Chapter 84 Wafer Preparation Process

"Jim, our company is actively expanding Canada's chip industrial park, but in my opinion, it is not a way to expand so much, the key is to find a way to prepare the wafer, the current monocrystalline silicon diameter is only 3 inches, we need a larger diameter of monocrystalline silicon, in order to really improve the output, last year I gave you the 24-inch monocrystalline silicon preparation process, where have you completed?"

Christopher looked at Wang Haihua and said to Ling Shizhe: "BOSS, today you don't ask me to report this matter to you, which is why I came here, BOSS, you come with me, now let's go to the wafer preparation experimental factory to have a look." ”

Ling Shizhe and the three changed their clothes and got into the car, the car drove out of the chip experimental factory, drove about a kilometer west to a larger factory, and the three of them changed their clothes again and entered the ultra-clean experimental production workshop.

Another thing Ling Shizhe felt strange was that Wang Haihua was very familiar with this place, Christopher saw the confusion on Ling Shizhe's face, and explained: "BOSS, after you handed over the new wafer preparation process to me last year, in view of the company's lack of manpower, I cooperated with the Hong Kong Computer Institute, and I informed you about this matter at that time. ”

Hearing him say this, Ling Shizhe patted his head, and actually forgot about it, at that time, all the energy of Hong Kong Ambrera Industries Company was focused on the new CMOS chip process manufacturing technology, and the 24-inch wafer preparation technology was really not many people, so Christopher thought of the School of Computer Science, so he made a report to Ling Shizhe, and cooperated in research, Ling Shizhe signed it immediately after seeing the report, but he didn't expect to forget it, since it was a cooperative research, Wang Haihua was of course familiar with it.

"I'm sorry, I forgot about that."

"It's okay boss, everyone forgets sometimes."

The two took Ling Shizhe to a warehouse-like room, where many wafer rods of different sizes were placed on the floor, some were a whole, some were simply cut into several sections from the middle, and some were cut into thin wafer wafers.

On the other side, there is an inspection table with various wafer inspection equipment, and several staff members sit in front of the microscope, inspecting wafers one by one.

Ling Shizhe saw so many monocrystalline silicon of different sizes and sizes, and asked suspiciously: "Jim, isn't the information I gave you about the process preparation technology of 24-inch wafers, why do you have wafer sizes of large and small here, what's going on?" ”

"BOSS is like this, we are not familiar with the new process technology now, and now we are still groping, the wafer rods produced are very unstable, some are particularly good, 24 inches do not have a bad pixel, some are very poor, and there are bad pips on 5 inches. In order to master this new process, I took a stupid method from fine to coarse, first six inches, at 9 inches, so that little by little to improve, although a little slower, but the workers' proficiency in mastering the new process technology has also improved a lot. ”

"How many inches can you achieve now?"

"Thirteen inches." Christopher definitely returned.

"Yes, you can master this new process very quickly."

At this time, Wang Haihua interjected: "It's not so simple, this new process is too advanced, the technology is quite complex, the workers have too many points to grasp in the production operation, not to mention those workers, that is, we professors and engineers have a headache, so it is very unrealistic to rely on manual operation, automation must be realized, it takes a lot of time just to collect the operation data of the workers, and the relevant data of various fault treatment measures of various equipment must also be collected, and various software must be written. There are too many problems waiting for us to solve the debugging of the CNC system. The problem is not only complex and detracting, but also water-grinding. ”

Ling Shizhe's face was slightly red, in the history of crystal preparation, it was three inches, six inches, nine inches, and twelve inches, but now for his own economic interests, he jumped directly from three inches to twenty-four inches, skipping a lot of steps in the middle, which naturally made Christopher, Wang Haihua and those production workers feel quite difficult, and they had to explore everything from scratch, and there was no experience to learn from and reference, which made these technical experts miserable.

"Are all these production equipment built according to my requirements, no problem?" The guilt in Ling Shizhe's heart was soon thrown out of the clouds, he had completely become a capitalist, how to obtain the maximum benefits had become instinct, and now he only cared about whether there was a problem with these manufactured production equipment. Because it's about how quickly the process can be put into production.

