, and the corners of her mouth couldn't help twitching, in fact, when the information was handed over to Zhou Ying this time, Tan Qiang handed it over to his subordinates who let him help!
When Tan Qiang received the notice that Zhou Ying was attending on behalf of Liu Lin this time, after handing over the flight attendant's information, the whole person was confused.
Flight attendants, they must be beautiful, whether it is the figure, appearance, skin color, or personality, they all belong to the category of image. After receiving the task assigned by Liu Lin, the company's personnel department naturally had to screen according to the strictest standards.
In front of the boss lady, find the most beautiful beauty for the boss as a flight attendant, isn't this looking for a draw, passing a pass first is a level, as for whether the boss lady will find trouble with herself, then let's talk about it later.
After Zhou Ying and others landed from Shanghai Pudong Airport!
Zeng Tian led a group of people to wait in the airport with a team of black luxury!
"Hello Manager Zhou, we're meeting again!" Zeng Tian saw Zhou Ying walking out of the VIP passage with a group of people, and hurriedly greeted him!
It stands to reason that for just one plane, Zeng Tian can send someone to pick it up, and there is no need to make a big deal to pick up people at the airport in person!
But considering that Zhou Ying came on behalf of Liu Lin, Liu Lin is the boss of Jiu'an Technology, and Zhou Ying is the boss of Jiu'an Technology, this is no longer an ordinary handover ceremony.
"Hello Mr. Zeng, I haven't seen you for a long time, why are you embarrassed to trouble you to come in person, you just find someone to take us there!" Zhou Ying hurriedly took two steps forward, held Zeng Tian's hand, and said politely: "Isn't this killing me?"
"Manager Zhou, don't say that, if Mr. Liu comes, I guess don't talk about me at that time, even the leaders of Shanghai will come!" Zeng Tian smiled and said, "Manager Zhou, I'll introduce me first!"
"After more than ten minutes, I finally introduced the person!
Zhou Ying could only shake hands one by one with a smile, because at this time, Zhou Ying represented Liu Lin, and the image of Jiu'an Technology, she could only shake hands with everyone one by one!
"Manager Zhou, let's go, it's twelve o'clock now, I'll take you to dinner first, after eating, let's go to see the plane, how about it?" Zeng Tian very politely invited Zhou Ying to his car in the VIP channel!
"Then it's troublesome Mr. Zeng!" Although Zhou Ying didn't feel the food now, there was an elderly man in the expert group he led, so he nodded and agreed!
"Okay, I'll take you somewhere. After Zeng Tian finished speaking, he said to the driver who was driving: "Go to Xianhu Farm!"
"Okay Mr. Zeng!" The driver didn't look back, and started the vehicle slowly!
"Mr. Zeng, I have something I want to ask you?" When Zhou Ying came, Liu Lin explained and asked if he could book two or three more planes, because the company is too far away from the industrial park, the company is developing faster and faster, getting bigger and bigger, and there are often people who have to travel or something, so I want to prepare two/three business jets for the company.
"What do you say about Manager Zhou?" Zeng Tian heard Zhou Ying's words, nodded with a smile, looked at Zhou Ying's moon-like face, and stretched out his hand after speaking, found the Xiaoice box behind him and said, "Manager Zhou, what water do you want to drink?"
"A bottle of mineral water. Zhou Ying turned his head, glanced at the Xiaoice box sitting back, and said, "You also know that our Jiuan Technology industry is now distributed in various places, and it is often inconvenient to fly around!"
Zeng Tian nodded, did not speak, took out a bottle of mineral water from the refrigerator and handed it to Zhou Ying, waiting for her next words.
"Before coming, Liu Lin asked me to ask if your company has any planes left, and he wants to buy two/three more as my company's business jets!" Zhou Ying unscrewed the lid of the mineral water bottle and took a sip of water after speaking.
"Buy two/three more" Although Zeng Tian listened to Zhou Ying's previous article, he probably had a score in his heart, but he was a little surprised to hear Zhou Ying say to buy two or three more!
This is not a car, there are several of them when you buy them!