Chapter 170: EUV Lithography Machine?

I had experience in improving the 8-inch wafers used in 90nm chips, so I was able to improve the quality and yield of the wafers. ”

Hearing Lin Xuan's words, many people at the scene nodded in approval.

Indeed, the biggest difference between an eight-inch wafer and a six-inch wafer is the processing process.

In the same time period, a lot of money can be saved when using eight-inch wafers to produce chips.

If you don't care about the cost, the six-inch wafer can indeed be used, and Lin Xuan said that the quality of the wafer will be improved, so it will be better.

"So the next task for us is to solve a series of manufacturing problems after wafer dicing."

As Lin Xuan's words landed, the people at the scene also nodded again to indicate that they knew.

Then they all looked at Lin Xuan curiously, wanting to see how Lin Xuan would arrange the task for them.

However, at this time, Lin Xuan did not immediately arrange the task, after all, Lin Xuan didn't know much about many people on the scene, how could he arrange the task?

So Lin Xuan needs to talk about what are the problems he is currently encountering?

What equipment do they need to develop, and then they can arrange research assignments according to their wishes and what they are good at.

"There are many machines for the production of chips, but some of the machines are currently using 150 nanometer equipment in Hantang Technology, which can barely be used when modified."

"Because of the limited funds, our scientific research tasks are placed on core equipment that can never be purchased, such as lithography machines, etching machines, high-energy ion implanters, ,......"

After a pause, Lin Xuan continued softly:

"Among them, the most difficult ones are lithography machines and etching machines, thin film deposition equipment, and high-energy ion implanters."

"Thin film deposition equipment, the island country is a world leader, and we also have to conquer the chemical materials used in thin film deposition equipment.

The situation is similar in terms of etching machines, and the most difficult one is the lithography machine at present. ”

But then someone spoke:

"The lithography machine is actually not difficult, in the final analysis, the lithography machine is just a problem with the accuracy of the equipment and the lens and the scanning and exposure system, and we don't have a big problem with the light source.

We have the world's leading laser crystal KBBF, and Daxia is also at the world's leading level in the field of lasers. ”

It was one of the young graduate students who spoke.

Although many of the sciences and technologies of Daxia have always been backward in the eyes of the world, they are actually not weak in some special fields, especially in the field of military affairs.

In fact, Daxia has also studied this thing for a long time, and it has its own unique results, that is, the KBBF crystal used in the laser!

This KBBF crystal is not simple, and it can be said that it immediately stood at the forefront of the world's laser field after Daxia invented it.

After the interruption of the sale of KBBF crystals in 2009, the laser research of Medi was forced to stop for 15 years!

It was not until fifteen years later that they developed a new laser crystal to replace the KBBF crystal of Daxia, and resumed large-scale research on lasers.

Therefore, Daxia's laser technology is actually not weak, and it is at the world's leading first-class level both now and in future generations.

Among them, the sales of laser products in Daxia have also reached 50% of the global market for a long time, which can be said to be a rare technological leadership!

"No, the KBBF laser crystal can't make a lithography machine, the laser of the KBBF crystal is too strong, and the ultra-deep ultraviolet light emitted by the laser (EUV) is too sharp.

If you're not careful, the entire chip will be damaged and you won't be able to use extreme UV light unless we can achieve a surprising level of control accuracy and alignment imaging system. ”

At present, the lithography machine on the market uses ultraviolet light source, which is divided into ultraviolet light (EV), deep ultraviolet light (DUV), and extreme ultraviolet light (EUV).

Among them, the wavelength is shorter the back of the light source, the sharper the lithography knife, and the higher the requirements for precision control.

Therefore, at present, there is no lithography machine in the world that uses extremely deep ultraviolet light (EUV) as a light source to make lithography machines.

After all, with the current process technology of tens of nanometers, there is no need for such high-precision lithography machines, and most lithography machines still use ultraviolet light (EV).

Only the most cutting-edge 45nm process technology uses the deep ultraviolet light source before EUV, which is also a DUV lithography machine.

As for the next EUV lithography machine, it is not available at present, and the reason why there is no is this because there is no demand for this at present.

Of course, the real reason is that the cost of developing such an EUV lithography machine is too high, no less than designing and developing it from scratch, so there is no such EUV lithography machine on the market at present.

"That's right, lithography machines are not easy to make, and you may be in other fields, so some of them take it for granted, and the lenses alone can get us stuck."

At this time, a doctor in the front row of the crowd also said that it is not easy to build a lithography machine.

In his opinion, the most difficult part of the lithography machine is the lens part.

The mirror error required by the lithography machine is very small, and the mirror error cannot be greater than 0.05 microns.

