Chapter 51 Cylindrical Etching Machine

When Ling Shizhe established the semiconductor process laboratory, in order to make it convenient for the professors of the school to research, he specially opened up two floors as an office area for professors and engineers, and each professor and engineer had his own office, and there was a lounge in the office, so that he could rest when he was tired. In addition, there are 4 staff lounges, which are not as good as the professor's engineer's office, all of which are collective lounges, a few benches, a large iron table, and a tool cabinet. It's no different from the factory staff lounge, with two rooms for employees and university students, all next to each other on the lower floor of the professor's rest room.

Wang Haihua and Ling Shizhe came to the floor of the professor's office area, but instead of taking Ling Shizhe to his office, he went to the conference room, along with Christopher, Qiu Ming, and more than a dozen other engineers, as well as nine professors from the University of Hong Kong and the Polytechnic University.

This is a large conference room, which can accommodate 200 people at the same time, and the conference room is not luxurious, but it is full of science and technology, and it is not old-fashioned in the eyes of Ling Shizhe's later generations.

After everyone entered the conference room, they sat down on two sides, Ling Shizhe sat in the main seat, on the left hand side were professors from Hong Kong and Polytechnic University, and on the right hand side were Ambrera engineers.

In Asia, it should be said that China pays attention to the left, and Western countries respect the right; Ambrera's engineers are more Westerners and naturally sit on his right hand, and the professors, who are more Chinese, sit on his left hand. Seeing that they automatically divided their seats, Ling Shizhe also felt relieved, so that both parties showed respect and would not feel despised .

Several university students were busy serving tea and pouring water for everyone. These students are obviously novices, and they have never served tea and water, and they are constantly in trouble.

"Hey, I want tea, not coffee, you got it wrong."

"I want English tea, not Chinese tea."

"I want a latte, not a cappucciruo, give me another glass, stupid!" One professor was furious.

"Oh God, I want coffee without milk, it's pure coffee, and you give me white coffee, and I want three and three-quarters of a piece of sugar, not four, you add four pieces of sugar, change it, rookie." Said an engineer from Ambrera.

"I want English lemon tea, not American mint tea!"

……

"You're wrong again, I want Longjing, not Jasmine."

"What I want is jasmine, why are you giving me a sparrow tongue, that's Professor Gu's, bring it to him, bring my jasmine."

Looking at this gang of college freshmen who were in a hurry and in constant condition, Ling Shizhe suddenly laughed, remembering the scene when he had just crossed over and when he first entered the university, behaving like them, the same dish.

Maybe everyone will scold when they see this scene, damn, these old men are too picky, those who want tea give him tea, those who want coffee give him coffee, what does milk not add milk, what pure coffee, Longjing, sparrow tongue, so why pick? Isn't it okay to have the same coffee or tea?

In fact, universities in Hong Kong attach great importance to the cultivation of students' practical ability, and serving tea and water is one of the most basic practices. Taking tea as an example, people have different eating habits in real life, some love to drink coffee, and some love to drink tea. There are many classifications of coffee and tea, and personal preferences are different, needs are different, and some people even have special habits.

Through the practice of serving tea and water, those students can help them understand the differences between people, exercise their on-the-spot reactions, instantaneous memory, collaboration, organization and arrangement, etc., and let them build up their self-confidence in life and work through this exercise.

Because college is the last ivory tower in life, it is a preparatory station for people to step into society, students studying in school can also be regarded as dolls, everyone can tolerate and forgive your mistakes, and once you step into society, it is different, everyone will not treat you as a doll, once you make a mistake, you will be scolded, you will be fired, and sometimes even a lawsuit.

This is Hong Kong, life and work are very stressful, and if you can't adapt to it, you will be ruthlessly eliminated.

Survival of the fittest is Hong Kong's survival manual, and like air, it enriches every aspect of Hong Kong. It is precisely for this reason that universities in Hong Kong attach great importance to the social practice of their students, and they do not want to cultivate students who are socially imbecile with extremely high IQ and low emotional intelligence.

"Drink, Cam, you're done." Ling Shizhe reminded one of his engineers.

