"The personnel are all in place and ready to start testing." Xu Yun of the Institute of Optoelectronic Technology was wearing a special research suit, and reported to Hou Shengchang, president of the Academy of Sciences, next to him, after the arrangements were made.

Hou Shengchang, who was also wearing a research uniform, immediately raised his hand when he heard the words and said: "You are the person in charge of the project, you can do it according to your own arrangement, I came here this time mainly to watch." The tone of his voice was very soft, and he did not mean to dominate the command at all.

At the beginning, he took a fancy to Xu Yun's strength and personally went to Jingzhou University to invite him to take charge of the lithography machine project.

It's only been a little over a year since then.

But the gains have been enormous.

Xu Yun led the project team of the Institute of Optoelectronic Technology and successfully manufactured the first extreme ultraviolet lithography machine in China.

It has far-reaching implications.

It can be said that the domestic semiconductor field has entered a new milestone.

When he learned that the first extreme ultraviolet lithography machine was about to be tested on the chip, he almost did not hesitate, and immediately pushed off the rest of the trip and took a plane from the imperial capital to Jincheng.

As such an important moment, he, the dean, must have witnessed this great scene with his own eyes.

Xu Yun knew Hou Shengchang's character, so he naturally wouldn't think too much about such a trivial matter, and immediately replied with a smile on the corner of his mouth.

"I see, Dean."

After saying that, he ordered the staff: "Let's start." ”

At the same time, Luo Changhui, Yang Jing and others, who were sticking to the scene, could not hide the excitement and excitement in their hearts although they were all wearing professional clothes.

As the old man who developed the lithography machine, they didn't know how many times they dreamed of seeing the domestic extreme ultraviolet lithography machine, and now this dream is about to completely become a reality that can be touched, and it is too difficult to still maintain inner peace and silence.

Even Hou Shengchang's breathing became short.

However, the more this time, the stronger the worry in everyone's hearts becomes.

It's not that I don't trust what I've done for so long, it's just that anything can happen before the last minute.

It's really hard to let go of your mind completely.

This test is related to the performance of the entire lithography machine, and only after passing the test can it be carried out to the next delivery link, otherwise it will be re-optimized and debugged to check the problem.

But if the situation turns out to be like this, I don't know how long it will take to debug in the middle.

It will certainly not be possible to deliver the lithography machine according to the previously disclosed time, and the semiconductor field will inevitably deteriorate further by then.

This is definitely something that no one here wants.

Therefore, after Xu Yun officially gave the order, everyone was engrossed and patiently waiting for the final result.

June 5, 2021 is definitely an extremely important day for the domestic semiconductor field.

The precision instruments in the research institute are made up of hundreds of thousands of parts, and it is difficult to take your eyes off them, and at this moment it seems that they have become a work of art.

At the same time, its value is unimaginable to ordinary people.

It is no exaggeration to say that the price of an extreme ultraviolet lithography machine is as high as billions of dollars.

The lithography machine developed by Xu Yun with new core technology is much lower than ASML's cost.

This is also the advantage of domestic extreme ultraviolet lithography machine.

If they compete with each other in the future, they will quickly lose their original competitiveness.

The preliminary material preparation has already been completed, and the chip-scale monocrystalline silicon rods have been cut into thin slices and turned into high-purity chip-level silicon wafers, that is, wafers.

If you want to make a wafer into a chip, you first need to prepare a lithography mask.

Its function is to draw the functional module circuit system and physical structure map of the chip on the printing master, so as to start the mass manufacturing and production of the chip later.

The chip tested this time is the smart car chip jointly designed by the Artificial Intelligence Lab and Huawei Technology.

Yan Kaiming, the head of the laboratory, named it Lingsi.

It is a 7nm process chip.

At this time, Xu Yun, Hou Shengchang, Luo Changhui and others have come to the main control system of this extreme ultraviolet lithography machine.

You can see that the wafer is about to enter the next lithography stage.

When this huge precision semiconductor equipment was running, Xu Yun introduced it to Hou Shengchang on the side.

"Dean."

"The chip manufactured this time is a smart car chip, which is designed by the artificial intelligence laboratory and Huawei Technology under Deepin Technology."

