In the testing room, the Shenguang 1X-ray lithography machine is running, and a group of staff are still tirelessly testing and adjusting.

As the chief technology executive of SMIC, the technical level of the official Li Weiguang is okay, and he stares at the behemoth in front of him with bright eyes, what a wonderful industrial flower.

Li Weiguang thought to himself, hoping that this lithography machine is a beauty in the wisdom of the show, not a gold and jade.

Gao Zhiyuan pointed to the lithography machine and introduced: "The lithography machine in front of you is the Shenguang 1X-ray lithography machine developed by our Shenguang Instrument, and the specific technical indicators must have been understood." ”

Of course, Li Weiguang, Zhao Jun and others understand that the annex to the announcement of the Ministry of Industry and Information Technology has the technical indicators of Shenguang 1X-ray lithography machine, which they have studied halfway.

"Mr. Gao, can the accuracy of your lithography machine really reach 10~7 nanometers?" Li Weiguang asked hurriedly.

"I know everyone is very skeptical, there are eight-inch silicon wafers on the side, SMIC should bring a technician over, right?"

Li Weiguang nodded.

Gao Zhiyuan pointed to the warehouse on the side and continued: "You can send someone to hold the silicon wafer and conduct lithography testing with our employees. ”

"Then we might as well be respectful." Li Weiguang turned his head and instructed the people at SMIC: "Zhang Gong, Li Gong, I'm sorry for you." ”

The two middle-aged technicians took care of the silicon wafers with the help of tools.

These wafers are not only expensive, but they are also very fragile, let alone fall to the ground, and even if it is air, it is best not to come into direct contact with it, because it can be very troublesome to get dirty.

The two wafers are fed into a special cleaning facility, then photoresist is applied, the photoresist is flattened to a certain thickness, and the photoresist on the surface of the wafer is dried.

The process is very complicated, and there can be no mistakes, which not only tests the machinery and equipment, but also tests the level of the technicians.

If there is a mistake in one of the links, not only will you be busy for half a day, but the consumables such as silicon wafers, photoresists, and cleaning liquids will be wasted, which are all real money.

No wonder it is said that scientific research is burning money.

After more than an hour, the step of silicon wafer lithography was finally reached, and an eight-inch silicon wafer was fed into it by the automation equipment of the lithography machine.

In order to avoid affecting the lithography effect, Li Gong observed the silicon wafer through the lens of a small window for a while, and then closed the small window to form a camera obscura in the lithography chamber.

Zhang Gong selected some mask templates (circuit diagram motherboards) on the computer, randomly selected one of them, and entered the size adjustment.

Because different chip circuit diagrams require different areas, how many chips can be carved out of a silicon wafer should be adjusted according to the actual situation.

The staff members communicate with simple gestures, and even a little louder speech around this high-precision equipment can affect the lithography results.

Lithography begins.

In about 16 seconds, the other side of the silicon wafer will appear.

Then the second wafer was quickly processed, again in about 16 seconds.

Zhao Jun, Li Weiguang, Fang Long and others outside the testing room were all staring closely at the two silicon wafers that had been photographed.

Zhang Gong and Li Gong used special equipment, one person was responsible for a piece of silicon wafer, and transferred it to the electron microscope testing room next door.

Under the electron microscope, the circuit pattern on the silicon wafer is exactly the same as that of the template, the only difference is the size.

"It's incredible that it can really do 7 nanometers." Li Gong looked at the electron microscope and exclaimed.

"Not only that, but the X-ray lines are very neat and delicate, which is really a masterpiece." Zhang Gong added.

The two of them conducted a very comprehensive test on the two silicon wafers, and finally generated two test reports.

Li Weiguang, who was in a hurry outside, saw the two of them come out, and couldn't wait to step forward and ask, "What is the result?"

SMIC and HiSilicon looked at them nervously and expectantly, hoping that it was good news, not bad news.

"Mr. Li, the accuracy of Shenguang 1X-ray lithography machine has indeed reached 10~7 nanometers, which is even better than ASML's extreme ultraviolet light." Zhang Gong explained.

Call! The crowd breathed a sigh of relief.

Li Gong handed the two test reports to Li Weiguang: "This is a specific test report. ”

The crowd at SMIC hurriedly circulated it.

After reading the detailed test report, Zhao Jun and Li Weiguang breathed heavily, and this Shenguang 1X-ray lithography machine was a little stronger than ASML's top lithography machine.

At least at present, ASML's top lithography machine is a little powerless in the face of 7nm chips, while Shenguang 1X-ray lithography machine is at ease.

If they knew that Huang Mingzhe was deliberately limiting accuracy, they would understand why he was so adept.

"Mr. Gao, I salute you as a Huaguo chip person." Li Weiguang said excitedly.

As a Huaguo chip person, they live too aggrieved, and all kinds of pressures at home and abroad almost make them breathless.

The appearance of the Shenguang 1X-ray lithography machine made Li Weiguang and others feel angry, and finally they didn't have to endure the cynicism of those birdmen.

"We don't dare to take credit, in fact, this lithography machine can be born, and the president should account for 90% of the credit." Gao Zhiyuan is not exaggerating at all.

The direction of the X-ray lithography machine was chosen by Huang Mingzhe, and the two key materials come from the photosensitive material law model, and the full set of software systems is closely related to Huang Mingzhe.

In addition, there are simulation space technology and finite element inverse analysis technology mastered by the Thinking Society, which promotes the strength of Shenguang Instrument Company in integration and improvement.

Although SMIC and HiSilicon were very surprised, the researchers or employees of Shenguang Instruments present all agreed with Gao Zhiyuan's words, and Zhao Jun did not break the idea of asking the end of the sand pot for this kind of thing.

"Mr. Gao, I don't know what the price of Shenguang 1X-ray lithography machine is?" Zhao Jun hurriedly asked.

"1.5 billion units."

Grunt! Although Zhao Jun had already expected that the price of Shenguang 1X-ray lithography machine would be very high, he did not expect it to be as high as 1.5 billion.

Of course, the high price is also excusable, and the R&D funds of Shenguang Instrument always have to be earned, and no one wants to lose money when doing business.

But then he relaxed, because there is a subsidy for the purchase of Shenguang 1X-ray lithography machine, and the subsidy given by the state is as high as 40%.

In other words, there are 1.5 billion Shenguang 1X-ray lithography machines, and 900 million after subsidies.

However, this subsidy policy is only for two years for the time being, and it must be obtained by Chinese enterprises, and each lithography machine will be registered and cannot be transferred at will.

In addition, the subsidy is not directly given money, but after the enterprise buys the full amount from Shenguang Instrument, the state will offset this part of the subsidy in the form of tax reduction.

Zhao Jun and Li Weiguang discussed quietly for a while, and finally reached an agreement with Shenguang Instruments, SMIC ordered 10 Shenguang 1X-ray lithography machines from Shenguang Instruments, and the contract was executed in two years.

This contract is as high as 15 billion, and this year's 5 units are 7.5 billion orders, and the requirement of Shenguang Instrument is 50% of the deposit.

And the order, no matter whether the purchase company wants a lithography machine or not, Shenguang Instrument will not refund, if the order is canceled for no reason, not only the deposit will not be refunded, but it will also be included in the blacklist of the thinking club.

As a listed company, SMIC immediately announced that it had ordered 10 Shenguang 1X-ray lithography machines from Shenguang Instruments.

This huge order not only stunned the world, but also stimulated SMIC's stock to skyrocket, soaring 16% on the day.