Chapter 794, the lithography machine is completed

The child's affairs are naturally handled by the child, Jiang Yan did not interfere more, and received a good news as soon as he arrived in the office today, after so two years of polishing, all the core components of the lithography machine have been polished today.

The lithography machine has high requirements for parts, which is quite rare, and what is more perverted is that many parts can only be polished little by little by our eighth-level fitters because there are no too advanced precision machining machine tools, and even have time to polish a little bit, and a part may be scrapped if you are not careful.

Therefore, these parts have been produced for a year and a half, and many parts still have and only one backup, that is, if it goes well, only two lithography machines can be assembled at most, and there is no backup, and if you want to have a backup, you can only install one.

On this day, all the engineers and technicians in the research institute, as well as the director and secretary, as well as some senior workers, gathered in the No. 1 workshop to participate in the assembly of this lithography machine.

"Comrades, after nearly two years of research and development, we have overcome all the difficulties in the manufacture of lithography machines, and today with the help of our workers, all the parts on the lithography machine have been processed and produced, and today we are finally going to start assembling this lithography machine!" Jiang Yan stood in front of the operating table, clenched his hands into fists, and said with a radiant expression.

"This lithography machine is the first lithography machine in China, and it will greatly improve the level of integrated circuit technology in China after completion! At the same time, it has also broken the blockade of foreign countries on our integrated circuits and made our revolutionary cause a big step forward. ”

This honor is yours and ours, and in short, it belongs to all of us. ’

As soon as Jiang Yan's words fell, there was thunderous applause below, and many people shouted words such as "Long live the Red Party." ”

"With the lithography machine, we can start trial production of integrated circuits!" Professor Wang said excitedly beside him.

"Yes, yes, when the time comes, we can develop more precise and small integrated circuits!" Professor Li also spoke.

"This precise XYZ 3-axis stage enables high-precision wafer position control"

After Jiang Yan introduced the optical lens, he then opened his mouth to the parts above.

"This is a diffractive optical lens, which can focus the laser accurately, which is very important."

"Isn't it, the CNC machine tools that Comrade Jiang Yan said before, the third-generation computer can become a reality, which is not a little bit for the improvement of our country." Professor Wei spoke.

Hearing Professor Wei's words, everyone's hearts warmed up, and they knew what it meant for the country that we had this chip.

Ordinary optical lenses are not coated, Jiang Yan and the batch of optical lenses they purchased can be said to be the best optical lenses in China, but they still can't meet the standards for the use of lithography machines, there is no way, Jiang Yan can only take the technical team to overcome the problem of coating, fortunately, after such a long time, qualified optical lenses have finally been produced by us.

At this time, out of the principle of confidentiality, only the people who have signed the confidentiality agreement are left in the first workshop, and the rest of the people leave the first workshop directly after the meeting.

"Okay, okay, let's get down to business, let's take a look at these parts first." Jiang Yan interrupted them with a smile.

Jiang Yan explained, and the engineers took notes carefully. Secretary Wang and Deputy Director Zhao also nodded frequently.

"Well, with these key components as a foundation, we can officially start assembling the lithography machine." Jiang Yan clapped his hands and continued, "I have formulated a detailed assembly process and steps, and then I can do it step by step, because this batch of equipment is too precious, it can only be completed by myself, you should pay attention to make records." ”

"Understood." Everyone nodded heavily, and there was a serious atmosphere.

So, under Jiang Yan's personal installation, all of them were assembled in an orderly manner, Secretary Wang was afraid of an accident and deliberately asked people to pull a cordon, and the assembly site was also silent, for fear that his voice would disturb Jiang Yan's installation.

The precise lens installation is completed, and the high-precision platform and rack installation are completed.

One by one the parts were carefully combined, gradually pieced together, and the carefully assembled parts were assembled again by Jiang Yan, and after two hours, a well-shaped lithography machine was presented in front of everyone.

"This, this is a success." Professor Wang looked at the assembled lithography machine and opened his mouth with some disbelief.

didn't wait for him to get an answer, but the next moment, there was a cheer in the workshop, and he realized that this lithography machine had really been successfully assembled.

Jiang Yan wiped his sweat and looked at this lithography machine with satisfaction, and a great sense of accomplishment swelled in his heart. As the first self-developed lithography machine in China, its birth is undoubtedly of epoch-making historical significance.

At the same time, it also represents a further improvement in China's manufacturing capacity.

After manufacturing, it is still not certain whether it can make chips without experiments. So Jiang Yan asked everyone to rest for a while. Then he came to the lithography machine and prepared to start experimenting with the manufacture of the first chip in China while explaining.

There are five main steps in chip manufacturing: silicon wafer preparation, chip manufacturing, chip testing and selection, assembly and packaging, and final testing.

The first step is to purify and purify the silicon from the mineral, which goes through a special process to produce a silicon ingot of the appropriate diameter. The ingots are then cut into thin wafers of silicon that are used to make chips. Finally, silicon wafers of different specifications are made according to different positioning edges and equal parameters of sewage staining. Since there are already monocrystalline silicon factories in China, Jiang Yan's customized chips have been produced in strict accordance with Jiang Yan's requirements with their help.

After the bare silicon wafer arrives, it goes through various steps such as cleaning, film formation, photolithography, etching and doping, and a complete set of integrated circuits are etched on the silicon wafer. Chip test/picking. Once the chips are manufactured, they are sent to the Test & Picking area, where the individual chips are probed and electrically tested, and then the good products are sorted out and the defective products are marked.

After the wafers have been tested and picked, they are assembled and packaged, with the goal of packaging the individual chips in a protective shell tube. The back side of the wafer needs to be ground to reduce the thickness of the substrate, and then a thick plastic film is attached to the back of the wafer, and then each chip on the wafer is separated along the scribe with a saw blade with a diamond tip, and the plastic film keeps the chip from falling off. In the assembly plant, the good chips are pressed or evacuated to form an assembly package, which is then sealed in a plastic or ceramic case.

In order to ensure the functionality of the chip, each packaged integrated circuit needs to be tested to meet the requirements of the manufacturing characteristics.

"To make a chip, you need to evaporate a photosensitive material on a silicon wafer, which is like applying a layer of photosensitive glue. Then, through the precise exposure of the lithography machine, a circuit pattern is generated on the photosensitive material. ”

Jiang Yan briefly introduced them to the manual start of the monocrystalline silicon that had been processed in the card slot, and he started with the most critical mask.

A mask is a pattern that is needed to block light during the lithography process and is essential for dividing the circuit structure.

Making a good mask requires precise technology, which is also one of the difficulties in the development of lithography machine, in order to make a high-quality mask, Jiang Yan has made contact with several scientific research institutes.

They have accumulated valuable experience in mask making, and after many repeated experiments and improvements, they have finally successfully developed and manufactured a usable mask for the lithography machine.

(End of chapter)