Without Zhou Shuo's interference, the lithography machine that transitioned from the 0.35 micron process to the 0.25 micron process actually used the step repeated projection exposure technology in real history.

In the 0.35 micron process and before, the requirements for the production of optical masks in lithography machines were very high. Basically, the chip produced is a one-to-one full-scale design.

The lens projected by the reticle requires complete contact with the silicon wafer, and even a vacuum is drawn during the contact. The laser from the light source system is then hit onto the mask, and the photoresist in the projection part is evaporated. When such a wafer is placed in an etching machine, the chemicals will corrode away the part that is not covered with photoresist, and then transfer the wafer to an ion implanter for ion implantation......

Lithography machines that put the lens and the wafer in direct contact, or where there is only a small gap between the two, are called contact, proximity exposure technology. Because lithography machine lenses using this technology are in complete contact with the wafer, there are very high requirements for masks, lenses, wafers, and photoresists.

This design has its own advantages, such as low lens accuracy requirements, low system complexity, and high image quality. But there are fatal flaws, and the 0.35 micron process is basically the limit of its economy.

In order to continue the contact exposure of the 0.25 micron process lithography machine, the mechanical precision required for the whole system, the cost of the mask, the contact tightness between the mask and the silicon wafer, and the difficulty of system integration have all begun to increase geometrically.

So in the original history, Nikon and ASML have chosen another path, that is, non-contact exposure. That is, projection exposure technology.

To put it bluntly, this technique is like using a magnifying glass to concentrate the sun's rays. A prism system is used to project a light source onto a silicon wafer from a distance. After several focusing, refracting, and refocusing, the final pattern projected onto the silicon wafer can be up to 4 times smaller than the mask.

For immersive lithography. The biggest benefit of projection exposure technology is that it avoids the high cost of using waterproof photoresists.

In fact, speaking of which, Zhou Shuo really wants to laugh out loud now to vent his inner happiness!

The Japanese have worked hard to get the technology of waterproof photoresist, and originally they can at least eat a generation of lithography machines with this technology. Historically, the early immersive lithography system was also a proximity lithography machine using waterproof photoresist, and it was not until the projection lithography machine became the mainstream waterproof photoresist that it withdrew from the historical stage.

The article he took out now is naturally the technical patent of the projection lithography machine, and it can be said that this technology is a waste as soon as the waterproof photoresist comes out!

Tsuruta didn't think so at first, and in his heart he already thought that the Pan Han Group was a fish on the chopping block. Where are the chances of a comeback?

In this era, the Japanese are not only proud, but also very proud. Throughout the 90s, the Japanese accounted for more than half of the world's top ten wafer factories!

In the eyes of Tsuruta and all the Japanese, the Chinese can come up with immersive lithography technology is purely a blind cat touching a dead rat, anyway, isn't it the strength of the Comintern to build a national system!

Aside from the unique approach of immersive lithography, the Japanese do not believe that the Panhan Group can make a breakthrough in any other direction, and that's all there is to it.

However, it turns out. The Chinese are much more powerful than they think. This is a huge mockery for Tsuruda.

Nikon, which prides itself on its advanced technology, will repeatedly fail in front of a small Chinese company! This TM is unscientific!

Tsuruda's face turned black as black charcoal at the bottom of a pot after he read the entire authorized patent certificate. Anyone who is looking at the technology they have developed at a great cost. was eliminated in a blink of an eye, and he must be eager to bite the other party to death.

It's a pity that Tsuruta is destined not to dare to bite people to death.

Step-by-step projection technology not only frees itself from the dependence on waterproof photoresists. More importantly, with a little optimization, it can immediately push the lithography process technology forward to a new era......

Do you want to be so rebellious?!

Tsuruta wanted to shout like that. If the Pan Han Group is allowed to develop so unscrupulously, maybe even Moore's Law will be broken.

From 0.35 micron processes have not been popularized. Jumping directly to 0.18 microns, you can imagine what kind of bloody storm this will set off in the market.

If Tsuruta dares to say "no" between his teeth, Nikon will be killed and buried.

Zhou Sang...... Is this text true? Tsuruta opened his mouth, his head was a mess, and he could only ask such a non-nutritious question.

He is no stranger to repetitive projection exposure technology, if immersive lithography technology is the left side door, then projection exposure is the right way! Most of the main ways to improve the performance of lithography machines are achieved by increasing the accuracy of the optical system - and the repeated projection exposure technology can be said to continue this idea to the extreme!

"Hehe, whether it's true or not, Nikon can verify it for himself." Zhou Shuo shrugged his shoulders indifferently and smiled easily.