Cam, who is Italian, laughed and said, "Boss, this is so funny, I want to laugh when I see those students making a fool of themselves, it reminds me of when I was younger." ”

On the other side, a professor from Polytechnic University said: "It's okay Ling Shao, you have to do a good job as an engineer, so that these rookies can get as much exercise as possible, which will be of great benefit to them in their work and life when they step into society in the future." ”

An Ambrera engineer said: "Boss, we weren't like this at the beginning, we weren't so picky, since we understood the purpose of the professors to deliberately "make things difficult" for students, we joined in to "make things difficult" for them, Hong Kong universities are very interesting about the way students are trained, and the students who are trained through this special way of training are very confident and independent. ”

The other engineers nodded their heads. This method is unique to universities in Hong Kong, not found elsewhere, and after this kind of practical exercise, students can do things cleanly, organized, busy and orderly, not rush and impatient, and know what to do first and then what to do. Universities in other places and countries have different approaches to developing students' independence and self-confidence, but Hong Kong's approach is the most special, bringing together some of the best experiences of Eastern and Western universities to forge a path of its own.

After a little scramble at first, the students slowly began to get a little more organized, and finally brought everyone's tea and coffee to everyone with the accuracy of the coffee, and then they withdrew, and did not forget to close the door of the conference room as they left.

After all the people left, Wang Haihua opened the information bag that Ling Shizhe handed over to him, and as he expected, there were several drawings and some technical information. After distributing the materials to the other professors and engineers in turn, he spread out the drawings on the conference table, took out the glasses case from his coat pocket and opened them, took out his reading glasses and put them on, and looked at the drawings.

The data column in the lower left corner of the drawing reads Cylindrical plasma treatment system.

Since the last time they told Ling Shizhe that the electro-coupled plasma etching system could not be made in a short time, Ling Shizhe has checked a lot of information these days and finally found a set of alternatives.

In the history of semiconductors, the etching of silicon wafers was 77 years ago using chemical wet corrosion technology, which is the use of acetic acid or H2O buffered HF/HNO3 solution and the chemical reaction of the thin film to remove the part of the film that is not covered by photoresist to achieve the purpose of etching, this etching method is also called wet etching technology, which is a pure chemical etching.

Later, with the advancement of semiconductor technology, wet etching technology came to the lens and began to enter dry etching. It does not use liquids and uses plasma or high-energy particle beam bombardment to etch the wafer.

The barrel etching machine is the earliest etching machine and the simplest etching machine. The cylindrical etching system designed by Ling Shizhe is improved on the barrel etching machine, which adopts a universal vacuum treatment chamber and chassis, which is a plasma etching equipment that meets the requirements of plasma degumming, scum removal, isotropic and isotropic etching, adopts high modular assembly design, multi-functional vacuum cabin-electrode design, compact structure, and automatic process procedures.

Ling Shizhe wants to use this set of equipment to replace the ICP etching machine, the etching size limit of this system is 0.5 microns; according to the current development speed of semiconductor technology, after the use of this set of equipment reaches the limit, the ICP etching machine has completely entered the use stage, and then it can be handed over with the cylindrical etching machine and replaced it.

This way, he does not need to change the etching machine as often as he did in the past. This is a solution that he has been thinking about for a long time.

After a long time, Ling Shizhe asked, "How, can it be made with the current technology?" ”

Qiu Ming and everyone looked at each other, nodded, and said: "There is no problem in the design, just spend some time doing a few tests to find out the best data value, and it can be finalized and put into use before March next year." ”

It won't come out until next year, Ling Shizhe was obviously not satisfied with this progress, and said, "Can you do it in three months?" ”

Cam shook his head and said: "It's difficult, it may not be possible to make it in March next year, boss, you see, you have to have this system is fully automated, the development of the CNC system will take a lot of time, if it comes out in March next year, this is still in the case of no heavy **ug, if there is a heavy **ug, I don't know how much time it will take." ”

Cam said this Ling Shizhe suddenly thought of the history of the MK800 CNC machine tool, this machine tool was launched by the American Spischer company at the end of the seventies, the development time took ten years, and then how many years, the time is too long Ling Shizhe can not remember, anyway, it was found that there is a major problem with this machine tool, after inspection found that the problem is in the software, Spischer company spent several years did not find out the bug inside, and then it was not until the 90s that the bug was found, The depth of its concealment is evident; It's a pity that there is not just one bug in this machine, but several, all of which are major bugs, and they were all solved until the end of the 90s. By that time, however, Spiescher had already become a thing of the past.

