Chapter 89: Fan Xuedong
Changsheng Seiko, the leader of this research and development is Guo Dong, he waited for the boss and Mr. Wu to leave, and then continued to preside over the meeting.
He is the specific executor, and of course he has to arrange things in more detail.
"Knock knock" He also followed the boss's example and tapped on the microphone. After seeing that his colleagues stopped talking and focused on themselves, they began to say: "The equipment developed this time is very complicated, and it is not as simple as the boss said. I have just thought about it carefully and decided to make the following arrangement. First of all," he pointed to a young man in the front row, who was about 25 or 6 years old, and said, "Zhao Donghai, you take two people to the non-Quanquan research institute to get a few monocrystalline silicon rods back, and invite at least one researcher to come over, they are experts in this area, and we still have many questions to ask them." ”
Immediately afterwards, he ordered two more young people and said, "Wang Qingsong and Zhang Xiaolu, the two of you went to the Electronics Research Institute and the soft news company at the headquarters respectively to ask them to send people." They are also the main force in this research and development. ”
After saying this, he stood up and said, "Let the meeting be dismissed now!" But be careful, there will be a meeting in the afternoon. "The meeting was dismissed" He followed the example of the boss again, and walked out of the venue as he spoke.
After Guo Dong returned to the office, he only waited for more than two hours before people from other research institutes and soft news companies came.
Everyone knows that the boss attaches great importance to it, and Lu Rucheng personally brought all the people to the soft news company. The Institute of Electronics is also the second person Zhang Dongfang and Wu Man to personally bring a few people here, and the Institute of Non-metallic Research Institute only has one person, these equipment have little to do with them, and it is not easy to send a person.
The person from the Institute of Non-Metals was called Fan Xuedong, because he was a guest, Guo Dong shook hands with him first, and said kind words in his mouth: "Welcome, welcome!"
Then he said to the others, "You are all acquaintances, so I won't shake hands one by one, let's hurry up." Now that Mr. Fan is here, let's first open a monocrystalline silicon rod and see if there is anything we don't understand to ask for advice in person. ”
"Yes, yes, Minister Guo is right, let's hurry up and get started! It's shameful to waste time. Lu Rucheng made a joke with him. He said with a funny expression.
"Hahahaha!" the rest of the office burst into laughter. The people who came this time except for Fan Xuedong were all acquaintances, and they were all Guo Dong's subordinates before, but now they are no longer under his control, so it is rare to be presumptuous.
But the technicians of Changsheng Seiko didn't dare to laugh, and they could only hold back if they wanted to laugh. In accordance with Guo Dong's order, they hurriedly unpacked the outer film packaging of the monocrystalline silicon rods.
Everyone squatted down to look at it, and found that the whole silicon rod was of different sizes, including a lifting part, a neck, a growth part, a tail, etc. The appearance is not round, and the surface is coated with a layer of oil that may be anti-oxidation.
"It seems that only the middle section is useful!" Guo Dong asked Fan Xuedong, pointing to the growth section in the middle that was about 20 inches in diameter.
"Yes, even the middle segment is also a little substandard, but it can be used as a negative. Each processed bar needs to be manually tested, and the qualified one is used as the substrate and the unqualified one is used as the negative. The specific method is to observe by high-power microscope, and only the crystalline phase can be used as a substrate. ”
Fan Xuedong is a professional after all, he is much more detailed and professional than Shen Danqing. This is all due to the new Department of Technical Information, which has collected a large amount of scientific literature and technical data from abroad, so that the theoretical knowledge of the technicians of the institutes has improved by leaps and bounds. Only theoretically, they are no weaker than scientists from major domestic research institutes, and in some respects even surpass them. Who asked Shen Danqing to set up such a professional espionage organization as the Ministry of Technology and Information? Therefore, it is still somewhat useful to say that an enterprise has money.
"What a waste of this!, maybe only half of it works!" Guo Dong sighed. Everyone else nodded in agreement.
"That's already good! Abroad is not as good as us! This is thanks to the precision of the monocrystalline silicon growth furnace you made. But don't worry, we can recycle the rest. It won't be too wasteful. Fan Xuedong explained to them with a rare and strange look.
"What about these oils, are there any cleaning liquids?" asked Guo Dong again, pointing to the outer layer of oil.
"Of course there is, and it needs to be washed twice, the last time with oxygen-free ultrapure water. After rinsing, it should be dried. Fan Xuedong popularized science to them again.