Tsuruta leaned back in his chair, knowing that such a thing could not be faked. As long as he makes a phone call, it won't take half an hour to check the results and come out, and there is no point in playing this kind of trick.

Even so, he still instructed his subordinates to inquire about the relevant patent status. There are only a lot of things that can be reflected in a paper certificate, and a lot of technical ideas need to be provided when the patent is registered, and maybe there will be something gained. But that's all for later, and now Zhou Shuo's strength is not allowed to be suppressed unscrupulously.

"Okay, Zhou Sang." Tsuruta exhaled, this feeling of victory coming in hand only to be overturned by the Jedi was really demoralizing. He raised his head with a strong spirit, looked at Zhou Shuo and said, "Now that the situation has changed, Nikon can reconsider the original request. We can all talk about liquidated damages, share withdrawal and relocation of production lines......"

"What are you talking about?" Zhou Shuo hugged his chest and asked with a smile.

"Uh, talk about the technology you have." Tsuruta blushed, such a change was too blunt, but at this time, he couldn't take care of it: "To be honest, in order to maximize profits, it is not a good idea to announce projection step-by-step lithography technology now. If you want me to say that it can be used as a reserve technology, we will release this technology after we are satisfied with the immersive lithography machine. ”

"What, Nikon doesn't want to sweep me out now?" Zhou Shuo lowered his head and picked at his fingernails, and asked absentmindedly.

"Haha, how could Nikon have such a plan!" Tsuruta laughed loudly, hiding the embarrassment on his face, shaking his rattle-like head and saying, "The Pan Han Group is Nikon's most important partner, and we will never make such a ...... Well, the matter of unloading the mill and killing the donkey. ”

He thought that it was still a very happy thing to use a Chinese idiom, but he smiled smugly but couldn't laugh anymore, because Zhou Shuo's face on the opposite side was always cold.

"Tsuruta-san dares not admit it, this is too unmanly." Zhou Shuo said lightly: "Since Nikon doesn't want to buy the shares in my hands, let's talk about the 51% shares in your hands." ”

"Nani?" Tsuruta sat up straight, and his eyes became serious: "What does Zhou Sang mean by this, 51% is already the bottom line of Nikon's shareholding, and this condition is not to be discussed!" ”

"Let's put it this way-" Zhou Shuo gently blew the nails sharpened with nail clippers, and gradually retracted his smile and said: "Bankruptcy or the sale of the lithography machine subsidiary, which one does Nikon choose?" ”

"What does Zhou Sang mean by this?" There was a rare trace of panic on Tsuruta's face, and he forced a smile: "Do you know what kind of company Nikon is, how can it be said that it is bankrupt?" ”

Zhou Shuo sighed, raised his eyebrows and said, "That's me saying the wrong thing, Nikon can pay 500 million yuan in liquidated damages every month?" ”

"Five hundred million?" Tsuruta was startled, looked at Zhou Shuo in horror, and flatly denied: "What 500 million, where do we Nikon need to pay 500 million liquidated damages?" ”

How could Tsuruta not know what Zhou Shuo was talking about, it was precisely because he knew that he was terrified. The contract signed by Nikon and Intel is not said to be absolutely secret, but it is not something that anyone who wants to know will know. Although it was strange that such a high liquidated damages were proposed for this contract, Nikon did not pay much attention to it because it had thoroughly mastered the lithography machine market.

The liquidated damages of $500 million a month are indeed high, but Intel also has the courage to collect them.

Today, when ASML has launched the competition, the entire high-end market of lithography machines has fallen into the hands of Nikon, and Nikon lithography machines are the emperor's daughters - not worried about marrying. Under this kind of partnership, the contract is just a piece of paper, how dare Intel really collect liquidated damages from Nikon?

It's like mobile swallowing up the user's monthly remaining traffic, and the vast majority of mobile network users will not say that this is unreasonable, even if it is unreasonable, they must have the capital to negotiate with monopoly capital!

Intel is now begging Nikon for supplies, not Nikon for Intel. These $500 million in liquidated damages are easy to use, unless Intel never upgrades the process level of the lithography machine in the future, how dare you offend Nikon so much?

"Hehe, it seems that Tsuruta-san is really a noble person who forgets things." Zhou Shuo shrugged his shoulders disapprerovingly, showed a mouthful of white teeth and smiled: "You can think about it, if ASML gets the repeated projection exposure technology, will Intel still be so patient to wait?" ”

After Zhou Shuo finished saying this, he suddenly popped on the other side. Tsuruta slipped off the stool in full view of everyone! (To be continued......)