Software problems to solve quite troublesome, software failure problem can be solved smoothly, all depends on whether you can find out the bug in the first time, if you can not find it in the shortest possible time, then you are miserable, especially heavy **ug, you can not solve it. If you find a bug, you can solve the problem, and if you can't find it, you will be whitewashed.

"No, there shouldn't be this problem, this kind of problem in software is generally caused by the unreasonable design of the kernel structure, followed by serious mistakes in program writing. You see, the CPU system of the boss is very simple in the mechanism, the CPU chip used is the RISC architecture, and there is no problem with the design of the hardware, so that the core structure of the software will be much simpler in design, excluding the possibility of heavy **ug defects, as long as the programmer does not make major mistakes when writing, the possibility of serious bugs can be eliminated, even if there are some small bugs, it will not have any impact. In addition, I recommend using the J**A2.0 Enterprise Edition programming language to write its programs, Java advantage is suitable for team development, software engineering can be relatively standardized, can be used to develop reliable, demanding applications, this is a difficult advantage to compare. In this way, we can prevent the occurrence of serious bugs to the greatest extent, we can use the way of group writing to write software code, which can save a lot of time, after the software is written, use the program detection software to detect whether it has vulnerabilities, especially major vulnerabilities. A software engineer at Ambrera retorted.

"The RISC architecture has a huge amount of programming, and we don't have enough programmers!" Cam said.

"We can get those students to write it, and as long as there are no major problems with the program, we can finish it by March next year. After that, you just need to optimize and upgrade the software. Wang Haihua replied.

Everyone, you say, I say, the plan is slowly improved, and finally after the plan is finally determined, Christopher said to Ling Shizhe: "Boss, we can't take it out in three months, take it out in March next year, it is the fastest speed, and it will affect the normal classes of those students soon, the most time-consuming part of this system is the writing and repeated modification of the program, the program of RISC structure is not like the CISC architecture, although it is not complicated, but the workload of writing the program is very huge." ”

Ling Shizhe nodded, it seems that he is still impatient, he wants to use the cylindrical etching machine as soon as possible, and the wet etching process chip factory will use it for the time being, its limit is 4-5 microns, it is still early.

After the discussion, everyone walked out of the conference room.

Wang Haihua did not follow everyone along, but called Ling Shizhe to his office.

The two sat down on the sofa, and after the students served tea to the two and went out, Wang Haihua said: "Xiaoling, you should use the cylindrical etching machine scheme at the beginning, instead of using the ICP scheme, although ICP has great advantages over cylindrical type, it is also too complicated, and it cannot be done in a few years." ”

Wang Haihua's words were slightly reproachful, he had a deep friendship with Ling Zhigao, Ling Shizhe was a junior, and he had to call him uncle, plus he also graduated from the University of Hong Kong, studying in the Department of Physics, Wang Haihua is the director of the Department of Physics, Ling Shizhe is still his student, although he has not taken a day of class with him, so he dared to say those words. Other people would not dare to talk to him like that.

Ling Shizhe shook his head with a wry smile, isn't it, if he had taken out the cylindrical etching machine first, and now he has already entered the factory for production and use, he still blames himself for wanting to eat a big fat man at one time, but it turned out to be okay and hung up.

"Professor, how do you know that I already have a cylindrical etching machine scheme?"

"How could I not know? When you were in my department when you were in school, I observed every student, and although I didn't teach you personally, I also know you, you want the best in everything, and that's how you develop new ceramics, that's how you want a computer camera, and that's how you have to be a new type of process. ”

Ling Shizhe didn't speak, this picture and those materials were not designed by him, but he brought them from later generations and transcribed them.