Christopher nodded, and said in an affirmative tone: "These equipment are designed and manufactured by ourselves, this set of processes and various equipment we have established a variety of relevant mathematical models, fully in line with the requirements of the model, the relevant experiments we have carefully verified, those engineers are quite experienced, overall there is no problem, now we encounter the problem is not so much the problem of process equipment research and development, but also the problem of new equipment and new process production and commissioning." BOSS, I am confident that I can overcome it within half a year, and then the 24-inch wafers will be produced in large quantities with stable and reliable quality. ”

Wang Haihua also nodded, hearing their words full of strong confidence, Ling Shizhe also breathed a sigh of relief, if it was really like Christopher said, it would be great, he could afford to wait for half a year or even a year, and when the 24-inch wafer factory was put into production, the production capacity of his chip factory would be greatly increased several times on the original basis.

The three of them left the wafer inspection room and headed to the other production areas.

Silicon is an extremely common element, but it rarely occurs in nature in the form of elemental substances, but in the form of complex silicates or silica, which are widely found in rocks, sand, and dust. Silicon is the second most abundant element in the earth's crust, making up 25.7% of the total mass of the earth's crust, a quarter of the earth's crust, and second only to oxygen (49.4%).

Silicon includes two allotropes, crystalline and amorphous, with crystalline silicon being gray-black and amorphous silicon being black. Crystalline silicon is further divided into monocrystalline silicon and polycrystalline silicon, both of which have a diamond lattice, hard and metallic luster, and semiconductor properties.

The raw material of semiconductor chips is monocrystalline silicon, and polysilicon is the raw material of monocrystalline silicon, which is also the basic material for solar chips and photovoltaic power generation.

Polysilicon is divided into metallurgical-grade polysilicon (commonly known as industrial silicon), solar-grade polysilicon, and electronic-grade polysilicon according to purity.

The process designed by Ling Shizhe is not produced from the beginning to the end of the silicon crystal ore, but directly uses industrial silicon as raw material to produce, and its general process flow is industrial silicon-polysilicon-monocrystalline silicon.

At present, the preparation of high-purity polysilicon is generally used to prepare high-purity silicon by trichlorosilane reduction method, which was invented by Siemens, so it is also called Siemens method to prepare high-purity silicon.

Due to the patent issue involving Siemens, Ling Shizhe adopted another high-purity silicon preparation method - silane thermal decomposition method.

Silane thermal decomposition to prepare high-purity silicon, is a common method used in the Republic of later generations, it is compared with the Siemens method, its process is simple, the safety is relatively high (the Siemens method to use a large number of **), low cost, high purity, less pollution, is a high-purity silicon preparation method with great development prospects in the future.

It is divided into three steps: the preparation of silane, the purification of silane, and the decomposition and deposition of silane to produce high-purity polysilicon.

There are many ways to prepare silane, Ling Shizhe uses the magnesium silicide decomposition method widely used in later generations to prepare silane, and its production method is to mix the silicon powder and magnesium powder of industrial silicon ground into powder, and then heat it in hydrogen and produce a chemical reaction to produce magnesium silicon.

Magnesium silicide reacts with solid ammonium chloride in low-temperature liquid ammonia to finally obtain silane. This method is safe, reliable, and has a good impurity removal effect, especially the boron removal effect is quite good, in addition, the purity of silane is relatively high, and it is a very good manufacturing method.

After the silane is produced, it is necessary to purify, the molecular formula of silane is SiH4, it is gaseous at room temperature, the purification of gas is easier than liquid and solid, the boiling point of silane is very different from various magazines, so the first method he adopts is to use low-temperature liquefaction method to remove water and ammonia in silane, and remove other impurities by distillation.

The second method is the preheating decomposition method, the decomposition temperature of silane is above 600 degrees Celsius, and the decomposition temperature of other impurities is lower than 380 degrees Celsius, so the preheating temperature is controlled at about 380 degrees, and the hydride in the impurities can be decomposed, so as to achieve the purpose of purifying silane.

In addition to the above two methods, the process designed by Ling Shizhe also uses various methods such as adsorption to improve the purity of silane.

Such a complete set of combination punches, the purity of silane is quite high, at this time silane is quite dangerous, because silane itself is a flammable and explosive gas, so the silane production plant and the wafer production plant are relatively far apart, on the top of a hillside, so that once an explosion occurs, the explosion is projectile upwards to reduce the damage to the wafer production plant as much as possible, the security measures of the entire silane factory are very strict, and you must hold a special certificate to enter and exit. Unrelated personnel are not allowed to enter, the workers and managers inside have been selected the most rigorously, in addition to checking your character, but also to check your social relations and whether the three generations of your family are all good families, Ling Shizhe does not want to recruit some people with complex backgrounds to come in, in case of recruiting a triad personnel to do a sabotage one day, the scope of the silane explosion is enough to destroy the entire Kwun Tong Industrial Zone and the entire Tseung Kwan O, and even the Shaw Brothers Film and Television City, which is far away from here, will be swept away, and its explosive power is no less than a tactical atomic bomb, Therefore, the safety requirements for this silane plant cannot be overly strict.