Guo Dong squatted and thought about it carefully, then stood up and clapped his palms and said: "Okay! Everyone also understands about it, I thought about it carefully just now, and found that the problem is still very complicated, far from being as simple as the few machines the boss said." ”
With that, he walked over to a drawing desk, took a piece of drawing paper and a pen, and sketched an abstract sketch first. Pointing to the two patterns on the diagram, he said: "I planned the whole set of equipment into two parts, one part of which works in an argon environment that is not needed, and the other part that must be integrated into the argon environment. I'll start with the previous part. ”
After speaking, he took a pen and drew a few sketches on the paper, he pointed to one of them with a pen and said: "We have to cut it off first, because it is a large object cut, so it does not need to be too precise, I imagine that it is a machine tool, anyway, there are many processing steps in the future." However, it should be noted that anti-oxidation oil should be added when cutting, and the two transverse loading surfaces of the bar should be oiled to prevent oxidation. ”
After saying this, he pointed to another pattern with a pen and said: "After cutting, the silicon rod should be rounded so that it meets the size requirements of the silicon wafer substrate, and the consistency of the roundness of the whole bar should be maintained. ”
At this point, he pointed to another icon and said: "At this point, the next step must be carried out in the argon environment, so we have to integrate the three steps of degreasing, washing and drying into the whole system." Prevents the silicon rod from oxidizing when exposed to air. ”
"Wait, Minister Guo, the two steps of cleaning and drying, lithography machine, ion implanter and CVD machine are all used, and you have forgotten that in the tempering step, when the single silicon crystal rod is cut into thin slices, it will be deformed due to the high temperature, so it needs to be tempered. "After all, Fan Xuedong is a professional, and he knows the whole process better than them. Therefore, he reminded Guo Dong.
"Thank you for the reminder! Mr. Fan. Guo Dong didn't know what to call his position, so he had to call him sir.
"It's nothing, aren't we solving the problem together!"
Fan Xuedong shook his hand and said politely.
"Okay! Since that's the case, then we will integrate the drying oven and tempering furnace into one, and only need to add a temperature adjustment to solve the problem. Guo Dong slammed the table with his right hand holding the pen and said what he thought.
After speaking, he frowned again, and then said as if talking to himself: "But in this way, the one track that the boss said is far from enough, and there may be more than ten tracks of length and shortness, like a complex railway system." It's just a short time. ”
"I thought about it the same way, the whole system was not simple, we had to think about it inside and out, and then start designing it to minimize unnecessary mistakes. Lu Rucheng was the highest status in the audience, surpassing his former boss Guo Dong, so he expressed his opinion without hesitation.
"Well, Mr. Lu is right, then we will adjourn for an hour, and everyone will think about it. Guo Dong, as the master, made a decision.
After Guo Dong finished speaking, everyone found a seat and sat down. Everyone is desperately thinking, mentally drawing a rudimentary shape of the whole system, imagining what would be more reasonable.
After an hour of "dong dong", Guo Dong knocked on the table on time, waking everyone up from their thoughts.
When he saw that everyone had noticed him, he began to say: "Because of the large number of people, I will not speak one by one, and time does not allow." I say what I think, and if there's anything wrong with everyone adding. ”
Without waiting for everyone to answer, he organized his thoughts and began to say: "I integrated degreasing, washing, drying and slicing on one track, and the specific steps are in the order I said." The cut wafers are transported to the drying chamber, that is, the tempering furnace, through the robotic arm, and then sent to the grinding machine opposite. And the tray of the robotic arm must be a vacuum suction cup, because the silicon wafer is very thin and cannot be transmitted mechanically, otherwise the silicon wafer will be damaged. In the same way, the grinding tray should also be a vacuum suction cup type, and it must not be used in the way of calipers, otherwise the damage will be greater. The gluing machine must be designed with two parts, and the two different glues cannot be mixed together, otherwise there will be a danger of contamination with each other. The most important thing is that there should be a drying step after the glue is applied, and it should also be directly conveyed by a robotic arm without a track. Therefore, both gluing machines must be placed opposite. The two gluing machines and grinders are not large in size and can be arranged very compactly.
And because each step has to be tested, we can enclose the track of the robotic arm with glass, which is convenient for detection with an electron microscope.
That's what I envisioned as the general system architecture, and then the specific design for each machine. If you have anything to add, let's talk about it. ”
And with that, he sat down. , giving up the spot.
"Ahem" Lu Rucheng saw that no one else said anything, so he coughed twice and began to speak: "I think Minister Guo's idea is very perfect, I only add one, and a separate photoresist corrosion step is needed." Since the lithography machine performs multiple lithography, it is necessary to perform multiple degluing and degluing, so it is necessary to design a separate degluing chamber. ”
After saying this, he stopped talking and gave up time to others. In fact, it has been very perfect at this point, and you have nothing to add. So it was cold all of a sudden.
When Guo Dong saw that everyone was no longer speaking, he stood up again and said: "Since everyone is no longer adding! Then let's break the meeting! When it's time to eat, the food in our company's canteen is very good, and everyone knows it." Oh, look at me, Mr. Fan is a guest and doesn't know. Sins, sins, sins!"
After speaking, he naughtily waved his hands at Fan Xuedong.
"Hahahaha!" everyone laughed happily again.
A capable person will always find a way to adjust the atmosphere. And Guo Dong is such a person.
To be continued......