Chapter 385

"This one here is a high-density plasma etching machine, this one is a magnetron sputtering system, and this one is a scanning electron microscope, which needless to say you should all know. ”

Except for the MOCVD, the rest of the laboratory is full of some common instruments and equipment in the laboratory.

Needless to say, Gu Lu, even Chen Mo could recognize it at a glance.

Mo Chen's graduation project is to study the relationship between the bandgap of wide bandgap semiconductors and their specific physical and chemical properties.

And try to express the relationship between the two in functions or other mathematical language.

In addition to the basic material of GaN wide bandgap semiconductor, Chen Mo also needs to use some equipment in the experiment to collect data.

Scanning electron microscope, probe station!

These are the two pieces of equipment that Chen Mo needs to borrow.

Coincidentally, when Director Zhang took the scanning electron microscope to the location, he found that one of the microscopes was empty.

Director Zhang patted Chen Mo's shoulder and pointed to the vacant seat.

"Go to that scanning electron microscope and I'll teach you the specifics of how to operate this instrument. ”

A scanning electron microscope is expensive.

Chen Mo had operated several times before when he was a graduate student at Zhejiang University.

However, this is the first time that a wide bandgap semiconductor has been observed using a scanning electron microscope.

Some of the basic parameters of the microscope are not clear.

This requires Director Zhang's guidance.

Director Zhang explained to Chen Mo while operating, "When observing GaN wide bandgap semiconductors, we generally use a field depth of 3.2 nanometers, and the role is to choose a thickness of 0.85 nanometers, as well as magnification ......."

Scanning electron microscopy can obtain information on the microscopic morphology of wide-bandgap semiconductors through the acquisition of secondary electrons and backscattered electrons.

By acquiring X-rays, information on the chemical composition of wide-bandgap semiconductors can be obtained.

It is a very practical device.

Under the guidance of Director Zhang, Chen Mo got started quickly.

It can be done on your own in a few minutes.

"Then you continue to be proficient here, there are still people on the probe station side to use it again, and I'll take you to operate it later." Director Zhang patted Chen Mo on the shoulder, then got up and walked to Gu Lu, who was standing in front of the high-vacuum electron beam evaporator next to him.

"You have a good understanding of this student!" Director Zhang praised with a smile.

Gu Lu smiled slightly, "After all, he is a doctoral student, and this simple operation is not normal if it takes a long time to learn." ”

Gu Lu skipped this topic, pointed to the high-vacuum electronic water evaporator in front of him, and asked with a smile, "Director Zhang, have you also improved this equipment?"

"I really can't hide anything from you. Director Zhang touched his big bald head and smiled, "This equipment and that MOCVD are modified, Gu Lu, I'll tell you ......."

Director Zhang began to talk endlessly to Gu Lu about the specific modification details of this equipment.

Gu Lu listened carefully and nodded frequently.

This knowledge was something he had rarely been exposed to before.

All he knew was what was inside the prototypes of these devices and what their operating mechanisms were.

But in the face of this modified equipment, my eyes are black.

Just as Director Zhang was chatting with Gu Lu here, a researcher hurriedly walked over to Director Zhang with a folder.

"Director Zhang. ”

The researcher wore round-rimmed glasses and a Mediterranean hairstyle, and because he was wearing a mask, Gu Lu couldn't tell how old he was.

But listening to the voice, it should be in your thirties.

"Oh, it's Professor Fang!" Director Zhang's gaze fell on the researcher, and he introduced Gu Lu with a smile, "This is Professor Fang Qing from our semiconductor research center, who is mainly responsible for the research content of semiconductor doping control. ”

"Professor Fang, let me introduce you, this is Professor Gu Lugu from the School of Mathematics next door. ”

"Hello, hello!"

"Look up for a long time!"

The two briefly shook hands.

"Professor Fang, did you come to me for something?" Director Zhang asked with a smile.

"Oh. Professor Fang handed the folder in his hand to Director Zhang and said in a deep voice, "Director Zhang, the latest measurement results have come out." ”

Director Zhang glanced at the folder after opening it, and frowned tightly, "Still can't do it?"

Professor Fang smiled bitterly and shook his head, "Still no, we still haven't found evidence to prove the lattice position of the C impurity in GaN." ”

"Alas!" Director Zhang sighed after hearing this, "After so long of hard work, it turned out that it was all useless!"

Gu Lu looked at the two of them who were sighing for a long time, hesitated for a moment and asked, "Director Zhang, have you encountered any problems?"

Director Zhang did not hide it.

"To be precise, it's not that our research institute has encountered any problems, but that the entire field of wide bandgap semiconductors has encountered a problem. ”

Director Zhang began to tell Gu Lu about the details of this problem.

In the current semiconductor field, doping regulation is a key scientific and technological issue in the development of nitride semiconductor materials and devices.

The semi-insulating GaN obtained by C-doping is the mainstream method for the development of GaN-based electronic devices.

However, as a group IV element, C impurities have amphoteric characteristics in GaN, which can replace N atoms, Ga atoms, or form complexes with other impurities and defects, which makes the doping mechanism of C in GaN very complex, and has become one of the focus issues in the field of nitride semiconductor electronic materials and devices in recent years.

Therefore, determining the lattice position of C impurities in GaN is a difficult problem to be solved.

As one of the well-known domestic research institutions in the field of GaN wide bandgap semiconductors, the Semiconductor Research Center of Yanda has naturally launched an attack on this problem.

But the result ......

As Gu Law just saw, the measurement results failed, and the technical problem remained.

Let Director Zhang and Professor Fang, who is in charge of this part, sigh.

After Gu Lu heard this, he touched his chin and remained silent, pondering something.

Exactly a few dozen seconds later.

Gu Lu looked directly at Director Zhang, smiled bitterly and said, "Director Zhang, if I say that I can solve this problem, do you believe it?"

Director Zhang was obviously confused.

Because Gu Lu's words were obviously not expected by Director Zhang.

Or rather......

Director Zhang didn't expect this sentence to come out of Gu Lu's mouth.

Director Zhang was stunned for more than ten seconds before he swallowed his saliva and asked, "Gu Lu, are you serious, do you really have a way?"

"Fifty percent sure. "Gu Lu didn't play a full package ticket.

Because he is not sure whether that method can be applied to the field of wide bandgap semiconductors.

Fifty percent sure!

In Director Zhang's opinion, this number is already very high.

It's worth a try.

It's just that when this sentence comes out of the mouth of a mathematician like Gu Lu, there is always a feeling of unreliability.