"Shizhe!" When Ling Shizhe heard someone calling him, he looked around and saw that it was Li Li, who was standing next to a car parked on the side of the road.

Seeing Li Li, he suddenly didn't know how to face him, since he quarreled with her on New Year's Day, he hadn't gone back, and had been living in his newly acquired two-bedroom home. Now that the original partner came to the door, he felt a sense of weakness.

He thinks that he is not a ** person, and even looks down on those rich people who bag ** everywhere, but now what is the difference between him and those men who become bad when they are rich, and what qualifications does he have to despise them? Seeing Li Li standing beside the car not far away and looking at him quietly, Ling Shizhe lowered his head in shame.

Li Li slowly walked up to him and said, "Shizhe, when are you going home, Auntie has cooked your favorite dish for you at home, and I will wait for you to go home for dinner." ”

Hearing Li Li's words, Ling Shizhe was even more ashamed, looked into her eyes, and said, "Li Li, I'm sorry. ”

Li Li's tears burst out instantly, she cried for a while, put away her tears, and said, "Shizhe, remember to go home for dinner at night." ”

After speaking, Li Li turned around and left, and before getting into the car, she turned around again and said, "Shizhe, don't take her home, okay?" ”

Obviously, she already knew about Zhao Xiaoyun, Ling Shizhe didn't go home in the past few days, he ran to the villa next to Shaw Brothers Cinema every day, and he didn't hide his behavior, Li Li naturally knew it quickly. But she didn't make a fuss, she just cried for a while and accepted all this, to put it bluntly, this world is always a man's world, and Hong Kong is even more so, even if there is a marriage law, she can only accept it silently.

Ling Shizhe sighed, he was not in the mood to go back to the company, so he found a high-grade tea restaurant and sat for more than an hour, and when the time was almost up, he went back to the villa in Repulse Bay.

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"Ling Shao, please see, this is a prototype of the redesigned ion implanter, the current performance is not bad, it is still being tested, there is no problem after a period of time, it can be finalized and produced, Ling Shao, you will soon use it in the Canadian factory."

Since Ling Shizhe returned to the villa in Repulse Bay that day, the conflict between the family has been revealed, and the family has returned to normal life, and now he has two women, and he has to go to the new villa every few days to live for two days.

Today, he came to the Ambrera Process Laboratory not far from the University of Hong Kong to inspect the ion implantation equipment, and a few days ago he received a report from Christopher that the ion implantation equipment has been successfully developed. The narrator was Professor Qiu Ming of the Polytechnic University, who is an international authority on ion science, and it was he and Christopher who built this high-energy ion implanter.

Ion implanter is the equipment used in wafer processing doping.

Doping is the incorporation of a controlled amount of the desired impurities into a specific region of the wafer, thereby altering the electrical properties of the semiconductor. To put it simply, it is to add certain impurities to the semi-finished transistors that have not yet been carved out by the etching machine in the wafer, so that those transistors that have not yet been completed can generate qualified transistors.

In the chip manufacturing process, there is no transistor on the chip raw material wafer, which is formed after projection lithography, etching, and doping.

Specifically, the chip factory first makes the chip diagram designed by the chip designer to the process chip circuit lithography plate, and then hands it over to the lithography machine to project and expose it on the wafer, and the photoresist coated on the wafer contains a photosensitive agent, and after the development process, the circuit diagram of the chip is displayed on the wafer; Then hand it over to the etching machine to etch out the circuit diagram.

After these complex processes, the wafer will see a small protrusion under the high-power microscope, which is the prototype of the transistor, but this is not enough, these transistors are still just a shape, and do not have any function of the transistor, and they need to be doped to become a real transistor.

When phosphorus or other pentavalent elements are doped into a wafer, an n-type semiconductor is formed; The doping of boron or other trivalent elements results in the formation of p-type semiconductors.

In a word, transistors are formed on the wafer by doping different impurities.

That's how the transistors on semiconductor chips that we can't see with the naked eye and can only be seen under a high-powered microscope are made.

People sometimes ask, how do you get tens or even hundreds of millions of transistors on a small chip? How did you make the transistor so small, even down to the nanometer level, and how did you press that small transistor? In fact, transistors are not pressed, they are formed by etching and doping through the photolithography process. Micro-scale and nano-scale chips refer to the spacing between transistors in a chip, not the size of the transistors, the smaller the spacing between transistors, the more transistors on the same area of the chip. The transistors are lined with intermediate wires to connect the transistors.

Ling Shizhe took the data record data handed over by Qiu Ming, opened it, it was full of various operation records of the ion implanter, the quality records of the processed products, etc., and then looked at the processed samples under the microscope, and finally looked at the various test reports of the products, felt very satisfied, and asked: "It should reach commercial application, right?" ”

Qiu Ming replied: "If there is no problem with the operation of this prototype, and the structure is optimized, it can be commercially produced, Ling Shao, the previous doping of semiconductors was done by diffusion doping process, and the use of ion implanter doping was only started in the 60s, but the technology has not been mature." Our ion implanter is completely mature in technology, simple mechanism, small size, simple and convenient maintenance, maintenance and repair, good doping quality, high target accuracy, and has too many advantages compared with the previous doping methods. ”

"What kind of annealing process do you use for doping annealing?"

One of the drawbacks of ion implantation doping is that it can damage the crystal lattice, so annealing is required after ion implantation to eliminate these defects.

"We use the electron beam annealing process, and we have also tested the laser annealing process, but compared with laser annealing, the electron beam annealing beam class uniformity is better, and the energy conversion efficiency can reach 50%, while the laser annealing is only 1%, which is much higher."

