Director Yigu agreed to open the staff files of the whole institute to Chongguang and hold a general meeting of all employees, which made Hu Yiting satisfied, so everyone continued to discuss the equipment of the wafer factory and the technical reserves of the 214 Institute. Director Gu has gradually gathered a group of engineers in the institute, as many as fifteen or six, all of whom looked at Hu Yiting and Kang Yaoxiang curiously, and listened carefully to what they said.

Kang Yaoxiang was not frightened, standing in the corridor of the dust-free workshop, pointing to the lithography machine in the workshop through the wall glass and said: "As a test line, 1.5 microns is still conservative.

Now Chengdu Institute of Optics and Mechanics has come up with a 0.8 micron step-by-step repeated projection lithography machine, in January this year with a good success rate of more than 80% of the process tape-out through the national acceptance, is currently in the Beidu Microelectronics Center for equipment installation and commissioning.

According to the plan, they plan to start the process assessment of the '0.8 micron CMOS complete process' of domestic equipment before the end of this year, about November and December, and it is expected that it will be known within half a year.

At that time, our country will officially have its own 0.8 micron process full set of production equipment and manufacturing process! I think this assessment will be able to pass! The reason is very simple, at present, the 0.8 micron process technology has been passed by the experiment of high yield rate in the Institute of Microelectronics, and this period of time after the inspection of 908 Huajing project, it can fully meet the production and manufacturing tasks of high yield rate!

Huajing Factory currently produces our Chongguang CMP1J1 chip with 0.8 micron process technology, with a yield rate of more than 70%, and has also successfully transplanted the one-micron process Youying Overlord chip to the 0.8 micron process, reaching a yield rate of more than 60%.

Therefore, optimistically, China has basically mastered the independent technology of 0.8 micron process technology and equipment manufacturing, but the only lack is the IC design ability under the 0.8 micron process, and only we have a deep foundation and successful experience in this regard, after all, there are too few test lines available for use, and the few IC design units do not have strong process reserves, and the research and development experience is much worse than that of foreign companies.

In order to maintain our leading edge, we must continue to continue to develop new processes, not be satisfied with the design of the 0.8 micron process, but also reserve technology and test parameters for the future 0.35 micron process.

Therefore, after discussing with me, Mr. Hu decided to improve the technology of your 214 line, and planned to place an order with the Institute of Optoelectronic Technology of the Chinese Academy of Sciences, that is, the Chengdu Institute of Optics and Mechanics, to install their 0.8-1 micron step-by-step repeated projection lithography machine simultaneously with the Beidu Microelectronics Center. ”

Director Gu praised when he heard this: "I know that your Chongguang Company is the only enterprise in China with 0.8 micron integrated circuit design technology, and we are also very curious about how you plan to do it, can you talk about it? ”

The engineers of the 214 Institute also nodded, curious to know how Chongguang planned to renovate this line.

Hu Yiting saw that all the engineers present were there, so he said frankly: "We plan to order a set of high-parameter standard objective lenses from Changchun Optical Machinery Institute, with a reduction magnification of about eight to ten times, to replace the five-fold objective lens on this lithography machine of Chengdu Optical Machinery Institute."

Of course, this cost is very large, but now I already have a preliminary design plan for the new objective lens, and after I have roughly figured out the design ideas, I will send someone to talk to Changguang, no matter how much money it is, I must always make things at any cost.

Of course, after changing the objective lens, the yield rate is definitely not guaranteed, but since it is a test line, I don't care about this problem.

In addition, there are many ways to improve the manufacturing process, such as controlling the thickness of the photoresist, or replacing the domestic rubber with imported rubber with higher lumens, and then designing a more accurate stepper motor to improve the accuracy of overlaying, or simply reducing the size of the image field, etc., etc., etc., there are all kinds of means, anyway, everyone here is an expert, and they should be no strangers to these. ”

An engineer said: "Mr. Hu, you are young, but as soon as I hear you speak, I know that you are an expert, it is really not simple! Are you really only 17 years old?"

"Hahaha......"

As soon as these words came out, a good-natured laughter immediately sounded in the corridor of the workshop.

Hu Yiting smiled and said: "I'm a genius, Secretary Jiang Shui admits this, can't you still believe me?

An engineer said: "Hello Chief Engineer Hu, my name is Xi Longshan, I have read your Poincaré conjecture, but I can't understand it after reading half of it, I am ashamed, but I believe that you are a genius, really! You are amazing!"

Hu Yiting asked: "Xi Gong, do you want to stay?"

Xi Longshan said: "I originally wanted to go to Luzhou, after all, it is a big provincial capital, but after reading your "Poincaré Conjecture and Geometric Conjecture Complete Proof", I am still very excited, I feel that you Chongguang has a strong core technology, after all, several chips and program-controlled machines you designed are now very famous, so I took the initiative to apply to stay." ”

Hu Yiting and Kang Yaoxiang said almost at the same time: "Welcome to Chongguang!"

