At 12 o'clock in the evening, most of the workshops of the entire Jiangxia Electronics Factory were already pitch black, and only the security personnel on duty at night were patrolling back and forth with flashlights.

However, only in the northwest corner where the chip workshop is located, it is still brightly lit, and the unique yellow light in order to avoid interfering with lithography means that it is still in a tense working state, and the yellow and clear halo like fog seems to indicate the mystery of lithography as a top precision manufacturing.

In the workshop office, chief engineer Zhang Bensong and a group of engineers sat around the table for a meeting.

"It's true that this projection lithography machine has a considerable increase in accuracy compared to previous contact lithography machines, and the use of a Gaussian-type lens that combines concave and convex lenses can also eliminate most of the field curvature and aberrations."

"In addition, there are photomasks and baking etching, which are basically the same as contact lithography, and we don't need to master them additionally, and even because the photomask no longer needs to be in direct contact with the photoresist, the baking accuracy becomes less important, which is our advantage."

"But at the same time, we must also note that we are also ???????????????? due to the contact change projection In terms of new problems in lithography, the first is the problem of light diffraction......"

Again, the most annoying principle is that light does not travel in a straight line, but has wave-particle duality, especially after passing through a narrow slit, this diffraction phenomenon is more severe.

"Although after today's one-day test, as well as with the comrades of Jiangxia Electronics Factory, as well as the comrades in Ninghai, we have a great inspiration, and we have also harvested quite good results, but this is far from enough, I hope you can make persistent efforts tomorrow to overcome projection lithography technology as soon as possible!"

Zhang Bensong glanced at the clock on the wall, and then told everyone that it was very late today, and motioned for everyone to go back and rest: "I know that everyone is very anxious about technology, but conquering technology is not an overnight thing, the body is the revolution. The capital of life, everyone has rested, so that they can meet new challenges in a fuller state! ”

After summing up, the meeting was dismissed, and a group of skilled workers and engineers left first, and Zhang Bensong stayed at the end.

Someone persuaded Zhang Bensong to rest first, but Zhang Bensong always smiled and said: "I almost didn't finish recording at the last point, this kind of thing can't be delayed, you go back to rest first, I'll rest after recording." ”

Zhang Bensong continued to bury his head, although his right hand was almost better after the hospital's diagnosis and treatment, but it was still difficult to hold the pen, so it affected his record work.

Soon an hour passed, and when Zhang Bensong finished recording today's work, he did not leave the office to rest, but walked to the chip workshop, tore off the paper he recorded and pasted it on the glass outside the clean room.

This is Zhang Bensong's routine operation, because they want to ensure the absolute cleanliness of the clean room, so they avoid even the paper from bringing in, but at the same time they need to make adjustments according to their own calculations, so they have to stick it on the glass from the outside and use the glass as a cue board.

Skillfully take out a polished silicon wafer and follow the steps to clean and coat the glue and bake.

Although these are all steps that have been inherited from contact lithography and Zhang Bensong has done it dozens of times, he is still careful to ensure that every step is accurate.

Soon three hours passed, when Zhang Bensong took out the baked silicon wafer from the oven with heat-insulating gloves, he heard the glass in the clean room knock gently, and Zhang Bensong turned his head to see a few familiar faces, which were the most serious engineers and skilled workers under his hands.

In order to avoid polluting the clean room with talking droplets, Zhang Bensong gestured and asked why they came so early, and now is it dawn?

It's only four o'clock in the morning because they can't sleep, so they want to come to the workshop to do another test to collect more data during the day.

Zhang Bensong wanted to call them back to rest, but he stretched out the clean room, and he still had a silicon wafer in his hand, he had no choice but to point to the note he had glued to the glass, anyway, these people are here, let them come in to help.

Zhang Bensong walked to the door and told them that he thought that improving the accuracy of projection lithography was related to controlling the light time and number of lithography.

"Although lithography can be completed in an instant like photography, it does not mean that lithography is completed as a whole, and there may be problems with lithography not being in place, but if we increase the time and frequency of illumination, it may bring new diffraction and overexposure problems, and we are now going to ???????????????? Find the most suitable process factor. ”

He explained his thoughts in simple words, and then Zhang Bensong let other engineers in, and they fixed the baked silicon wafers on the lithography machine, and then started the lithography, and repeatedly exposed them according to Zhang Bensong's ideas.