"And it's still using Yinglong EDA."

When talking about the last matter, Xu Yun deliberately accentuated his tone.

Previously, when several overseas EDA giants announced that they would be restricted from using software, Hou Shengchang said that there was no need to worry, and some companies were already developing domestic EDA software.

It can be seen that he has a good understanding of Warwick's Yinglong EDA project.

However, after hearing this, some surprise inevitably flashed in his eyes.

The next second turned his face sideways and asked, "Has the Yinglong project been completed and actually started to be applied?" ”

Apparently this was a surprise.

Of course, he can't be blamed for this, who would have thought that after Warwick chose to boldly try to assist software development with the help of artificial intelligence models, it would improve the efficiency of the entire development by so much.

Otherwise, even if the first extreme ultraviolet lithography machine can be delivered, I am afraid that Yinglong's EDA is not perfect.

There was no need to hide this matter, Xu Yun organized a language explanation after a little thought.

"Yes, Dean."

"The Yinglong EDA project has been completed as early as a few years ago."

"So fast?" Hou Shengchang exclaimed.

Xu Yun replied with a smile: "This is because they use the assistance of the clumsy artificial intelligence model. ”

"I see." When Hou Shengchang heard this, he immediately figured out the middle situation.

At present, the deep sea of artificial intelligence copied according to Ben Ben has been gradually applied to various fields, and has exerted far beyond human capabilities, and assisting software development is naturally nothing.

Hou Shengchang still has a certain understanding of this.

"Great."

"In this way, our chip manufacturing industry chain can be completely solved, and there will be no more constraints in the future."

Immediately, he thought of the effect of this situation, and the smile on his face suddenly became a little bigger.

Although the other people around him did not speak, they were in a good mood judging from their expressions.

Although the test has only just begun, seeing Xu Yun's calm and confident state has calmed them down a lot.

Before lithography, the surface of the wafer is generally heated at high temperature to produce an oxide film, which is used as a light guide fiber to facilitate the subsequent lithography process, which is also known as lamination.

Once the wafer has completed this process, the next step is to apply the photoresist.

It is worth mentioning that this is not a high-end photoresist produced by Neon's company.

It comes from a new photoresist synthesized by Xu Yun, and the data shown by the test far exceeds that of the other party.

Lower in terms of key costs.

However, because there was no high-end lithography machine in China before, there has been no way to actually test it.

Today it can finally replace its true value.

As long as the performance is stable enough, then mass production can be carried out to ensure the manufacture of chips.

Hou Shengchang was most happy about this, thinking that because Xu Yun Academy of Sciences had saved a lot of time and money in the field of photoresist, it made people feel comfortable.

You must know that photoresist is also an important part of chip manufacturing, and it must be overcome.

In the past, there was no high-end lithography machine in China, so it did not develop too much in the field of high-end photoresist.

The research is mainly conducted on low-end photoresists.

It simply cannot be used on a lithography machine.

Fortunately, Xu Yun synthesized a new photoresist by chance, otherwise there would be no high-end photoresist in the empty lithography machine, and today's test would still not be completed.

Even if it is successfully delivered, it will not solve the problem in the semiconductor field.

After all, even if you put a lot of effort into research immediately, you may not be able to develop a high-end photoresist in a short period of time.

"This time, I have to thank Professor Xu for the photoresist, otherwise today's test would have gone so far."

Maybe Hou Shengchang was in a good mood, and at this time, he didn't forget to mention Xu Yun's eyes full of love.

Once again, I am glad for my major decision to let Xu Yun be the project leader.

Speaking of which, it was Xu Yun's photoresist that caused a relatively large amount of speech in the world, so he made up his mind to invite Xu Yun to come over and develop the first domestic extreme ultraviolet lithography machine.

At this time, Luo Changhui next to him couldn't help but say: "Professor Xu's photoresist has really solved our big problem. ”

Xu Yun listened to the two of them put on top hats for themselves, and they couldn't cry or laugh in their hearts.

He immediately responded: "After all, it is a new type of photoresist, and it is unknown whether it can achieve a stable effect for the time being." ”

Naturally, he was not modest in what he said.

