Chapter 120: Dry Etching
finally explained it clearly to the government, whether they believe it or not, at least they will not immediately show up in poverty, which is what he is most worried about. To be honest, in China for more than 90 years, the most money cannot be guaranteed to be completely safe. The government is still a dictatorship, and foreign-funded enterprises are better, after all, they are protected by the laws of their own country, and ordinary parents and officials dare not mess around.
After saying goodbye to Secretary Zhu of the Municipal Party Committee and returning to the company, Shen Danqing was scared into a cold sweat, fortunately he persuaded Secretary Zhu, otherwise Changsheng Investment Group might stop fighting and become sand, this is not a joke. Of course, fortunately, this matter is on the central news, and it may be noticed by senior leaders. The government may have concerns about this, but the matter is in the past.
After this incident, Changsheng Investment Group finally passed a hurdle. Shen Danqing also hoped to move the head office to Changsha as soon as possible, so he asked Wang Quanfu more frequently about the preparations for the Changsha Industrial Park.
Wang Quanfu really couldn't laugh or cry, he had just started to send people, how much progress could he make, and the first phase of their site selection had not yet begun? Therefore, he had to come up in person and patiently explain to the boss: "Boss, they are still inspecting the terrain, and they have to make an overall plan, otherwise they will take care of one thing and lose the other in the future." ”
"Okay! I'm in a hurry, you let them plan carefully! Shen Danqing admitted that he was anxious, as the so-called concern is chaos, he had to calm down and calm down, he said to himself in his heart.
"Okay, boss. I'll let you know as soon as I have news. If there is nothing to do, I will leave, the company still has a lot of things to deal with waiting for me to deal with!" Wang Quanfu didn't dare to say that the boss was playing the piano randomly, but said that he was very busy, and the implication was to tell the boss not to give random orders and delay other people's business.
"Well, you can go back!" Shen Danqing waved his hand lightly and said in a relaxed voice.
Time is a good soothing, and any bad thing will slowly lose its power under its wash, until it is forgotten by the people. Before I knew it, more than a month had passed. During this period of time, all the enterprise groups and units under Changsheng Investment Group have developed smoothly.
First of all, the Institute of Mechanical Technology and Changsheng Seiko have successfully developed chip packaging equipment. This set of equipment is a little different from similar equipment abroad, and he does not use any belt transmission assembly line. Instead, they use the rail linear motor they are familiar with, and the conveying method of installing an automatic robotic arm on it is equivalent to a primary intelligent robot. The robot arm is equipped with a vacuum suction cup, and the tray containing the silicon wafer is firmly attached to the suction cup. The whole conveying process does not need to be in direct contact with the chip, and the unpackaged chip is very fragile, and the slightest carelessness will cause mechanical damage or even scrap. In addition, their equipment is very efficient, fully automated, and does not require human involvement, so it can ensure that the dust in the plant is kept to a minimum. The whole plant is almost sealed, there are no people entering, and of course there is less dust.
The ion implanter division led by Director Hu of the Institute of Physics also came with good news. They finally developed a full-fledged ion implanter device. To be able to give Shen Danqing good news, of course, it is already a very mature equipment. They were lucky, and luckily the Institute of Physics had a mass analyzer and an ion accelerator readily available, two scientific research equipment. Otherwise, if they are allowed to start researching, they don't know how long they will be going to study. They also succeeded in stepping on the arms of giants.
At this point, the only thing left is the automatic inspection program. Shen Danqing deliberately asked Lu Rucheng to find out, and learned that their task was very difficult and could not be solved in a short time. So he made a decision to let this set of chip production equipment start trial production of chips, and try to find any problems in production. Use financial resources to promote and accelerate the development of chip technology. There are certainly a lot of problems in the early stage, and these are valuable information for the automatic detection program.
There is no automatic inspection program, manual inspection is required, and the chip production speed is of course very slow. As the barrel theory says, the entire production speed can only be compared to the speed of manual inspection. However, Shen Danqing will not care, for Changsheng Investment Group, the problems that can be solved with money are not a problem.
Using nanoscale chip manufacturing equipment to manufacture sixteen-bit chips, of course, the difficulty is very low, the first manufacturing, the pass rate is very high, reaching 53%, unqualified chips, not process problems, but the cause of chemical etching. The chemical etching equipment they were working on was too simple and lacked a lot of advanced technology. They used primitive natural etching techniques, so the etching edges were very noticeable. Chemical etching is the use of chemicals to dissolve silicon wafers or copper interconnects that are not protected by photoresist. If it is allowed to etch naturally, it will cause erosion. That is, it corrodes the edges of transistors and copper connections that do not need to be etched. Because it was the first time they had developed chemical etching equipment, they had no experience and thought it was just a pure chemical reaction. The etching equipment that was built was the most primitive of the kind of equipment, and people used this technology in the days of 4-bit chips in the past. Of course, this is no longer the case.
