Realizing that Liang Yuan was in a daze, the two girls knew that Liang Yuan was distracted again and thought about what he had just said he had forgotten suddenly.

The twins bit a straw, nodded their heads absentmindedly, poked the bottomed glass of "grape soda" with the straw, and stared at Liang Yuan with a very curious gaze.

"Jiajia, did you think of something about the pig's head?"

"Hmm~, it looks like it. ”

Curiosity is curiosity, the two girls who were afraid of disturbing Liang Yuan's train of thought just chatted quietly, and keenly helped Liang Yuan pay attention to the surroundings, afraid that the acquaintances who came to say hello would interfere.

After about five or six minutes, Liang Yuan, who was thinking about it, frowned, stretched out his hand and patted the table in front of him, and because of his strength, the wine glasses on the table were shaken a little displaced.

"Xiaoyuan, do you remember?"

The twins asked in unison.

"Hmm~!"

Liang Yuan nodded heavily.

"What did Xiao Yuan remember?"

Ning Wanjia asked curiously.

"Well, let's go, go downstairs with me and say~. ”

Liang Yuan took the hands of the two girls and got up and walked downstairs.

The two girls followed Liang Yuan out of the cafeteria and walked along the path to the lake, Liang Yuan pointed to the starry lake and said with a smile: "Ming'er built a two-ton medal and threw it into the lake to reward the inspiration of Nanhu." ”

"Xiaoyuan, what is it?"

The two girls stared at the lake in confusion, and they didn't understand what inspiration this ordinary lake could see.

"Wait a minute, wait a minute, you two will understand when the car comes~. ”

Liang Yuan said with a smile.

The test intensity of the maglev train was very strong, and the three of them stood by the lake for about five minutes, and a three-car reconnected blue maglev capsule train turned out of the jungle on the south side of the lake shore, and in a few breaths it was on the track of crossing the lake.

Liang Yuan wanted to share his joy with the two girls, and he didn't use physical concepts such as refraction and reflection to explain the inspiration he had just recalled, so he decided to repeat reality in its original form.

"Take a closer look at the projection of train lights on the lake~"

Liang Yuan pointed to the blue light spot projection left by the maglev capsule train on the lake and said quickly.

"Look closely, is the projection on the water surface constantly fluctuating~"

"Well, it's a huh~"

"The reason for the fluctuation is probably the wind blowing. ”

"Look at the change in the size of the spot, whether it will be similar to a square and a rectangle~"

Liang Yuan gave a hint.

"Well, yes, it's just not obvious. ”

"If you think of the maglev capsule train as a light source, what can you two think of with this projection of light that constantly changes in width?"

This thing was originally caused by the lithography machine, and the two girls would naturally lean on this topic for the first time, and the twins stared at the projection on the water for a few seconds, and then reminisced.

"Xiaoyuan, you mean to change the line width of the light source with water~"

"Changing the output of the light source by refraction~"

The twins' academic performance has always beaten Liang Yuan, and the refraction of light is not a particularly abstract thing, under Liang Yuan's more obvious prompts, the two girls guessed the key point that Liang Yuan said almost at the same time.

"Ah~ah~ah~ The pig's head is so powerful!"

"Ah, the pig's head is finally reliable once, so many people in Gangji Power Collection haven't come up with the idea of starting from this direction. ”

The two happy girls raised their heads slightly and rewarded Liang Yuan's two kisses.

"I'm just a principle, it's hard to say if I can really use it, I still have to find someone who understands it tomorrow~"

Liang Yuan said proudly.

When the three of them returned home from the lake, it was already the second half of the night, and the elders of the two families were all left on Hong Kong Island by the three of them, and after washing, Ning Wanfei, who said good night, was in a good mood, and before closing the bedroom door, she also asked Liang Yuan if she wanted to come over to lay the floor, looking at Ning Wanjia's smiling appearance, Liang Tuhao was scared and fled.

The next day, Liang Yuan, who had something in his heart, didn't bother to appease the fire trio, and handed over the work of explaining the matter to Wang Mengmeng and the three to the two girls, Liang Yuan got up early and went directly to Gangji Electric, and still arrested Wang Xin, Liu Feiyang, and Nie Xiaotian to a small conference room for a meeting.

