On the morning of June 15, Luo Sheng came to the Cte d'Azur laboratory, and the most exciting news for him in the second half of this year is that the prototype of the mass-produced EUV extreme ultraviolet lithography machine will come out during this time.

At around 8 o'clock in the morning, Luo Sheng came to a 22,580-square-meter dust-free studio in the Cte d'Azur laboratory, and all the people inside were wearing dust-free suits to enter.

At this moment, there are more than 100 technicians in the room, all of whom are top engineers, and more than two-thirds of them are technical masters from major companies in the field of domestic precision manufacturing.

Luo Sheng, through Shengfeng Capital as a link, with the lithography machine as the core, softened this force together five years ago and launched a five-year battle against a goal, and this collective was a five-year battle.

Without the financial support of Shengfeng Capital and the technical support of the Cote d'Azur, this team would not have been formed, let alone a technology node together.

"Mr. Luo is here!"

"Mr. Luo."

"Mr. Luo is early."

Everyone stopped communicating when they saw or heard this, and looked at Luo Sheng who appeared here, and everyone respected him.

The lithography machine modules are too complex, with tens of thousands of precision components, which means that a huge industrial chain is needed, and long-term support of capital is required to bear the risk of losing all money.

This is almost impossible to do, but Luo Sheng has given hope to all those who focus on this field and want to make a career and break the monopoly of ASML, and now the future is promising.

In fact, in 2006, the world's first EUV lithography machine prototype was born, which was launched by ASML, and the first prototype NXE3100 for research and development was created in 2010.

And this year, according to foreign media reports, ASML finally created a mass-produced prototype this year, that is, in 2015, in this research and development process, Intel, Samsung, and TSMC have definitely had a lot of blood transfusions from semiconductor manufacturers.

However, the research and development of domestic EUV lithography machine, on the issue of blood transfusion, is almost supported by Luo Sheng alone, and no second person dares to do this with this courage alone, because the amount of money invested is sky-high.

Everyone made way for Luo Sheng, and he came to a transparent glass separation wall and stood, looking at the scene inside the separation wall, at this moment a sophisticated equipment was being modularly assembled under the operation of dozens of staff.

"The art of this size is the best praise for capital, and it is not in vain that I spent five years burning more than 600 billion yuan into it." Luo Sheng looked at the internal scene and muttered to himself, he was quite satisfied with the development progress of the lithography machine equipment.

In the past five years, in order to build domestic EUV extreme ultraviolet lithography equipment, 20 billion US dollars have been invested every year, and about 100 billion US dollars have been invested so far, and the investors of this money are Cote d'Azur and Shengfeng Capital, and there is no third party in addition.

Luo Sheng contributed money and technology, and other friends and business partners received an investment fund and related technology according to their own fields and began to work around this industrial chain.

Of course, there are also people who cheat money, in the past five years, more than a dozen manufacturers have defrauded Luo Sheng of dozens of dollars, and the money is completely wasted, but these manufacturers have also been kicked out, and some people have been sentenced.

Such a risk is within Luo Sheng's acceptable range, and he will not really expect that there will be no bad people in the team, there are bad people who are not afraid, I am afraid that there are bad people who have not been found, but the current team is clean.

They may all have their own little ninety-nine, and Luo Sheng does not expect them to have the lofty ideal of selfless dedication to the cause, which is also an unrealistic utopian idea.

But it doesn't matter, just maintain the market and common interests, and if you get vested interests, you will do your best for this interest.

A technical person in charge from a friend who was present walked next to Luo Sheng, "Mr. Luo, the main performance indicators of the lithography machine, the technical pain points such as the size range, resolution, alignment accuracy, exposure method, light source wavelength, light intensity uniformity, and production efficiency of the supporting substrate have been solved." ”

Luo Sheng nodded and asked, "What about the technical problems in the light source system?" ”

The other party immediately replied: "It's basically solved." ”

Luo Sheng: "Basic? That is, it has not been completely solved, and it is solved as soon as possible. ”

It is worth mentioning that the composition of the EUV light source system, the light source is composed of three major units: light generation, light collection, spectrum purification and homogenization, and the related working components mainly include high-power CO2, lasers, multi-layer coated mirrors, loads, light collectors, masks, and projection optics to form plasma, and plasma uses multi-layer film mirrors to reflect and purify the energy spectrum many times, so as to obtain 13.5 nm EUV light.

Just such a light source problem will involve more than a dozen manufacturers to develop support, which shows that the difficulty of manufacturing this thing is high, just throwing enough money is secondary, technology is even more important, and domestic manufacturers actually have no core technology.

But fortunately, Luo Sheng's own technology was obtained through Xiao Na's completion simulation for EUV lithography machines, and then the technology was distributed to major manufacturers to manufacture according to standards, and the technology was also licensed to them.

It is precisely because of the licensing of technology that the major manufacturers can be maintained.

By consciousness and ideals?

Although Luo Sheng likes to say this, he never does it.

Otherwise, such a complex chain, once the manufacturers in a certain link are in a mood, everyone is staring, this is something that Luo Sheng can't allow, the capital cost, time cost, and sunk cost are astronomical, and they must be given a little restraint, otherwise the team will not be easy to bring.

The naming of the extreme ultraviolet lithography machine has long been determined, codenamed "Purple Star Lithography Machine", which is also the most advanced lithography machine equipment independently developed by China at that time without relying on foreign technology.

The advent of the purple star lithography machine will announce that the domestic lithography machine equipment is in the same echelon as the EUV lithography machine under ASML, completely breaking the monopoly of the top lithography machine equipment by foreigners.

Luo Sheng retracted his gaze and looked at the technical experts sent by the major manufacturers present to collaborate and said: "The purple star lithography machine can use extreme ultraviolet light with a wavelength of 13.5 nanometers, so as to realize the chip production of 14 nanometers, 10 nanometers, and 7 nanometers processes, and through technology iteration and upgrading, the chip production of 9 nanometers, 8 nanometers, 6 nanometers, 5 nanometers, 4 nanometers and even 3 nanometers can also be realized in the future." ”

"The technology upgrade plan Cte d'Azur laboratory has been doing, the upgrade iteration must be collaborative, when necessary, the major supply chain partners come to me to ask for technology authorization and distribution, you can go back and bring the words to your boss, I will not contact them one by one."

Everyone nodded their heads again and again, this model simply says that R&D is especially theoretical, and the Cote d'Azur laboratory is doing this.

Supply chain partners are responsible for realizing Luo Sheng's idea, that is, to make physical objects according to standards, which is no one more difficult to say, it is difficult, but it is relatively difficult to be creative.

You know, give these technologies to the third brother next door, let them copy it, and it is necessary to have a foundation to make physical equipment according to the standard, which is the foundation of the manufacturing industry.

……

Chinese Net