The range of this error is a figurative analogy, if the mirror error is compared to the end of the world, then the flatness error of the entire end of the world can not be greater than ten millimeters!

And the most terrifying thing is that there is not only one such lens, because the lens actually has an imaging error, and the impact of this imaging error in the lithography production process is very serious.

Because a little deviation will damage the entire chip, after all, it is tens of nanometers in size, and the light shines to the wrong place, and it will definitely be short-circuited when it is finally manufactured into a finished product!

Therefore, in order to solve the imaging error, the lithography machine needs a lot of lenses to solve the problem of imaging error.

This is also why many expensive camcorders or camera lenses are so long.

The reason is actually the same as the problem faced by the lithography machine, in order to solve the problem of imaging error, there are a lot of lenses in the camera lens!

These lenses are high-precision lenses, and the accuracy requirements for each other are very high, so there will be a phenomenon that a lens will be more expensive than a camera.

And if nothing else, let's just say that there are actually five to six lenses in the mobile phone lens module of later generations!

The lithography machine is naturally more demanding than the camera and mobile phone lens, so the current lithography machine is getting deeper and deeper into the level of tens of nanometers.

The requirements are getting higher and higher, and the number of lenses is also increasing, and the current lithography machine lenses have reached sixteen to twenty lenses.

What people didn't know at this time was that in later generations, there were already 29 EUV lithography machine lenses that could produce a few nanometer chips!

This is also the reason why Lin Xuan is willing to spend 100 million funds to acquire the tattered Phoenix Company.

Because the requirements for these lenses are too strict, for the sake of those eighth-level workers who specialize in mirror polishing, Lin Xuan also gave up 100 million funds to buy them!

"Let's let Mr. Lin Xuan decide what to do."

In the front row of the crowd, Academician Wang looked at the doctors and graduate students who were faintly inclined to quarrel, and he spoke slowly.

As Academician Wang spoke, in an instant, the scene fell silent.

Then people looked at Lin Xuan, and under the gaze of thousands of pairs of eyes, Lin Xuan also slowly spoke:

"Regarding the issue of lithography machines, my decision is to abandon the deep ultraviolet (DUV) lithography machine and directly develop the extreme ultraviolet (EUV) lithography machine!

Moreover, there are not too many companies in this field of EUV lithography machine, and there are not too many patents in this field, which is just convenient for us to play freely, and the design difficulty is greatly reduced. ”

Hearing Lin Xuan's decision, some doctors at the scene immediately shook their heads and disagreed with the point of directly skipping the EUV lithography machine and directly developing the EUV lithography machine.

"Mr. Lin, although we have an advantage in the light source because of the KBBF crystal.

However, it is a difficult problem to have an imaging positioning system on the mirror level, and the performance requirements of the parts of the lithography machine are very high, and the accuracy is also very high.

I'm not talking about the design, but we have that material, do we have that machining accuracy? ”

With the questioning doctor's words, the scene fell into absolute silence.

Indeed, the reason why foreign countries are more advanced than us is that they have a rich contingent of workers.

That is to say, in addition to having a large team of eighth-level and ninth-level workers, the accuracy of their machines is also very amazing!

The lithography machine is a thing that involves all fields, it involves optics, machinery, materials, chemistry and other fields, and is called the flower of industry.

There are many things, if Daxia wants to design, you can design it, but you can't process it!

Although there are eighth-level workers and nineth-level workers, how many things can eighth-level workers and ninth-level workers make?

At this time, looking at the people who fell silent, Secretary He also spoke in a timely manner:

"Don't worry about machining accuracy, because we have changed a lot compared to the difficult period of "two days and one star"!

Although the machining accuracy of our machine is not good, I have a large team of workers in Daxia! ”

Speaking of this, Secretary He said with a smile:

"This time, in order to overcome the 45nm process technology, the above is also ruthless, and a certain old man also made a special statement that he will fully support whatever he wants, whether it is the military or the civilian, he must fully cooperate.

So whether it is a state-owned factory or a military factory, as long as you can design it and you pay the commission fee, then I will help you get through the link, even if you use manual hard stacking, you have to pile up your parts!

In addition, there is no need to worry about material problems, this time the above is also ruthless, in order for me to be able to advance the semiconductor process to 45 nanometers.

As long as Hantang Technology gives money, some of the strategic materials that have been collected with great effort are also ruthlessly opened in the warehouse for you to use, so you don't have to worry about material problems.

As long as we have it, we will give it to you immediately, and if we don't have it, we will try our best to get it to you! ”

Hearing Secretary Chen's speech, the scene fell into absolute silence!

There was a look of horror in everyone's eyes, they didn't expect that the top would attach so much importance to it!