After the mobilization meeting of Changsheng Investment Group, the relevant units immediately took action. They still chose Changsheng Seiko's experimental workshop as the R&D base, because at present, only here can there be high-precision machining capabilities, and only here can meet the conditions for the placement of these equipment.

Guo Dong is the landlord here, so he naturally became the leader of this research and development task. Although they have set up an independent mechanical research institute, they still work here and can also be called masters.

It's still the old rule, a meeting is held before research and development, Guo Dong is the master at the head of the oval conference table, and the others are on both sides. This position is usually sat by the boss, and today he can sit in this position for a meeting, Guo Dong is very excited. "Ahem" He cleared his throat first, and then said in a pleasant tone: "Leaders, how about we do a simple division of labor first?"

"How do you divide the labor?" Wang Bo from the Institute of Chemistry knew him well, so he asked first.

"That's what I thought, two devices, we're going to talk about them in two groups. According to the proportion of technology occupied, we select a leader from each group.

First of all, the lithography machine development group. We are responsible for the development of this equipment, and I will take the lead, what do you think?"

Lu Rucheng and Hong Tao were originally his subordinates, so neither of them objected. The Institute of Optics and the Institute of Chemistry, to be honest, did not have a large proportion of technology in lithography machines, so they did not oppose it.

"Agreed" several people agreed.

"Well, the lithography machine research group has been decided, and we will meet later to discuss the technical details. As for the ion implanter, it is purely a physical principle, and I propose that it be developed by the Institute of Physics, what do you think?"

Guo Dong also proposed a candidate for the person in charge of the ion implanter research and development group, but there was no way, who would let him sit in the chairman's seat? If he didn't take the lead, he would certainly not be able to say anything else.

This time, no one spoke out in support of him, but no one objected either. After waiting for a few minutes, Guo Dong saw that no one was speaking, so he continued: "Then let's leave it at that! You can rest assured, we will also send mechanical engineers to participate in the ion implanter development team. ”

After speaking, he stood up, and then said to the other responsible persons present: "Mr. Lu, Director Wang, Director Hong, and Director Hu, let's go to the office next door to discuss the specific technical details! We discussed separately and did not interfere with each other. ”

"Dean Guo has an order, and I will resolutely implement it. Hong Tao made a little joke, and then he also stood up and said to Zhang Dongfang, who was sitting in the auditorium: "Zhang Dongfang, you come to sit here for a meeting instead of me." ”

"Haha" Everyone present let out a good-natured laugh, and their hands were not idle, and several others also found someone to replace them. Only Guo Dong's subordinates were exceptional, who did not sit in Guo Dong's seat, but sat in the seat farthest from the chairman's seat at the conference table. He was self-aware and knew that the seat was not his.

The director of the Institute of Physics is called Wang Weihong, and by his name, you can tell at a glance that he was born in the 60s. It was Shen Danqing's reform of the institute that later succeeded in the election. Truth be told, his qualifications are the lowest among the heads here. But his newborn calf is not afraid of tigers, otherwise he would not have succeeded in the election. After he waited for Guo Dong and the others to leave, he turned to the chair and sat down and said: "Although I know that I have the least qualifications, there must be a leader in the matter, and everyone has no objection, so I will be the leader of this team." ”

At this time, the people at the conference table began to applaud him, all of them were the people who had just been replaced, they were not of the same level, so no one felt that it was inappropriate, but felt that he was very courageous.

Although the people in the ion implanter development team are not very united, they have finally made a start. After Guo Dong and others on the other side came to Guo Dong's office, Guo Dong invited them to sit down, and then personally made tea for them.

"Dean Guo, you're polite! You're polite! I'll ask you to make tea yourself. Wang Bo took Guo Dong's tea and said politely.

"Isn't that how it should be? Guo Dong also responded politely.

Lu Rucheng and Hong Tao were very arrogant, taking the tea as a matter of course and drinking it, they have been working together for a few years, and they have long lost their sense of strangeness. Only Director Hu of the Institute of Optics is more restrained, he is also a new candidate, and the others are personally promoted by the boss, so he thinks that his status is a head lower than them.

"Hmm!" Guo Dong snorted and began to speak:

"According to my understanding, the lithography machine has solved the technical difficulties in the early stage, and the problem that is difficult in the eyes of others, we just need to assemble it, and the only trouble is the experimental data collection in the later stage, but there is no difficulty, it just takes time. ”

Speaking of this, he asked Lu Rucheng: "Mr. Lu, the CNC part, can you solve it!"

