Chapter 315: Lithography and Etching, The Soul and Spirit of Chip Manufacturing (Dry Goods, Asking for Votes)
In the R&D center, the anti-theft tempered glass door closed by a large laboratory, when Ye Hua and others approached about three or five meters, the glass door suddenly opened by itself.
At this time, Ye Hua and the person in charge of the R&D center and an important person in charge of China Micro Semiconductor came to this laboratory together, and various instruments and equipment were immediately exposed to everyone's field of vision, especially in the center of the laboratory, a device more than four meters high and a matrix structure was particularly eye-catching.
There were several quite young engineers in the laboratory, and at this time, Ye Hua, who was wearing dust-free clothes, did not ask the person in charge of the R&D department for anything, and went directly to the battle in person, and said to the engineers: "Don't be stunned, let's start." ”
They hesitated for a moment, and immediately started working under the silent nod of the head of the R&D department.
Well, this is the laboratory of a microelectronics company, and it stands to reason that the core technology cannot be "touched" by others, but except for Ye Hua, without him, there would be no domestic EUV extreme ultraviolet lithography machine in front of him.
I saw that Ye Hua skillfully opened the lithography machine that was completely independently developed by domestic accessories, and a cone-shaped instrument and equipment suddenly appeared inside, this instrument hooked at the top, the cables about two fingers wide were densely covered, and the outer layer of copper wires was surrounded, and the inside of the bare body, thousands of parts were densely aligned and linked together, forming a precise miniaturized closed structure, which was very spectacular to overlook at a small angle.
Ye Hua commanded five engineers who assisted him in the final debugging operation, and a staff member took the sealed box he brought to take out the two-dimensional wafer of tinene, which was the fabricated tin wafer.
The manufacturing process of the chip is very complex, first of all, Frontier Nano provides high-purity two-dimensional crystal film of tinene, and after absorbing the core technology of Shin-Etsu Chemical in the production of raw materials, Sincere Nano has also improved the purity of the tin ene material to the top level in the world.
It is worth mentioning that in addition to the need for lithography machines to make chips, etching machines are also needed, if the lithography machine is the soul of chip manufacturing, then the etching machine is the soul of chip manufacturing, and if you want to create a real high-end process chip, both must be top-notch.
Before that, the development of domestic lithography machines and etching machines is very embarrassing, which is a serious bias situation, and China Micro Semiconductor has been able to carry out mass production of 5nm level etching machines, and directly entered the world's top ranks without suspense, and the quantum etching machine is also in the experimental stage, which is the result of no Ye Hua's help.
However, whether it is the 90-nanometer lithography machine of Shangdu's microelectronics or the 200-nanometer lithography machine of Yingsu, it is difficult to match the gap between the lithography machine and the most advanced 5-nanometer process of ASML in the world.
These two machines and equipment, simply put, is that the lithography machine projects the circuit diagram onto the silicon wafer covered with photoresist, of course, it is now a tin chip, and the etching machine corrodes the excess circuit diagram on the chip with the circuit diagram, so it seems that there is no difficulty, but there is a figurative analogy, the circuit mechanism on each chip is magnified countless times, which is several times more complicated than the entire business, which is the difficulty of the lithography machine and etching machine.
The process of photolithography is to coat the surface of the tin circle with a layer of photoresist, the so-called photoresist is a gelatinous substance that can be corroded by light, and then pass through extreme ultraviolet light (i.e., process difficulty UV light; amp; lt; Depth UV lamp; amp; lt; Extreme ultraviolet light) is mapped through the mask to the surface of the tin circle, similar to a projection.
Because of the photoresist covering, the irradiated part will be corroded, and the part without light will be left, which is the required circuit structure.
The lithography function of the lithography machine is similar to that of a camera, and the working principle is to expose the circuit diagram of the chip route and function of the chip through a photomask with a pattern to the chip wafer coated with the lithography machine, and the photoresist will change its properties after seeing the light, so that the circuit on the photomask is copied onto the chip wafer.
Figuratively speaking, just like the flat printing process, once the architecture scheme is determined, as long as the raw materials are sufficient, the large-scale production of brushes and brushes will be over.
There are two etching methods, one is dry engraving and the other is wet engraving, and this time AMEC provides the second etching scheme.
As the name suggests, wet deposition is the addition of water in the process, and the photolithography wafer is reacted with a specific chemical solution, removing the unwanted parts, and the rest is the circuit structure.
Dry engraving, on the other hand, has not yet reached commercial mass production, and the principle is to replace the chemical solution with plasma to remove the unwanted tin rounds.
AMEC is also one of the core members of the CSAC club alliance system, and it is also very excited, because it has received strong theoretical technical support from Ye Hua, and the commercialization of plasma etching is already expected in the future.
After the modulation was completed, Ye Hua drew a holographic panel in front of him, and output a series of instructions for the lithography machine to start automatic operation. The so-called automatic control is to upload and download from the substrate, and the exposure time and cycle are controlled by the program.
In the next time, 34 kinds of chips with different functions will be produced, and the internal integration of a PHC machine is exactly 34 different chips, which are basically provided by upstream suppliers, and Intel is just one of them.
It can be seen that the difficulty of the semiconductor industry is no less than that of the blue sky.
It is not difficult to see from the point that if you want to get PHC rid of the dependence of foreign integrated circuit manufacturers, Ye Hua must take the lead in getting CSAC out, just relying on the coastline company, even if he opens the hanging, it is impossible to do it within half a year, and it is absolutely impossible to do PHC hardware completely self-sufficiency in five years, even if it is done, it will inevitably be a monopoly lawsuit, Xianfeng Nano will inevitably face a spin-off situation, and even the coastline group will be spun off.
But with the CSAC system, it is different, Ye Hua has solved the specific technical barriers, in the next one to two months, to produce a total of 34 different types of chip samples with different functions, by the major CSAC system integrated circuit manufacturers to get their own share of IC design, is the PHC required chip components, to achieve 100% domestic supply.
Some people say that domestic electronic equipment such as mobile phones are typically assembled, and this time the firepower hit point is PHC, the reason is that chips, memory, etc. are all from upstream suppliers, and they are overseas suppliers, and there are very few things that really belong to themselves, so the coastline is just an assembly plant.
In fact, this statement is quite funny, if according to this statement, not only the coastline is an assembly plant, Apple is also an assembly plant, Apple mobile phones need Samsung, Qualcomm These companies supply, but also use Huawei's technology, the revenue of the two companies is comparable, even if the profit is also between the two, the assembly plant will be so valuable?
In the next time, Ye Hua is ready to stay in this microelectronics R&D and production center for a while, everything is difficult at the beginning, the first PHC machine composed of all domestic chips is very important, and time is really running out.
Under his leadership, the entire CSAC performs its own duties, and uses their unimaginable speed to promote the subversive transformation of the road to high-end chip localization, and every member of the CSAC system is now as if they are dreaming, as if it is too easy, easy to be unrealistic, but they know that this is not a dream.
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