The core technology of EUV lithography machine is mainly composed of three systems.

The first is the EUV light source system, which is responsible for the special light required in the lithography process.

From the first generation of UV lithography machine to the fifth generation of EUV lithography machine, the wavelength of light has also been shortened from 436nm to 13.5nm.

The main principle involved in this is the relationship between the wavelength and clarity of light in optics.

The simplest reason is to enter the yellow tungsten lamp room, most people will feel dim vision,

Even if you add a few more light bulbs, it will always feel less bright and clear than the white LED light.

That's because the wavelength of yellow light is much higher than that of white light.

The wavelength of the light is like the waves of the sea, and the larger the wave, the greater the rise and fall of the water level on the sea embankment.

And the difference between the height of this water level, in the field of optics, has become an important factor affecting the sharpness of the shadow edges.

Therefore, in order to achieve a chip process with a smaller process, it is necessary to have a shorter wavelength and a more infinitely close to an absolute straight line of light.

In terms of EUV light source technology, according to the information that Kangchi can find so far, the domestic Ivy Light Institute should be close to the edge of breakthrough, but it is not clear to Kangchi what step it has reached.

He was going to try to understand the situation first,

If the conditions allow and the price is right, he may purchase directly from them.

Even if the technology is slightly substandard, it can save a lot of time and energy by purchasing it and improving and optimizing it yourself.

After all, there are more than 100,000 or 200,000 parts in a lithography machine, and if it is all up to Datang Heavy Industries to do it itself, it will have to be done in the Year of the Monkey.

And purchasing from them not only does not waste their scientific research results, but also makes use of their productivity.

It's a win-win situation.

Therefore, Kangchi does not exclude itself from becoming the role of assembly, debugging and improvement this time.

Putting such a complete industrial chain in Huaguo is not used, but rubbing every screw by yourself, which not only wastes such a good domestic resource and foundation, but also shows that you eat alone behind closed doors.

And to be able to use the domestic industrial chain to complete the manufacturing of all the parts of a lithography machine, only one country in the world can do it.

That's Huaguo.

It doesn't work to change to the old M.

They can't find a supplier of all the parts of the lithography machine only in their own country, and they have to cooperate with many countries around the world.

The huge cost of resource coordination will greatly increase the cost and time of the entire R&D project.

This is also one of the main reasons why many of Huaguo's products can achieve a much lower cost than foreign manufacturers.

In short, regardless of all the technologies of Ivy Light that have not broken through the EUV light source, Kangchi can try to borrow his R&D and manufacturing capabilities to quickly obtain a feasible light source system.

Now the light of lithography is there,

The next step is to collect and project the light through an optical system onto a silicon wafer coated with photoresist.

This optical system is also the largest cost in the entire lithography machine.

This part of Kangchi is ready to upgrade the lens production line of Daqin Optics, and then dismantle it to directly obtain most of the equipment parts required for the manufacture of lithography machine lenses and reflectors.

This will undoubtedly be much more efficient.

And after the upgraded production line, it is estimated that there is no even analysis project,

Because most of the technology in it, Kangchi has already obtained it when he analyzed the lithography machine, and he himself has a very large space for interpretation.

The only drawback is that he needs to do a certain amount of confusion in the next project, and these disassembled components are unknowingly mixed into the whole project.

Well

is to bully Yan Hui that they have no research on lithography machines,

At that time, it is estimated that Kangchi will let them do whatever they want, and they will do it, and there is not much room for thinking.

The last key system of the lithography machine is the two-stage system that carries the silicon wafers.

Its working principle is very simple, that is, the exposure part of the silicon wafer is constantly moved in lithography, but the technical content is actually very large.

Because this work platform must be fast, accurate, and ruthless.

speed, which determines the efficiency of the lithography machine,

If the movement is too slow, the output of the lithography machine will not work.

This requires it to stop quickly and accurately after moving at high speeds.

The position error of the stay must be within 1nm,

If the deviation is larger, the entire wafer will be scrapped directly!