"Da Shao, where did you pick up people today?"

Liu Feiyang found that the lineup for the meeting was the same as yesterday, and told a joke with a relatively low temperature.

How can there be a lithography machine every day, Liang Yuan has encountered such an experience in his two lives, Liang Yuan looked at Liu Feiyang angrily.

"Nie Xiaotian, go and lock the door, the kind that is open in the house. ”

As soon as Liang Yuan's words came out, the trio of technical bosses knew that the matter was serious.

"I'll do it~"

Liu Feiyang put away his relaxed attitude and quickly locked the door of the small conference room into the kind that was opened manually.

"Yesterday, when I listened to everyone discussing the 193 light source barrier, a thought flashed in my head~"

Liang Yuan didn't pave the way and went straight to the point.

"But this inspiration just flashed, and then I forgot about it~"

Liang Yuan made a helpless expression.

Although the trio of technical bosses didn't speak, their expressions were all very unified "Special meow teasing me".

"I went to the cafeteria to eat with the two girls at night, and I have been thinking about this in my heart, the feeling that I forgot something but can remember it right away, you have all experienced it, I was like that last night~"

"Fei Fei saw that I was in a lot of pain, so I opened a few bottles of grape soda~"

Although Liang Yuan made up chicken soup for the soul seriously, as soon as the term grape soda came out, a low laugh still sounded in the small conference room, and Ning Wanfei's grape-flavored soda had become a very famous "stalk" in Yuanjia.

"Hahaha, don't laugh~, have a meeting~. ”

Liang Yuan himself laughed.

"Grape soda is still useful, as soon as people enter a slightly drunk state, the vision of seeing things will inevitably be distorted and distorted~"

Liang Yuan Balabala looked at the light spot projection of the maglev capsule train, and the width of the lake changed and then associated with the liquid refraction and the lithography machine lens.

Before Newton, countless people were smashed in the head by something and didn't find gravity, before Liang Tuhao, countless drunkards were drunk and didn't think of the line width of the lithography machine, Liang Yuan felt that this pot of chicken soup was stewed quite stylishly.

"You say, if you throw the wafer in water, will lithography help increase the NA value~? ”

Liang Yuan asked fakely.

Except for particularly extreme conditions, the laws of physics will certainly not change, and wafer loss in water will of course increase the NA value of the lens in disguise.

"!"

The trio of technical bosses were all frightened, and Liu Feiyang and Nie Xiaotian didn't even hold back their tone and words that didn't meet social expectations.

Wang Xin completely looked like the world had changed so much, as if he had suddenly seen a ghost.

There was silence in the small conference room, and I don't know how long it took, Wang Xin muttered: "Da Shao, I completely believe that you are a scientific genius who has been delayed by making money." ”

Liu Feiyang let out a small "uh", and swallowed back the words that he almost blurted out that Da Shao really had mascot attributes.

Last night, Liu Feiyang and Nie Xiaotian finished entertaining Fang Weilin and his party, and when the two went home together, they also smiled and said that Hong Kong-based collectors have mascot attributes, and the 193nm light source barrier must be broken by us.

Once the water is added to the camera, the back is almost a flat river, and the trio of technical bosses can calculate the prospect of this thing by taking a piece of paper at will.

The refractive index of water is 1.44, and the linewidth of the wafer production line currently operated by Gangji Collector is 5 microns, if you lithography directly in the water as Liang Yuan said, you don't need to change the number of lenses of the lithography machine and replace the new light source, you can directly change the line width to 3.5 microns.

"Da Shao's idea is simply genius~"

"Ten years ago, there was a route dispute between dry etching and wet etching, and as a result, dry etching eliminated wet etching. ”

"Lao Nie, you can't say this, the image point says that dry etching and wet etching are flushing, and Dashao is completely different from this. ”

Lithography machine and etching machine are the core equipment of the wafer production line, because the technical principle of wafer production originated from the camera, so the lithography machine can be approximated as shooting, etching machine as processing, and the processed wafer is the photo.

