After more than ten days of adjustment, this X-ray lithography machine finally approached the minimum accuracy of 2 nanometers, although the wavelength used by the X-ray lithography machine is 8 nanometers, but through the convex lens focusing method, it is possible to achieve a 2 nanometer grating.

In the assembly room of Shenguang Instruments, the X-ray lithography machine is quietly displayed in it like a container.

This is one of the most sophisticated devices of modern human technology, and it is ten million times more difficult than carving on a strand of hair.

However, this lithography machine is also the masterpiece of the thinking society, and Huang Mingzhe's private small treasury took out nearly one billion before and after, so he had this lithography machine.

Of course, it is not the cost of the lithography machine itself, but the supporting facilities, material research and development, and process experiments are burning funds.

"President, 2 nanometers is already the current limit, and no matter how small it is, there will be quantum tunneling." Gao Zhiyuan said.

Huang Mingzhe naturally knows the limits of silicon-based chips: "Everyone has worked hard. Zhiyuan, let's talk about it. ”

The two of them went to the side office.

"How much does a single lithography machine cost?"

"A rough estimate of 200 million, as well as the sharing of R&D funds and supporting facilities, we must share the cost through large-scale production." Gao Zhiyuan returned.

The R&D of industrialized products is like this, the production cost of the product will be very high at the beginning, but with the mass production of the product, after the production and R&D costs are continuously diluted, the overall cost will continue to decline.

"Go all out, build another lithography machine, and do a good job of technical confidentiality." Huang Mingzhe commanded.

"No problem." Gao Zhiyuan nodded hurriedly.

The entire Shenguang Instrument gave up the Spring Festival vacation and went all out to improve the lithography machine production line and the adjustment of various process links.

Meanwhile.

Ministry.

Huang Anguo, the director of the department in charge of the electronics industry, has just sent the application for a birth permit from Shenguang Instruments, which is already on his desk at this time.

Several other deputies also talked about it.

"Director, this can't be fooling, is it?"

"Realizing a 10~2nm lithography machine, are they kidding?"

Huang Anguo knocked on the table: "There is no investigation, there is no right to speak, and in addition, the matter of thinking about the new type of battery, the meaning of the above is already very clear, and it will be passed without a problem." ”

Although the other deputies had different thoughts, they also knew that they couldn't get stuck in the face of this situation.

The founder of the Thinking Club is Huang Mingzhe, and with Huang Mingzhe's fame in the mathematics and physics circles, he is now the chief engineer of the Houyi Project, and he can directly reach the existence of Tianting.

His every move will be followed by all parties, and those who want to pick peaches have not yet reached the Purple Light Pavilion.

After passing the birth permit of the thinking battery, Huang Anguo thought for a while and ordered: "Arrange the expert group, and I will lead the team to Lingnan the day after tomorrow." ”

If the impact of the thinking battery is not large, then the impact of the lithography machine is different, if the lithography machine of Shenguang Instrument is true, it will definitely change an industry.

The chip manufacturing industry plays a very large role in modern society, involving almost all aspects, and is increasingly becoming an indispensable industry.

At present, there are only SMIC in China, as well as TSMC in Dayuan Province, TSMC's composition is complex, and there are many uncontrollable factors, and only SMIC can barely use it at present.

The biggest shortcoming of the domestic chip manufacturing industry is the lithography machine and photoresist, and the others can barely cope with it, such as etching machines and ion implanters, which are not major problems, and even silicon wafers can be produced in small sizes.

Only the lithography machine and photoresist are taken to the death by foreign countries, if it is more expensive, ASML is willing to sell the top lithography machine, and the country will not feel like a fish in the throat.

It can only be said that many things are actually being persecuted by the West, not that China must develop these things, but that if it does not develop these things, it will be crushed to death.

In the face of this situation, there is no other choice.

As for surrendering with hands raised.

Lucia used to think the same way, thinking that after surrendering, the enemy would accept her, but she didn't think that it would be wishful thinking in the end.

On February 15, the Spring Festival had just passed.

Huang Anguo took the expert group to Shenguang Instrument Company.

"Chief Engineer Huang, I have admired my name for a long time." Huang Anguo is not enough to put on a show.

"You're welcome." Huang Mingzhe said with a smile.

"Speaking of which, Shanmei Huang and Jiangxia Huang are in the same lineage, and Chief Engineer Huang and I are still one family for five hundred years."

"The north and south of the river are all descendants of Yan and Huang." Huang Mingzhe replied as he walked.

"Yes, yes." Huang Anguo just wants to pull a relationship, which is very normal in China.

The security of Shenguang Instrument Company is much stricter than before, and it is also equipped with five Chinese pastoral dogs, after all, the lithography machine technology is too sensitive.

In the empty top dust-free assembly room, Gao Zhiyuan personally took hundreds of employees and dozens of researchers to be busy.

In the test room on the side, the first X-ray lithography machine is constantly testing and adjusting, after all, it is the first generation of products, there may not be many big problems, but small problems are inevitable.

Huang Mingzhe took Huang Anguo and more than a dozen experts to change their special work clothes, and cleaned them by removing dust and static electricity, and finally entered the test room.

As soon as the experts entered the test room, they were fascinated by the X-ray lithography machines on display.

"Chief Engineer Huang, what is the standard for X-ray radiation dose of X-ray lithography machine?" One of the experts hurriedly asked.

This is a very important problem, X-rays are very penetrating, and if the radiation dose is exceeded, then the employee's body will inevitably have problems.

"This is a radiation dosimeter, you can test it."

Several experts operate an ultra-accurate environmental radiation detector.

［0.003602mSv］

"It's so small, only 0.003602 millisieverts."

"Test it out in other locations as well."

In fact, the power of the X-ray laser is very small due to the very high photosensitivity of the photoresist of the X-ray lithography machine.

In addition, when developing photoresists, the Materials Research Institute made some by-products, among which were materials that could absorb X-rays.

Shenguang Instruments paid great attention to the problem of X-ray radiation from the very beginning of the design, and they used this material to create some detachable radiation absorption partitions.

These separators absorb most of the scattered X-rays, reducing the radiation dose of the X-rays to the surrounding environment.

Although this will require the partition to be replaced every once in a while, at least the employees will not be exposed to excessive radiation levels.

In fact, the current radiation dose is much smaller than the X-ray film (0.1mSv) and CT (2~15mSv) in the hospital, which is about the same as the radiation dose we receive from watching TV every day.

In addition, the protective clothing of the staff is also a product of Shenguang Instrument's own transformation, which can further block X-rays, so the environmental radiation here is not much different from the outside environment.

"The overall is in line with expectations, and the ambient radiation dose is between 0.0032~0.0047 millisieverts."

The official in charge of the record hurriedly recorded the data on the form.

The next step was the highlight, where the experts borrowed equipment from Shenguang Instruments to test the accuracy of the lithography machine and various other parameters.

This work alone took more than a week to make, mainly to make sure that nothing went wrong and that it didn't become an international joke.