Electron beam annealing is the use of an electron beam to irradiate the surface of a semiconductor, so that the ion implantation layer in it reaches a very high temperature in a very short time, so as to achieve the purpose of eliminating damage. The heating process is very fast and the heating is limited to the surface layer, thus reducing some side effects.

"Is this technology mature?"

"Mature, fully mature." Qiu Ming replied, his face full of pride, and continued: "Ling Shao, the whole set of ion implantation and electron beam annealing processes are all automated, which can greatly reduce the labor intensity of workers, and the whole set of equipment can be easily completed by only 2 people, and the equipment is quite reliable. ”

"Well, great, with this set of equipment, our chip production cost will be greatly reduced, the yield will be greatly improved, and the production efficiency will be multiplied. When will the production be finalized? After such a long time, so much money has been invested, and finally some results have been seen, Ling Shizhe began to can't wait to put these equipment into use immediately.

Qiu Ming didn't answer his question, but stood aside with a look of wanting to say something, Ling Shizhe quickly noticed his expression and asked, "What's wrong, Professor Qiu?" ”

Seeing him ask, Qiu Ming couldn't help but answer, and said: "Ling Shao, I think that it is not too busy to put this set of equipment into production and use, and then you can install one in a chip factory in Canada for experimental production to see how the actual use effect is, if there is something inappropriate, we can modify and improve it, Ling Shao, aren't you going to upgrade the chip factory to 8 micron process technology again at the end of this year?" Now there is a full year before the end of the year, and it is enough to have this year to test this set of equipment, and when the time comes, wouldn't it be better to install it when we use the factory upgrade? “

Ling Shizhe thought for a while and said, "I agree with your suggestion, okay, just wait a year before going on." However, Professor Qiu, according to Moore's Law, semiconductor technology will not double until 18 months of integrated circuits, although our company has already started the research of 8 micron or even 7 micron process, but at the end of the year began to upgrade~~~~ I estimate that they will still come out. ”

"No, Ling Shao, we can do this, set up a small process experimental factory, specializing in the research of 8 micron process technology, and when the technology is mature, we will install the 8 micron process in a chip factory, and there is no problem with the 8 micron process running in the factory, we are upgrading the production lines of all factories to 8 micron process technology, and at the same time, small experimental factories will start to carry out process research and development below 7 microns, Ling Shao, what do you think?"

For example, after the process laboratory has developed the 8-micron process technology, it will be taken to the experimental factory to start production, and the 8-micron chip can be sold in small batches due to the small output, or just come out, you can try the market reaction, the price can be sold to the highest, and part of the R&D investment can be recovered in advance.

When there was no problem in the laboratory factory, it was transferred to a standard factory for production, and at this time, the supply of 8 microns on the market increased, and the price was appropriately reduced, and at this time, people had fully accepted 8 micron chips. At that time, all factories will join the production of 8-micron chips and distribute them on a large scale.

If people don't accept it, the chip can also be improved according to the needs of the market, so that the newly born chip does not meet the market and causes large-scale unsalable, resulting in large-scale losses, even if there is unsalable, it is also very small-scale, because it has not yet entered the standard factory, and when it is still in the test factory, it has been reflected that the new chip does not meet the needs of the market, and it will be produced on a large scale, and it can be stopped at any time if it does not meet, and the chip will be improved, anyway, it is a pilot factory. This small loss can still be afforded, and besides, we can also process these chips cheaply, so that there will be no losses.

After figuring out the joints, Ling Shizhe immediately agreed to Qiu Ming's proposal.

After visiting the ion implantation equipment, Ling Shizhe visited other experimental projects, especially the distributed lithography machine and the electrically coupled high-energy plasma etching machine, and saw Wang Haihua and Christopher in the etching machine laboratory.

The whole room was full of cables and all kinds of large and small machines, Wang Haihua and Christopher stood in the middle of a push of instruments, surrounded by a dozen college students and a few engineers from Ambrera, and some workers were coming in and out.

The two of them didn't notice Ling Shizhe's coming, their attention was all on the instrument in front of them, Christopher held a process diagram in his hand, looked at it again and again, and then looked at the instrument again, and said: "Wang, no, or no, it's not that we have a problem with our thinking, our direction is right, and there is no problem with the design, but our current hardware environment is not up to the requirements, and our only way is to wait until the hardware meets the requirements, and this machine can meet the standards used by the company." ”

Wang Haihua knew that Christopher was right, but he said a little unwillingly: "I want to try if there is any possibility of other ideas." ”

"No, Wang, this is the most correct way of thinking, nothing else, there are all kinds of problems, and you see, the technical points mentioned above by the boss have found a solution, we have done countless tests, all of which have proved its correctness, just because the current level of science and technology is still too low, we still can't meet the requirements, as long as we keep going down this road, one day we will succeed, don't try to find another way, this is the best way." Christopher said, pointing to the information in his hand.

At this time, an engineer next to him turned around and saw Ling Shizhe shouting, "Boss." ”

Christopher and Wang Hai turned to see him, Ling Shizhe smiled and said to the two of them, "I have a temporary alternative here, you can take a look." ”

Taking the briefcase handed over by the assistant, Ling Shizhe took out a thick information bag from it and handed it to the two.

Wang Haiwen took the information bag and did not open it, but said to Ling Shizhe: "Ling Shao, this is not the place to talk, let's go to the office and talk."

Looking at the people coming in and out here, it was indeed not the place to speak, Ling Shizhe nodded.

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