Xi Longshan seemed to want to test Hu Yiting and Kang Yaoxiang, and asked: "Chief Engineer Hu, Chief Engineer Kang, our lithography machine is also Chengguang Institute, since the line width has been adjusted from 3 microns to 1.5 microns, the heating problem of the lens is very serious, you will have to replace the five-fold objective lens with 8 to 10 times in the future, so how do you plan to solve the problem of heating the exposure energy, which causes lens distortion and bias after heating, and does this for a long time, it will destroy the equipment." ”

Hearing Xi Longshan's difficulty, a colleague immediately participated: "Hello Hu Gongkanggong, my name is Wang Xuanyu, and I am also a senior engineer of the 214 Institute, I would like to ask if you have any way to solve the development defects caused by photoresist?

Gu Xiasheng was startled when he saw this battle, and said in his heart Isn't this a difficult person, no matter how high this Hu Yiting's level of mathematics is, he can't deal with you group of senior engineers who specialize in the art industry! Senior engineers are at the level of associate professors, and senior engineers at the researcher level are at the level of full professors. Good guys, half of this group of people are full professors, and the remaining half are associate professors, if you ask a question, this Mr. Hu can't answer it even if he has three heads and six arms! Although he is a world-class mathematical genius and is proficient in IC design, it is impossible for him to know as much about the process as you do!

"Don't embarrass Mr. Hu and Mr. Kang, these technical problems are common to all wafer factories, you ask like this, how can Mr. Kang and Mr. Hu answer!"

Kang Yaoxiang also smiled wryly, and said that this is really not easy to answer, after all, each factory has its own process, and the solution to the problem is different.

Just when Kang Yaoxiang was hesitating what to say, Hu Yiting opened his mouth very seriously.

"What's so difficult about this, the lithography machine lens is a large combination lens, there are more than ten or twenty lenses alone, and the sleeves are one after another, and it is impossible to completely avoid geometric distortion, which problem is available to any lithography machine manufacturer.

As a lighting source, the high-pressure mercury lamp has a high energy, and the shutter speed at the time of exposure is only a few tenths of a second, which will naturally lead to the geometric distortion of the lens assembly that is instantly heated and cooled, but these are engineering problems, we don't think too much about the manufacturing process, don't complain that the machine is not as good as foreigners, if the machine is as good as foreigners, what do we want us to do!

First of all, we must find out the image field characteristics of the distortion, so as to find the alignment point with the smallest distortion error when the lens is focused, which not only requires us to experiment again and again to find the distortion image field characteristics of each lens, but also to improve our silicon wafer positioning system, improve the accuracy of the laser interferometer, and ensure that the distortion is controllable.

I'll just talk about this one idea, and I won't say anything more, it's all technical secrets.

As for the development defects caused by photoresist residues, it is easier to solve, I repeat that we are engaged in the process, not chemistry, how the photoresist will evolve in the future, whether it is polyvinyl alcohol cinnamic acid, epoxy rubber diazonaphthalene, or phenolic resin, it is all a problem for chemical companies, and how they improve the formula, that is not a problem for us to care about.

In order to completely degum, my idea is to put on a double layer of glue to reduce the reflection of the adhesive film on the light source, that is, the idea of using anti-reflective agents to solve the influence of colloidal residue on exposure, one of which is the decomposition of acid gas under exposure, which can completely remove the residual glue and solve the problem of residual glue affecting the exposure, so as to solve the development defect.

Well, I'll just say so much to see, as for how to do the specific double glue process, that's all technical secrets, I can't say.

In short, after breaking through these two processes, it is not a problem for the process technology to go straight to 50 nanometers! In the future, we will focus on these two points in the process technology!!

You must know that before Hu Yiting joined Huachuang as the chief designer of Tiansi 930 chip research and development, he was in Puhai Microelectronics Equipment Group in charge of the combination of the manufacturing of integrated circuit production equipment and the production process, and was responsible for designing the best solution for the integration of advanced process equipment such as lithography machines and specific IC production processes! If you talk about the understanding of the process technology of the wafer factory, he is the number one academic authority on the earth in 1996.

What he just said was completely in accordance with the technical route of the future of the world's process technology, which can be described as a technical insight from a high position, just like the water flowing down the roof tile so unstoppable!

In recent years, the domestic process technology is still far worse than that of the West, and the West's technological blockade of China has caused a large number of domestic technology gaps in this regard.

For the engineers present, Hu Yiting's words were as impactful as a waterfall that flowed straight down 3,000 feet, and it was like a thunderbolt from the sky to their ears, and everyone felt that Hu Yiting's way was really evil! It was really wild! But it seemed to be full of inspiration that made people get goosebumps! It was as if a shining door had opened in front of everyone's eyes! Behind the door was a mountain of rare treasures that were shining brightly!

After Hu Yiting lowered his head and finished speaking, he raised his head and saw that everyone was looking at him excitedly and uneasily.

Hu Yiting, who thought that everyone didn't believe him, began to get annoyed, and shouted loudly:

"What's wrong? Am I wrong? Who is not convinced to stand up and tell me your solution!

Too young, too simple!

I can't be wrong with Hu Yiting!

As long as you do it with me!0.35 microns, that's a piece of cake!

50nm ...... Just around the corner!!"