This new photoresist has not been tested by actual high-end chips since it was developed, and the current production stock is also limited, and many places really need to see the final results.

For example, the most important yield for fabs is yield.

If the chip defect rate of this photoresist lithography is large, then even if the cost of the photoresist is very low, it will definitely not continue to be used.

This is also the reason why it is difficult for new photoresists to have an international market.

Basic fabs are definitely not going to take any chances.

Otherwise, the loss will directly affect the profit.

Hou Shengchang obviously has great trust in Xu Yun, and when he heard this, he reached out and patted Xu Yun's shoulder and said comfortingly: "Without you, there would be no domestic extreme ultraviolet lithography machine today, so you have to give yourself more confidence." "I don't seem to think there's anything wrong with today's test.

The lithography machine then passes the extreme ultraviolet light through the lens and shines it on the integrated circuit mask prepared in front.

The circuit diagram drawn by the designer is exposed on the wafer.

Later, the photoresist needs to be dissolved.

The photoresist exposed to ultraviolet light during the photolithography process is dissolved.

After removal, the pattern left is the same as on the mask, and then etched.

Although this step is already tedious, it is necessary to go through ion implantation plating to polish the number of layers until the wafer is fabricated with chips.

Although the waiting process was relatively boring, Xu Yun, Hou Shengchang and others did not have the slightest impatience.

After the wafer reference circuit pattern is compared with each chip, the slicing begins.

and discard the defective chip.

The remaining chips are packaged and tested again before they can be packaged and shipped.

By following the entire process, it can be determined that the functions and operation of the lithography machine are within the ideal parameters at the time of design.

I don't know what will happen after a long period of operation, but at least I have passed the test now.

The next step is to determine the defect rate of the chip and the final performance of the resulting chip.

If there is no problem, it will be able to officially announce the delivery of the first domestic extreme ultraviolet lithography machine to the outside world.

It is believed that the explanation will definitely cause a global sensation.

"It will take some time to get the final chip test data, so the dean should go to the lounge first."

Xu Yun breathed a sigh of relief and deliberately said to Hou Shengchang beside him.

Now that everything that needs to be seen has been seen, the lithography machine will run on its own, so there is no need to stay where you are and wait.

"Don't worry, Dean, there will definitely be no problem." Luo Changhui, who was next to him, also took over the conversation and echoed.

Although Hou Shengchang is old here, in the face of the extreme ultraviolet lithography machine that makes people reluctant to give up, he would rather stop more and appreciate this big guy.

But thinking that it would take some time for the results to come out, and he happened to have other things to tell the project team, he didn't hesitate to nod his head and agree.

"Okay then."

As Hou Shengchang relaxed, under the leadership of Xu Yun, they went to the lounge not far away.

Since others still had to stare at the main control system to record data, at this moment, in addition to Xu Yun and Hou Shengchang, there were only two people in the lounge, Academician Luo Changhui and Researcher Yang Jing.

The domestic extreme ultraviolet lithography machine is progressing rapidly, and it can be officially delivered and used to manufacture chips.

This made everyone feel very good, and even the atmosphere of the lounge was much more relaxed.

"It's time to take a good look at the faces of those guys overseas, they wouldn't have thought that we would progress so quickly."

"When we announce this news, I believe the whole world will be moved." Yang Jing took Luo Changhui's words at this time and added with a smile.

Hou Shengchang next to him was also full of smiles: "The arrival of this day is indeed worth looking forward to." ”

"It's not far off."

The mood has never been happier than today.

Listening to everyone's conversation, Xu Yun wanted to say that he was unhappy, it was definitely fake.

But to be honest, his mind is not on that.

The successful research and development of domestic extreme ultraviolet lithography machine is already a certainty, and basically nothing will happen.

It can be said that it doesn't matter whether he continues to stay in Jincheng or not.

According to his plan, he would return to Jingzhou immediately after the lithography machine test was completed.

Although he often returned to Beijing to accompany Chen Shihe in the past few months, the total time was not much.

And Chen Shihe's due date is in August, and he naturally wants to stay by Chen Shihe's side for the rest of the time.

