Chapter 128: Lithography Machine
Although she is already an old husband and wife, Zhao Ting is still a little unaccustomed to being too affectionate in front of Aunt Liu. On the other hand, Aunt Liu doesn't seem to be able to see what to do.
Zhao Ting specially opened a bottle of chrysanthemum white and filled it for all three of them.
"I wish you the results of your research as soon as possible", Zhao Ting raised her glass and sent her blessings, and the three of them gently clinked glasses, and they all drank it all.
After continuing the second glass of wine, Zhao Ting raised it again.
"I wish our national construction out of the fog, the country rich and the people strong."
"It will definitely be, and it will surprise you", Li Guocheng raised his glass in response, and the three of them toasted again.
"I'll talk about the third glass of wine", Aunt Liu hurriedly said: "I wish you kindness, love, and many blessings."
Zhao Ting and Li Guocheng looked at each other and smiled, and the tacit understanding was all in the wine.
The two of them discussed not having children until they were 30 years old. While you are young, you should make more contributions to the country.
Li Guocheng was infected by the people around him, and now he is also a hot-blooded young man, and sometimes he himself feels incredible.
A good night's sleep.
Three days later, Li Guocheng walked out of the separate laboratory quietly, expressionless, the three of them had already gotten up and were ready to run, and after seeing that there was no movement behind Li Guocheng, they stopped again and looked at him fixedly.
Walking beside them, Li Guocheng said softly: "It's done."
"What?"
"What did you say?"
"What is true?"
The three of them excitedly asked Li Guocheng for confirmation, they had been waiting for such a day for a long time, and they were dreaming about this day.
"Photoresist and etchants", Li Guocheng paused for a moment, and then said in a firm tone: "It's done."
"Hooray!"
"Oh my God!"
。。。。。。。
The three of them shouted and hugged Li Guocheng. I don't know who left the tears first, and the other two soon followed suit.
Li Guocheng's eyes were also red, and he tried his best to restrain his tears.
Everyone was lively for a while, and Li Guocheng said: "I said, you record."
The three of them hurried back to their workstations, picked up their notebooks, and waited for the records.
Next, Li Guocheng described the various proportions and experimental characteristics of today, and highlighted the optimal ratio.
"Zhang Zhijing, Zhou Xiaojuan, you follow the ratio I said, and complete the repeated experiment as soon as possible."
In the past half month, they have been verifying the ratio and verifying the stability every day. When Li Guocheng was resting, he often systematically explained chemistry and physics to them, and they felt that their knowledge was gradually improving.
This made the three of them respect Li Guocheng even more. It's not a master and an apprentice, it's better than a master and an apprentice.
Now the second daughter has long lost the previous emotional resentment, and now Yan Jiefang and Zhao Zhijing seem to feel a little, Zhou Xiaojuan has also found a partner, is a formal worker of a supply and marketing cooperative, and it is said that they will get married at the end of the year.
Li Guocheng called Yan Jiefang aside alone and asked about the situation of the purple light projection.
"Brother Li, according to the method you said, the current experiment of purple light irradiating the pickle mold in parallel and then shrinking the pickle mold pattern has been very stable."
"Great, take me over and have a look".
In another corner of the lab, a black iron one-way hood was seen, with an almost semicircular silver light-reflecting coating inside, and a mercury lamp installed inside the hood to produce parallel violet light.
In the middle is a pickled template carved by Li Guocheng, below which is a lens group composed of three convex lenses, and at the bottom is a black wooden board.
Yan Jiefang confidently turned on the mercury lamp switch, and at this time, a beam of purple light was projected on the black wooden board, and a little fluorescence appeared on it, and a shrunken figure appeared on the wooden board, and the lines were very clear.
Li Guocheng was overjoyed and patted Yan Jiefang's shoulder hard. After scanning the three-dimensional image, remove the lampshade, and polish the reflective layer inside by hand with the blessing of telekinesis.
The convex lens is then finely polished. After the reinstallation was completed, the telekinesis was turned on, and the focus was adjusted full, until the graphic lines projected onto the top of the board were the most clear, and the dimensions were noted.
Li Guocheng took matters into his own hands, using the Dawning II machine tool, and completed the manufacture and installation of the first generation of lithography machine in two days. It is divided into two parts, the upper part is the violet light generation module and the mask mounting bracket, and the lower part is the base, which can install the wafer, and the wafer installation size is adjustable.
The upper part is carved on the shell with an engraving technique, carving a mighty and domineering dragon, and the dragon's mouth is the projection port of purple light. A dragon's claw is used as a mount for pickling templates.
The violet part can be moved on the base plane, and the moving accuracy exceeds 0.01mm, mainly the highest measurement accuracy of the rolling mill is 0.01mm.
Although the whole lithography machine is simple, it can meet the requirements of industrial production. Li Guocheng believes that this is the most advanced and beautiful lithography machine in the world.
The lithography machine was thoroughly cleaned with a fan, and Li Guocheng and Yan Jiefang took it to the newly built dust-free workshop. Through changing clothes, blowing and other links, enter the workshop.
The lithography machine was fixed to the specially set aside workbench, rechecked and adjusted after powering on, and left the workshop.
At this time, the clean room is divided into three spaces, which are called the wafer preparation room, the lithography room and the post-production room. They are separated by large blocks of double glazing. The sizes are 200 square meters, 300 square meters and 500 square meters.
Vacuum lifting furnaces, microtomes and grinders are installed in the wafer preparation room. The lithography room is equipped with a vacuum oxidation furnace, a vacuum diffusion furnace, a lithography machine and an etching machine.
The etching machine consists of three corrosion-resistant chambers, the first two chambers are used to etch wafers and the second chamber is used to store the cleaning liquid. It is said that it is an etching machine, but in fact, the whole process is operated manually. Move the wafer from one liquid tank to another.
Only the main body of all vacuum furnaces is in the workshop, and the other parts are placed in an equipment room outside the dust-free workshop, and there are glass windows between them, through which the workers in the dust-free workshop can command the workers in the equipment room to start and stop each vacuum furnace.
The later workshop mainly completes the cutting, optical inspection, packaging and testing of the chip. There are four rows of workbenches that can accommodate a total of 50 people working at the same time, and against the wall are storage cabinets.
Almost all the equipment in the three workshops was personally participated by Li Guocheng, and at least they were assembled by himself. All workshops are brightly lit and very empty, and no one will affect anyone when the workers operate.
Now everything is ready only to Dongfeng, and Dongfeng is being verified, and the verification needs to have the conditions for industrial production.
After a week, all validation work was completed and sufficient photoresist and etchants had been dispensed.
On a new day, at 8:30 in the morning, there were several people standing in the dust-free workshop at this time, Li Huaide, Wu Liankui, Wang Gong, Master Yi, Zhang Tou, Zhang Zhijing, Zhou Xiaojuan, Yan Jiefang, Tang Danian, Wang Dayong and the three seventh-level fitters who did not deserve to have names.
Li Guocheng is doing the final debugging in the lithography room. Everyone stood in front of the glass, and no one was willing to sit down, and they all stared intently at Li Guocheng's operation.
Half an hour later, Li Guocheng turned around and made an OK gesture to everyone, although some people didn't know the specific meaning, but they could understand that everything was normal.
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(End of chapter)