In the mid-seventies, the mainstream etching machine used liquid chemical solvents to flush the photoresist after the wafer was exposed by the lithography machine, so it was also called wet etching, and in the late seventies and early eighties, Toyo Nikon used a gas-flushed dry etching machine to develop and mature, and it only took a few years to eliminate wet etching with complex operation and serious corrosion pollution.

Unfortunately, for more than 20 years, no one in the whole of Toyo thought of moving the wet process to the previous production link.

Generally speaking, there are three technical routes for immersion lithography:

The first is the spray method, as the name suggests, it sprays water onto the wafer and then quickly takes it away, the common spray method process is to set an ultra-precision nozzle on one side of the lens, spray the water under the lens with the lens processing movement, and then suck the water away from the other side of the lens.

This method has extremely high requirements for ultra-precision processing ability and computer control ability, and the stable establishment of that layer of ultra-thin water film in the working area under the lens is not as simple as the production of lithography machine, if the ability of precision processing and precision control is not good, it will lead to poor exposure of the wafer edge, which will seriously affect the yield rate of the wafer production line.

However, the biggest advantage of the spray method is that it can make full use of the existing equipment, and it can be said that this set of water spray and water absorption equipment is completely independent of the wafer production line, and is only linked with the lithography lens, and the difficulty and reconstruction cost of the wafer production line technology upgrade are extremely low.

The second method is called the bathtub method, which is similar to the inspiration that Liang Yuan just said, that is, the entire wafer is thrown into the water, and the container for the wafer → the bathtub moves with the wafer workbench.

The advantage of this method is that the technical difficulty of the project is low, and it will not have a negative impact on the yield rate of the wafer production line, but the disadvantage is that to make large changes to the existing wafer production line, a new photoresist that can work in water must be developed, and the wafer workbench must be improved, and due to the increase in the weight of water on the wafer workbench, the production cycle of the wafer production line will also change, and the production efficiency of the wafer production line will be reduced to a certain extent compared with the spray wafer production line.

The third method is called the pool method, which is to throw the entire lithography program into the water to complete, although this method can minimize the line width, but the operation in the water is equivalent to the development of a new wafer production system, both the engineering difficulty and the economic cost are too high.

After the new century, the international mainstream route of immersion lithography machine adopts the spray method, but in terms of the current strength of the Hong Kong-based power collector, the second bathtub method is the most suitable, after the new century, Nikon and Esmore chose the spray route, one is that the level of precision machining and precision control of the two is high, and the other is that most of the existing lithography equipment in the world is sold by these two companies, of course, the lower the upgrade cost, the simpler the upgrade method, the better.

At the beginning of the 90s, the demarcation between process technology and chip design was far less clear than in the future, and although the trio of technology bosses are currently focusing on chip design, all three of them know the wafer process well, and it is definitely more than enough to be a line leader on that production line.

Liu Feiyang wrote most of the equations on the paper, and then looked up and said to Liang Yuan in an unbelievable tone: "Da Shao, if the equipment imported from Siemens is put into production, and the idea of Da Shao is put into the production line, we will directly catch up with the international advanced level~~"

The torch plan of the republic led by Gangji Jidian belongs to the category of basic scientific research, and there is no secrecy at all, and the financial audit of Gangji Jidian is cross-audited by a third-party accounting firm, and Liang Yuan intends to purchase a large number of domestic 5-micron wafer production lines, which cannot be hidden in the financial statements.

Of course, although the introduction of third-party accounting firms is not conducive to corporate confidentiality to a certain extent, it still has a very promoting effect on the introduction of technology for international exchanges.

With the mature mass production of the 5-micron wafer production line of the Hong Kong base collector, the overseas electronics industry giants at this time have realized that the 3 micron line width may make a breakthrough for the Hong Kong base collector at any time, once the Hong Kong base collector independently breaks through the 3 micron process technology, the 2 micron overseas process technology is likely to be unnecessary to spend a lot of money to introduce.