After getting the problem of chemical etching, Shen Danqing attached great importance to it, and he immediately convened relevant scientific research units to discuss countermeasures.
Truth be told, they were seeing this problem for the first time. Chemically etching such a tiny figure is inherently magical. Now they say that this method will not work, and they have to find another way. This really stumped them, and they didn't have a good solution for a while. In the end, Shen Danqing remembered that some books in his previous life said that etching is divided into wet etching and dry etching. So he said to them, "Try dry etching, maybe it's much better." ”
"Boss, what is dry etching? Can you tell us in detail?" Wang Bo, the director of the Institute of Chemistry, stood up and asked him. No way, who makes chemical etching technology the main responsibility of the Institute of Chemistry?
"First of all, I don't know how it works. All I know is that at a certain barometric pressure, plasma ions react with silicon oxide or copper or collide at high speed, ionizing them in the same gaseous state, and then pumping them away with an extractor. Do the same thing until we have the shape we need. This method reduces erosion and results in a graph of steeper edges. It should be said that it will be much better and more precise than wet etching. Anyway, let's try it first!" Shen Danqing said what he knew, and the specific techniques and methods were up to them to study.
"Boss, to be specific, what kind of plasma are they, do you know?" Wang Bo asked him in a hopeful tone. He himself knew that the boss might not know, so he asked him in such a tone.
"How do I know? I'm not a scientist, I just read a few sentences mentioned in the book, the specific principles and methods, and you have to experiment on your own, I can't help you. As Wang Bo expected, the boss didn't know. And he also spoke with a straight face, and I don't know which book he read it from. It's really strange to know that scientists like these professions don't know. The boss is often mysterious, and a lot of advanced technology comes out of his mouth, although he only has a surface, but at least he has a direction, and he is no longer ignorant.
"Listen to me, the boss has pointed out the direction for us just now, and we will use this direction as a breakthrough. I just thought about it in general and think it's very feasible. There are many technologies that we have mastered when we developed ion implanters. This new method is nothing more than adding a chemical reaction to the ion implanter technology. As for the unknown free plasma, I also have a preliminary prediction. We only look at two types of plasma that react with silicon oxide and copper. Other etchings, or wet etching, will not affect the yield. Then these two types of plasma are the tasks of our chemical research institute. The rest of the body is still similar to the ion implanter. Let's try it first......"
Wang Bo took the initiative to stand up and speak, but before he finished speaking, he was interrupted by Shen Danqing: "Very good, Director Wang's speech just now was very insightful. I now appoint Director Wang as the head of the business department for the research and development of dry etching equipment. Everyone else is under his command, and he can deploy manpower and resources from the entire company. In order to increase your urgency, I have good news for you in advance. ”
Before Shen Danqing's words were finished, the minds of the people present were ready to move. The good news from the boss's mouth, it must not be wrong.
Shen Danqing saw everyone's actions. Not only did he not annoy everyone for interrupting him, but he continued very happily: "As long as this set of chip production equipment is successfully developed." With a certain degree of accuracy and yield, we will go to Changsha to set up the first chip manufacturing factory. After the factory is officially put into operation, all the staff involved in the research and development of chip manufacturing equipment, all your arrears will be written off. How's that going? Are you happy with this reward?"
The whole venue was silent for a while. Everyone was too shocked to imagine that the boss could give such a heavy reward. You must know that the personnel involved in R&D are at least engineer-level technicians. The higher the level, the more money they owe to the company, the less they owe millions, and the more they owe millions, such as the directors of various research institutes. This reward is more than the wages and bonuses they have earned for their work in the past few years, can it not make them excited? "Oh!" There was a cheer in the venue, the boss's reward was so powerful that they couldn't control their excitement for a while, and no one was exempt.
Shen Danqing looked at the reaction of the people at the venue and nodded with satisfaction, what he wanted was this kind of effect, only by constantly motivating everyone, they could give him a greater reward. What is this money, nano-level chip manufacturing equipment in later generations, don't even think about it without billions, the unit is still US dollars. The Chinese want to buy it, and they won't sell it to you yet. Now Changsheng Group has developed a full set of technology, regardless of whether it is advanced or not, as long as it has it, it can be continuously improved in the future. Being able to keep pace with Europe and the United States, this feeling is like a drug, which makes Shen Danqing deeply intoxicated.
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