Chapter 130: 'Point Light' Test
After returning to Pingjiang with the sensor chip, Kangchi returned to his busy work, and at the same time, for the sake of priority, the camera could only be put in the back row.
Time passed day by day, and the one-month improvement period He Yong said was getting closer and closer.
Finally, on November 13, He Yong's phone called.
"The equipment has been renovated and the final inspection work before the experiment is being done, and it is expected that the test will start on the 15th."
"Well, I'll come over tomorrow, I've worked hard for you all this time."
The two then ended the call after a brief conversation.
Subsequently, Kangchi reorganized the R&D work of Datang Heavy Industries, and determined that the project could be carried out normally without him, and then began to leave for Changchun.
Two days later, in the clean laboratory of the Ivy Optical Institute, the researchers of the DPP-EUV light source project team were already fully armed and stuck to their respective posts, carrying out the last inspection before the test.
Kangchi was also standing in the control room at this time, looking at the light source equipment inside that was about the same size as an ordinary bedroom through the glass, and his heart was also full of expectations.
As long as the light source is done, the development progress of his lithography machine can skyrocket by at least one-third.
In addition, the lens manufacturing equipment that has been assembled in Pingjiang and the workpiece table that is being tackled.
The time for the combined commissioning of the three major parts of the EUV lithography machine is just around the corner.
After He Yong made a final check on the main parameters of the equipment and the experimental conditions, he walked to Kangchi's side, and said in a low volume as much as possible: "All the parameters have been verified and correct, and you can start." ”
"Let's get started."
"Hmm!"
The experiment was carried out in two phases.
In the first stage, the equipment is energized and then the solder gas is sprayed to test whether the magnetic field can suck the tin gas into the scrap collector as expected.
As He Yong gave the order to start experiments, the staff inside and outside the laboratory immediately began to act.
The device is energized and the magnetic field is pressurized......
As the data on the screen jumped wildly, the number was finally frozen at three thousand gauss.
The strength of this magnetic field is obviously not comparable with the magnetic field strength of hundreds of thousands of gausss of controllable nuclear fusion, but the volume and purpose of the two are different, in fact, there is no comparison.
For EUV light sources, the only way to confine the plasma and molten tin debris is to confine it, and no matter how high the intensity is, it is just a waste of electricity.
"First squirting preparation, squirting!"
As the staff pressed the button...... Nothing seems to have happened.
Well, this is not a rocket launch, and it is simply impossible for a person to see the jet of tin gas through the naked eye......
In the LPP scheme of striking the molten tin with a laser, in order to produce a stable and high-power light source, it is necessary to fire 50,000 lasers per second and hit the molten tin time and again.
In the DPP scheme, it is achieved through the energized 'ignition' frequency of the positive and negative electrodes, which is much more technically difficult, and because the frequency of the photoelectric switch is less difficult, the power improvement space is very large.
The real limitation is the frequency of tin injections.
Due to the limited physical structure, the current injection frequency is only 20,000 times per second.
Since it is impossible to increase the frequency of injection, Kangchi directly and vigorously performs a miracle, increasing the amount of injection each time, and each spray will electrocute it five or even ten times to convert tin into plasma to the greatest extent.
Anyway, there is a magnetic field confinement, and there is no fear of gases, debris and plasma flying around in electric shock.
Even so, the frequency of 20,000 times per second is exaggerated.
The results of the experiment can only be observed by replaying the experimental data through high-speed cameras and various analytical instruments.
After ten minutes, the results of the analysis of the test were in.
"No tin leakage was found, and all tin gas condensed into a liquid state after 0.8 seconds, and it entered the scrap collector smoothly!"
Hearing the analyst's tone excitedly read out the results, everyone's faces showed a look of joy.
This shows that the most important magnetic field design to support this design scheme is feasible!
Everyone can already feel the warmth of the dawn of victory shining on their faces!
He Yong took a deep breath, suppressed the excitement in his heart, and said in a deep voice: "Continue to the next link, 10 seconds of continuous spraying." ”
And then
10 seconds, 30 seconds, 1 minute, 10 minutes, 30 minutes!
The intensity of the tests continued to increase, but without exception, all of them were successfully completed!
He Yong finally couldn't suppress the joy on his face, and reported to Kang Chi excitedly: "Dr. Kang...... The first phase of the experiment was successfully passed! ”
Kangchi nodded: "Then let's start the second stage directly." ”
"Okay!"
Although everyone was a little hungry after a morning of experimentation, at this juncture, no one would have the idea of eating a meal and then coming back to continue testing.
Everyone is holding their breath, looking forward to the success of this machine, which has condensed their countless days and nights of hard work, and 'lighted' on another technical route with more potential!
"First ionization preparation, begin!"
As soon as the voice ended, the data transmitted from the light collector was transmitted to the big screen.
The extreme ultraviolet light parameter jumped from 0W to 500W!
Although this 500W extreme ultraviolet light only lasts for 0.00002 seconds, everyone knows that one of their hands has touched the door of success!
"500W, we made it!"
Everyone could no longer suppress the excitement in their hearts, and stood up to applaud Kangchi in celebration.
Kang Chi's face couldn't help but show a smile: "Yes, we succeeded." ”
However, this is a phased verification, which can only mean that this technical line is real and feasible.
Next, like the first phase of the experiment, they have to continuously improve the intensity of the experiment to determine whether it can run stably and directly enter the commercial stage.
Ten minutes later, the specific analysis data also came out, and the magnetic field still fulfilled its mission when the tin metal was just ionized.
It acts like an invisible cage, firmly confined the entire luminous area, and does not allow any matter to touch the equipment that should not be touched.
Then Kangchi directly asked He Yong to increase the intensity, from 10 seconds to 1 minute, and the third round was directly 30 minutes!
Stable light source for half an hour straight!
At this point, it can basically be proved that this DPP-EUV light source has commercial value!
When the last test of the day was over, the whole laboratory was boiling.
"It worked, it really worked!"
"We have a 500W EUV light source!"
"My God, Dr. Kang's improvement has gone straight from 80W to 500W!"
Applause and cheers echoed repeatedly in the control room,
Everyone hugged each other through thick protective suits, and tears of excitement were sprinkled on the transparent protective masks, adding to the joyful atmosphere of the laboratory.
Seeing this scene in front of him, He Yong's body couldn't help but tremble a little.
He never dreamed of doing such a scene many times.
Until today, the dream has finally come true.
It's a pity that this success is not what he brought to everyone......
He Yong's expression was a little complicated, and he turned his head to look at the young man beside him.
People of this age, in their institute, it is estimated that they can only be found among assistants, right?
"Congratulations, you've won."
"Thank you."
Of course, Kangchi could also feel the loss of He Yong in addition to his excitement, so he comforted him: "If it weren't for the solid foundation laid by you before, and the equipment improvement can be completed so quickly, this day will definitely not come so soon." ”
"Actually, I don't want to be the last to pick peaches, that's annoying...... As long as you can supply me at cost price according to the previous agreement, and then share 30% of the profits of my technology patents, the rest can be done. ”
He Yong shook his head: "Don't worry, I will fill in the experimental report truthfully, even if such a big credit is deducted on my head, I can't afford it, and I can share a little hard work is enough for me to be proud before I enter the soil." ”
Belch......
Although his words are a bit strange, it seems to be the same reason.
The power suddenly broke through from 80W to 500W, and the results were too great.
Even if He Yong could only share a little credit, it would be much better than his previous slow breakthrough of a few watts or dozens of tiles.
(End of chapter)