"Such a mature 193nm immersion lithography technology, I have only heard of ADM!"

In the R&D department of Star Technology Corporation, all the personnel of the R&D department were present, and Liu Yan stood on a temporary podium and said excitedly. Pen, fun, and www.biquge.info

"We all know that immersion lithography requires a high refractive index liquid to be filled between the lower surface of the last lens of the lithographic projection objective and the photoresist on the silicon wafer, as shown in this diagram." Liu Yan knocked on the big subtitle, and a schematic diagram was projected on the projector.

The schematic diagram shows a comparison between conventional lithography and immersion lithography.

Actually, there is no difference, the only difference is that the space between the photoresist and the projection objective becomes liquid.

"According to the Rayleigh diffraction principle, we can calculate the resolution of the 193nm immersion lithography machine, and it can be seen from the results that the feature size of immersion lithography is reduced to one-n of that of traditional lithography, which is equivalent to the effective exposure wavelength reduced to one-n of the original."

"And the main problem we have with this technology is the immersion liquid, the liquid immersion method, and the big data aperture ......."

Liu Yan spoke impassionedly on it, but Leyuan was a little drowsy when he heard it, because these things were all clichés.

The 193nm immersion lithography technology was not invented by Liu Yan and them, nor was it invented by the Star Company itself, as early as 2002, the immersion lithography technology helped break through the 65nm technology node.

At the end of 2004, IBM and TSMC respectively announced the use of 193nm immersion lithography technology to create full-featured chips.

Therefore, the immersive lithography technology of Star Company is only relatively mature and handles all aspects of the problem better.

Liu Yan mentioned ADM at the beginning, and indeed, the 45nm process of Star Technology is similar to ADM.

Unlike Intel's complex materials and processes, Star does not use high K, because Star has a technology similar to the SOI process.

The so-called SOI is an abbreviation for silicon on insulator technology, which differs from traditional pure silicon wafers in that it uses an insulating layer at the bottom of the wafer.

This layer of insulator cuts off the loop of leakage current from the upper MOS tube, allowing the chip to easily resist leakage current.

However, seeing Liu Yan's excitement, of course Le Yuan couldn't bear to interrupt him. It is not easy to reverse the 45nm process of Starry Sky 1 in such a short period of time, and you can imagine how much they have paid.

"On the basis of 193nm immersion lithography technology, if we want to break through to 32nm, there is still a preliminary possibility, we only need to upgrade the lithography equipment."

came, Leyuan, who was originally sleepy, was in good spirits, and now he is talking about what he specially flew back to listen to.

"First of all, let's talk about ultra-low k dielectrics, air gap technology, in the development blueprint of semiconductor process nodes for the 32nm node, ultra-low k dielectrics must be used to reduce the parasitic capacitance between adjacent metal wires, especially on the interconnect layer."

"The air gap technology can create a complete vacuum between the metal wires of the 32nm chip to reduce the parasitic capacitance of the interconnect layer by 30 to 40 percent, and the specific number will be determined by further experiments."

When the four words of air gap technology just came out of Liu Yan's innermost, Le Yuan was stunned, he had an impression of this name, but he had heard it in his previous life.

This is a technology that IBM developed in the two years of '08 and '09, and they haven't developed it at this time.

Later, when Liu Yan said that this technology can create a complete vacuum between the metal wires, Leyuan suddenly felt a little abrupt, not only the name is the same, but the technology that Liu Yan said is the prototype of IBM's Air Gap technology.

Liu Yan and they have taken the same path as IBM, at least in terms of ultra-low K dielectrics.

Of course, the current IBM has not yet embarked on this road, and let Liu Yan take the first step.

Leyuan's eyes lit up, this was an unexpected joy, looking at it like this, Liu Yan and they were really sure to break through to the 32nm process.

After listening for more than an hour, Liu Yan ended his explanation in the flaws of air gap technology and the problems that need to be solved.

Le Yuan rubbed his sore eyes, feeling as if he had returned to the time when he was listening to his tutor's lectures in college.

However, at that time, there were not so many people, and the tutor only brought four students, and there were questions and interactions in the class, which was a little different from now when Liu Yan was talking alone.

After Liu Yan finished speaking, Le Yuan applauded him with a smile, and the others also applauded.

After the meeting, everyone returned to their posts and began their own research work.

Le Yuan walked up to Liu Yan with a smile, "Teacher Liu, it's really hard for you." ”

After finishing the lecture, Liu Yan still looked refreshed, and shook his head with a smile, "It's not hard, this is our own job." ”

"It's not easy, I originally thought that the reverse 45nm process would take a lot of time, but I don't think you have not only greatly shortened this time, but also made a breakthrough on this basis." Le Yuan exclaimed.

Liu Yan said modestly, "The company has given so many resources, we use the most advanced instruments in the world, and there are the best scientific research talents around us. Fortunately, we are not ashamed, and there have been some breakthroughs. ”

The best scientific research talent Liu Yan said is Zhao Tian and their robots, through these days of contact, Liu Yan has recognized their ability, as long as it is something in the laboratory, there is nothing they don't know.

These people are just a moving manual, and most of the reverse engineering depends on them.

However, Leyuan knows the flaws of these robots, they have infinite energy to acquire knowledge, but they will never lack the ability to create, that is, the ability to draw inferences, this kind of inferences is not a simple inference.

It's not that you taught him that one plus one equals two, and he can't figure out that one plus two equals three.

It's that you teach them addition, and they will never be able to figure out multiplication.

They can quickly familiarize themselves with the rules and apply them, but they can't break the rules and create them.

But these are not big problems, they are responsible for memorizing the rules and using the rules, while Liu Yan and they need to break the rules and create rules on this basis.

Therefore, these robots and Liu Yan and others complement each other, and together they have a mysterious bonus.

Le Yuan smiled, this was an effect he hadn't thought of before, and now it seemed to be an unexpected surprise.

However, Le Yuan suddenly thought of what Liu Yan entrusted to him before leaving, and he said to Liu Yan, "Teacher Liu, you asked me to find the experimental assistant for you before, and I didn't find it when I went to Yanjing, but don't worry, I have already asked someone to contact them." ”

For this question, Liu Yan originally wanted to ask, but Le Yuan explained, he didn't say anything more, and said with a smile, "It's okay, don't be in a hurry now, take your time." ”