Ling Shizhe and the three of them walked around the silane factory, and all the safety measures were also checked, and when Ling Shizhe nodded with satisfaction, Christopher and Wang Bingkun, the director of the silane plant, breathed a sigh of relief.

Although Hong Kong is in the subtropics, the weather in February is still quite cold, especially the wet and cold with the sea breeze, which is still quite cold and biting.

And now Christopher and Wang Bingkun and a group of middle and senior managers are constantly wiping their sweat, seeing that they are reaching out to wipe their sweat one by one, Ling Shizhe asked, "Why are you very hot?" ”

A group of people immediately stopped wiping their sweat, and Wang Bingkun explained: "The boss is not hot, we are not hot." ”

Others echoed: "It's not hot, it's not hot, we're not hot at all, boss." ”

Looking at a group of subordinates with doglegs, Ling Shizhe scolded with a smile: "Look at your little bit of talent, am I so terrible?" The reason why my safety requirements for silane factories are so strict is also for everyone's good, seeing that those few silane storage tanks are not, if they explode, what will happen I don't need to say more, right? ”

"Ling Shao, we all understand that once this silane explodes, it is enough to destroy half of Hong Kong, so we strictly implement Ling Shao's safety requirements without any discount." Wang Bingkun nodded and said to Ling Shizhe.

"I saw it, Director Wang did a good job, and you all did a good job, the safety measures were implemented very well, there was no blind spot, I didn't expect that you also thought of it, very good, those workers are also good."

Hearing Ling Shizhe's affirmation of them, Wang Bingkun and the others had a bright smile on their faces, Ling Shizhe's work requirements for his subordinates are notoriously strict, and it is not easy to get his approval, that time I went down to inspect the factory and did not find a bunch of faults, and asked them to rectify them on schedule, if this time it is still like this, they will directly fire people, but this time Ling Shizhe can't find any fault in the inspection, he appreciates Wang Bingkun's ability very much, and promoted him several levels in his mind.

"I just looked at it, the staff duty room and studio are not installed radiators, Hong Kong's winter is still very cold, especially at night, Director Wang remembers to install the radiators as soon as possible, don't freeze the workers, you know?" In this inspection, Ling Shizhe also knew that he scared them enough, and no problems were found in the inspection, they did quite well, they should give them some sweet dates, otherwise these subordinates will be angry sooner or later, carrots and sticks are also an effective means of managing the company.

Wang Bingkun knew that Ling Shizhe had picked up the big stick just now, and now he began to soothe the hearts of the sweet jujubes, so he smiled and agreed: "Yes, Ling Shao, I will arrange someone to do it immediately, and I will never let the workers freeze and cold." ”

Ling Shizhe nodded, and said: "The summer in Hong Kong is very hot, although it is only February, but the summer will come soon, the heatstroke prevention and cooling work of the factory must be done in advance, and the air cooling and water cooling equipment must also be pressed, don't let the workers suffer from heat stroke." In addition, the safety production work of the silane plant has been completed well, I am very satisfied, and all the employees of the silane plant, including you management, are all paid three months' salary as a reward. ”

As soon as Ling Shizhe finished speaking, he heard a cheer, and everyone was shouting, long live, long live.

Looking at these enthusiastic and cheering employees, Ling Shizhe pressed it with his hand, and everyone immediately quieted down.

Ling Shizhe continued: "It's time to cheer, you have all worked hard during this time, tonight and tomorrow night, all employees who don't need to go to work and rest at home will go to Jufu Building to have a big meal, pointing to the expensive point, do I understand?" ”

"Good ......" A neat roar reached Ling Shizhe's ears, almost deafening his ears, followed by another cheer, wave after wave.

Looking at the cheering crowd, Ling Shizhe laughed loudly and said: "You celebrate, this is your moment, your work has been affirmed by me, you deserve these rewards, you celebrate well, I'm leaving." ”

After speaking, Ling Shizhe, Christopher and Wang Haihua got into the car and left, and there was a cheering crowd behind the car.