Therefore, this time Su Liangyu and others went to Siemens to negotiate, and were received by Siemens Semiconductor very warmly, and the attitude of three months ago was almost like two people, and even Siemens promised to lobby within the European electronics industry to strive for the removal of 2-micron process technology from the monitoring list of Batumi as soon as possible.

In fact, even if Liang Yuan did not interfere with history, in the second half of '91, the Batumi organization itself began to discuss the feasibility of giving the green light to the Republic of China for the 2-micron process technology.

However, at that time, the background of the relaxation policy was that the polar bear collapsed violently, and the republic went north to dig into the wall, and the overseas electronics group was afraid that the republic would borrow the polar bear's electronics industry talents to rise rapidly, so they decided to relax the export standards of technology to influence the republic's electronics industry policy.

"The most advanced 0.5 micron process overseas has not yet been put into production, and the most advanced production lines that have been put into operation are only Toshiba, NEC, Motorola's three 1.0 micron line, according to Intel's technology roadmap 0.5 micron production line will not start running until the third quarter of next year, Mr. Su is talking with Siemens about the 1.5 micron line, if we move a little faster, on the basis of the 1.5 micron process, we can directly advance the process line width to 1 micron, overseas electronics groups are afraid to go crazy~"

In the nineties, the technical generation difference of the electronics industry of the overseas suppression of the Republic was basically stable at three generations, if the process line width was directly made to 1.0 microns according to what Nie Xiaotian said, it would really step on the tail of foreigners, and it must be really crazy.

"These are said separately in advance, first make a simple framework out, write any precautions now, and then go to the laboratory pilot workshop to try the idea I said. ”

"Even if it can be done, don't change the equipment of foreigners, we directly change the convenience of domestic production, 5.0 line width and 3.0 line width can really be said to be two kinds of chips, even if the overseas line can be changed successfully, it will be a little more output, except for the false name, it is useless. ”

Liang Yuan rejected Nie Xiaotian's hypothesis.

"Let me mention it first, the first water purity problem, the bubble impurities in ordinary water or something will definitely seriously affect the yield rate, we can use ultrapure water, I estimate that the ultrapure water used in the general laboratory is likely not to be, and the purity of the top one is at least six or nine, but the source of this thing still depends on the big or small~"

The purity of ultrapure water mentioned by Wang Xin is almost microscopic to the molecular level, and at least all the heavy water in the water must be separated, and the only department in the Republic that can produce this thing is the Ministry of Nuclear Industry.

Generally speaking, the kind of ultrapure water that Wang Xin wants is a by-product of separating heavy water, which is estimated to be produced on two hands in the world, and the price of heavy water in the nineties was 5 yuan per milliliter, and the value of this by-product is really impossible to measure

"I'll solve this problem. ”

Liang Yuan was resolute and resolute, and directly copied the phone contact Ning Lei, who was on vacation on Hong Kong Island.

The two middle-aged women wanted to enjoy the skyline swimming pool at home, so Ning Lei and Comrade Lao Liang didn't go anywhere, and Liang Yuan found someone as soon as possible.

"How did Xiaoyuan think of calling Uncle Ning, could it be that he was burned too badly and was expelled from Dongda~. ”

Ning Lei laughed and joked with Liang Yuan, but for Liang Yuan, Ning Lei's first sentence directly talked about the sky to death.

This is simply a thing, although the future of sharing the table with the two girls is very worth looking forward to, but how to explain this matter to the family Liang Yuan has a headache when he thinks about it.

"Uncle Ning, I'm holding a technical meeting here at Gangji Power Collection, if nothing else, the level of secrecy in the future should be top secret. ”

Liang Yuan decided to ignore the fact that he was sent back to high school for the time being, and used his job to deal with his family first.

"Oh, what does it take to say it directly. ”

As soon as he heard that it was top secret, Ning Lei knew that it was impossible for Liang Yuan to joke about this kind of thing, and his attitude suddenly became serious.

"Gangji Collector is engaged in a technology that can catch up with the world's top process linewidth, which requires ultrapure water at the molecular level, preferably a by-product of heavy water separation~. ”

"How much do you need?"

Ning Lei was concise and to the point.

"How much do you need?

Liang Yuan turned his head and asked the trio of technical bosses.

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