He knew that Chen Shihe would have nothing to do with her parents and mother by her side, and Chen Shihe had also asked him to focus on the project many times, but he knew very well that Chen Shihe definitely wanted him to be by his side.

Just as he was thinking about this, he only heard Hou Shengchang, who was sitting on the sofa in the middle, suddenly mention another thing.

"By the way, there's one more thing to tell you."

As soon as these words came out, including Xu Yun, Nailuo Changhui, and Yang Jing, they all raised their eyes and looked at Hou Shengchang at the same time.

I want to know what Hou Shengchang is talking about.

Hou Shengchang didn't sell it in this regard, even if he said it in a deep voice.

"Professor Tonino, Chief Technology Officer of ASML, wants to come to our Academy of Sciences to exchange lithography machine research and development technology, and the Academy has agreed to this and has booked the exchange location at your institute."

"ASML's Chief Technology Officer?"

"Want to talk to us and learn?"

Almost as soon as Hou Shengchang's words fell, Yang Jing next to him couldn't control his emotions and subconsciously shouted two sentences.

There are a lot of question marks in my mind.

In the past, ASML was the world's top lithography machine company, and it was impossible to buy their high-end lithography machines, let alone exchange and learn R&D technology.

It's normal to be surprised.

Although Luo Changhui's expression was a little moved when he heard the news, he quickly returned to normal.

Then he spoke his own judgment.

"ASML's move is probably intentional, I don't believe he will share the lithography machine research and development technology with us."

"You guessed right." Hou Shengchang nodded in approval to the two, and then looked at Xu Yun and asked, "I don't seem surprised that you have any ideas." ”

Hou Shengchang is indeed right.

Xu Yun did not show any surprise at the news.

Even this is completely expected.

After all, his presence is very special in the scientific community, and in just a few years he has brought changes to many fields, and he has publicly stated that he will deliver the first extreme ultraviolet lithography machine this year, which will definitely cause concern for ASML.

Even if they don't believe that this thing can be successful, they will be a little worried in their hearts.

In this case, it is normal to take the initiative to send someone to contact you.

It's a pity that I can only say that the other party has made a wrong idea, and now that the domestic extreme ultraviolet lithography machine has been successfully developed, I am not afraid to let the other party know.

The thought stayed here, Xu Yun immediately smiled and said: "The other party suddenly sent someone to exchange and learn at this time, just to confirm whether we have successfully developed an extreme ultraviolet lithography machine." ”

"Since they want to know so much, let's just fulfill this wish."

"That's right, that's exactly what the hospital thinks." Hou Shengchang was very satisfied with Xu Yun's analysis, and the smile on his face became brighter and brighter.

Next, Xu Yun and Luo Changhui learned more about the chief technology officer from Hou Shengchang.

I learned that the other party would arrive in the imperial capital in two days, and then come to Jincheng.

Faced with this situation, Xu Yun must wait until he receives this technical executive before returning to Jingzhou City.

Anyway, the test of the lithography machine is a long-term job, and the next will be in a running state to manufacture Lingsi intelligent car chips, so Xu Yun is looking forward to the arrival of this technical executive more and more, I don't know what kind of special mood the other party will have after seeing this extreme ultraviolet lithography machine that can manufacture 7-nanometer chips.

It just happened to be able to use ASML, a giant company, to completely open up the global position of the domestic semiconductor field.

Then, I don't know how long it took, but the sudden knock on the door shook the spirits of several people.

Hardly hesitating, he immediately shouted, "Come in." ”

Liu Xing, a postdoctoral fellow who is an assistant to the researcher, pushed the door in, holding an unbound document in his hand, and his handsome face was full of excitement and excitement at the moment.

Seeing this, without waiting for Liu Xing to report the situation, Hou Shengchang, who had already stood up from the sofa, asked: "Is there a result of the chip test?" ”

"Yes, Dean."

"According to the test data, the chip defect rate of this batch of wafers is within the normal range."

"And there are no problems with chip performance."

Liu Xing quickly finished talking about these important information, and he could see that Hou Shengchang, Luo Changhui, and Yang Jing were finally relieved......

Thanks for the 500 coin reward for the needle piercing!

(End of chapter)