What is this concept?

It is probably a car driving at high speed, suddenly and urgently stopping, and then the position error of stopping cannot exceed 1 mm.

However, this difficulty, in May this year, was just solved by the Hafnium Industrial University.

The vacuum high-speed superprecision laser interferometer developed by them has an astonishing displacement resolution of 5pm, and the displacement error is controlled at 30pm!

You know, 1000pm is equal to 1nm!

The displacement error of 0.03nm is simply awesome!

Kangchi simply wondered if they were just as open as he was......

To tell the truth, there are still a lot of capable people in Huaguo,

If it does not rely on the system, although Kangchi itself has a certain degree of certainty that it can overcome this technology, it does not know how long it will take......

Therefore, Kangchi has been constantly reminding himself that although the system is indeed easy to use, the pace of learning and understanding cannot be stopped.

This is not only to alleviate one's pain when analyzing the technology, so as not to die suddenly, but also to prevent nothing from being able to do anything in the future if there is a situation where the mastery point is not enough and self-research is needed.

In short, most of the technical difficulties of EUV lithography machines have been overcome or are about to be overcome by Huaguo, but it is still unknown which ones can be replicated and mass-produced.

In order to get the answer, Kang Chi made a special call to Chief Lu.

When he heard Kang Chi ask about the lithography machine, Chief Lu immediately cheered up and hurriedly asked: "Are you going to engage in the research and development of lithography machine?" ”

"Well, there's that idea."

"It's good to get a lithography machine! Well...... But aren't you busy mass-producing oil worms? Where is the time and energy to develop lithography machines? ”

"Take time to play and ......"

“……”

Subsequently, in the silence of Chief Lu, Kangchi consulted about the research of the EUV light source system of the Ivy Optical Institute and the double workpiece table system of Hafnium Gongda.

"Hmm...... They have indeed made some breakthroughs, but I can't say exactly what technical nodes they have reached and how long it will take to actually land...... You can ask Academician Zhang, he knows more about this. ”

So after Kang Chi hung up the phone, he dialed Zhang Dayuan's phone again,

As a result, as soon as Zhang Dayuan heard Kangchi's question, he directly said that it was not clear on the phone, and asked him to go to Yanjing for an interview.

Kang Chi strongly suspected that this old man was trying to trick him into the past and fool him into doing that steady-state micro-beam light source.

However, in order to shorten the opportunity to shorten the development cycle of lithography machines, Kangchi also had to follow his ......

Anyway, no matter what he said in the past, Kangchi just didn't do it with him,

Can he still detain Kangchi?

……

After more than two hours of flight, Kangchi arrived at Yanjing International Airport before dark.

Chen Hai's colleague came to pick up the plane, and after the three of them converged, they went straight to the HEPS project department.

After layers of security checks and reports, Kangchi finally saw Zhang Dayuan, who was wearing a hard hat and dressed like a construction site worker, in the project department.

Seeing that this old man, who is nearly seventy years old, can still live in the front line in high spirits and personally participate in the construction of the experimental project, Kang Chi can't help but feel a little admired.

"Academician Zhang, it's been a long time."

As soon as they met, Kang Chi took the initiative to shake his hand and exclaimed: "You are really a treasure knife." ”

"That's a must." Zhang Dayuan proudly pulled Kang Chi, "Let's take a walk, take you to visit first." ”

In the face of Zhang Dayuan's enthusiasm, Kangchi is naturally not easy to refuse.

What's more, he himself was actually quite curious about this place, so he followed Zhang Dayuan and simply turned around in this high-energy synchrotron radiation light source under construction.

The previous chapter was almost 4.,Fortunately, it was released after the modification.。

It is estimated that if it is written too carefully and too close to the facts, it is very easy to be 4......

To be on the safe side, the next in technology and nodes may be simply brought over,

And then a little bit of exaggeration, anyway, it's over.

I hope you don't have to find fault with it, just treat it as if I was blind and blew it a few times.

Well

In fact, I'm just bragging, really!

(End of chapter)