"No problem, this CNC system is much simpler than CNC machine tools, only a few linear actions and the coordination of the conveying action of the robotic arm, we can solve it in a few days, but it takes some time for data collection, I plan to ask the students to do it, let them experience the experience." Lu Rucheng said that it was very simple, and he also planned that as long as the students did it, of course they had to check it.

"That's good, you're fine, it's really fine. As far as I know, lithography machines are divided into three types: contact, non-contact and focusing.

Contact is the old method in the past, and the disadvantages are too big, so I won't talk about it. Although the focused type is more advanced, it is also the most difficult, and we do not have this need at present, which can be used as a research topic in the future. In order to be in a hurry, I plan to adopt a non-contact method this time, which is in line with our current process technology, and the highest accuracy can reach within 20 nanometers, which is completely sufficient for now. On the contrary, our chip design has not caught up yet, this time we only trial produce a 16-bit chip, and the accuracy only needs to reach the U-meter level.

Guo Dong made a joke about Hong Tao again, but this is the truth. Hong Tao is also very helpless, the chip design is very complex and requires a large number of skilled manpower. As the boss said, to design nanoscale chips, you must have at least a few thousand skilled electronic engineers, otherwise you don't even think about it.

Thinking of these, Hong Tao took over and said: "At present, we can only design some simple chips, and even 32-bit chips will take a lot of time, at least a year, and we have too few skilled manpower, so there is really no way." The boss also knew that we were shortcomings, so I was also criticized by the boss. Alas!"

"Okay! Since the boss has already criticized, we won't criticize you. Guo Dong made another small joke, and then formally said: "The technical point of non-contact lithography is that the laser head, mask plate and substrate should be infinitely close, and it is best to only differ by a few nanometers, so as to ensure the maximum accuracy." This is a kind of 1:1 projection technology or lithography technology, which has very high requirements for the production of mask plates.

"Theoretically, it's possible, let's try to find a way, that is to say, we don't engage in paper drawings at all, and directly use electronic drawings to project exposure?" When it came to his major, Lu Rucheng answered without thinking about it.

At this time, Hong Tao also got inspiration, so he took over the conversation and said: "I plan to use liquid crystal projection technology, liquid crystal is a molecular level compound, as long as our technology is enough, then the control accuracy can be infinitely small, I believe it can solve the problem of 1:1 electronic pattern shrinking very well." We won't follow the old path of foreign countries, which is too complicated and not precise enough. ”

"Only you know how foreign countries do it, we have always done it ourselves, isn't it good? As long as we achieve our goal, it's enough. ”

At this time, Wang Bo also interjected and said that he really didn't understand how to do it abroad, and his words didn't have half a sentence.

"Director Hong has a good idea, so that the electronic graphics will be no problem to shrink. Lu Rucheng couldn't help but be amazed by Hong Tao's methods.

"Can we unmask the template then?"

Guo Dong put forward a bold idea.

"Of course not, liquid cannot replace the mask template, because the LCD screen realizes image display through the principle of polarization of light. It is simply impossible to achieve, high-precision lithography, but we can give it a try, let the LCD screen replace the lithography machine, and develop electronic graphics for the mask, if it can be done, it is also a great progress, which can save a lot of steps.

But we had to develop a photoresist that was very sensitive to light. In the case of chemical etching, it can effectively protect the chrome plating layer that is not exposed to light. ”

"Director Wang, you can solve this point!" Hong Tao first explained the principle of liquid crystal to Guo Dong, and then asked Wang Bodao.

"No problem. Since researching photoresists, we have developed a variety of photoresists. We have already studied the photoresists used for masks for different substances. How's it going? Wang Bo replied in the affirmative.

"That's great, then let's try it!" Guo Dong said excitedly

Due to the special reason of this use, they do not need complex liquid crystal technology, only the first generation of liquid crystal technology, which is TNLCD. It is a simple black and white screen, white light is the circuit diagram, if the mask template and the LCD screen are close enough, you can also leave a satisfactory circuit graphic.

Another point is different from the ordinary LCD screen, the background light source here is a strong light source, which is not for people to see, but for mask exposure.

Of course, the shortcomings are also obvious, due to the size of the liquid crystal molecule, the accuracy is not enough, so it is not suitable for nanoscale chip technology, which they later understood after experiments.

……