This time they failed, and after the silicon wafer was etched, Zhang Bensong found that after overexposure, the photoresist was greatly affected, resulting in diffraction exposure in places that should not be photoetched.

In the morning, Fang Huanzhi personally brought breakfast to them, and seeing that Zhang Bensong and they hadn't slept all night, Fang Huanzhi severely criticized Zhang Bensong.

"You should know the system in the factory, I have repeatedly emphasized that you must rest, you stay up late so often, if you fall, who else can preside over the technical research of our Nanyuan Electronics Factory? You are not only irresponsible to yourself, but also irresponsible to the development of the factory! ”

Zhang Bensong said that he humbly accepted Fang Huanzhi's criticism, but after breakfast, he immediately presided over a technical meeting.

At the meeting, Zhang Bensong said that although the test failed, they were not completely without results, and according to the final analysis of the silicon wafer, they were on the right track.

"Repeated exposures can really effectively increase the accuracy of lithography, and the next task is to slowly test the number of exposures and exposure intensity, exposure duration, etc., and we have to enter more boring and repeated tests."

When the meeting ended, Fang Huanzhi immediately stopped everyone, found out Zhang Bensong and his party, who had not slept last night, and asked them to go back to the dormitory to rest immediately.

Zhang Bensong didn't do it, he said that he had already touched the threshold, and he would be able to get projection lithography right away, and he couldn't get out of the line of fire at this time.

Fang Huanzhi said that he knew everything, and the next thing was repeated test work: "Any worker can complete these tasks, don't you Zhang Bensong still trust the soldiers you brought out?" When the time comes, you'll have a good rest and just look at their data. ”

In the end, at the request of Fang Huanzhi, Zhang Bensong and several other engineers who stayed up late were forced to go back to the dormitory to rest, even if several other engineers repeatedly explained that they did not stay up late, but it was useless to come at four o'clock in the morning, Fang Huanzhi ignored it in line with the principle of preferring to kill mistakes rather than let go.

Zheng Nan later learned that he also supported Fang Huanzhi's approach: "Talent is the top priority of chip work, we now need to master the technical points of projection lithography, but it does not mean that we have to do everything we can, we still have progressive and step-by-step lithography machines in the future, and we also need engineers with outstanding technology." ”

It's just that although Zheng Nan and Fang Huanzhi both agreed on the same side and asked Zhang Bensong and them to have a good rest, Zhang Bensong and the others put on a posture that they would not be affected by the life of the monarch outside, anyway, it was night, and there was no one to supervise, so they naturally continued to test all night.

At the beginning, Zhang Bensong also drove the others back to rest after the night summary meeting, and he stayed to test it himself.

Originally, everyone else went back to rest first, and then came back at three or four o'clock.

But every time I saw Zhang Bensong stay up all night, and later other engineers and skilled workers who had pursuits simply did not rest, and stayed up late with Zhang Bensong to test.

Fang Huanzhi was also very angry when he first knew the news, and he criticized Zhang Bensong fiercely, and he also knew that he was emotional and reasonable???????????????? He explained the need for a normal routine.

Zhang Bensong also promised to be good, but at night he should still stay up late.

Fang Huanzhi had no choice, and it was impossible to really squat in the workshop every night to catch Zhang Bensong back to the dormitory to rest, and even if he did, there was no guarantee that they would go back to rest for an hour or two before coming to the workshop for a test.

Fang Huanzhi also figured it out later, no matter how he tossed at night, he let him go back to rest when he caught it during the day, although it was still day and night reversed, but it could finally ensure the basic rest time of these engineers.

Of course, Zhang Bensong's hard work paid off, and just three days later, Zhang Bensong reported to Fang Huanzhi excitedly: "We finally succeeded!" Projection lithography technology, although the yield rate is only 30%, but this is already a breakthrough in the quality of contact lithography technology, the future can be expected, the future can be expected! ”

Zheng Nan was also very happy, he took Li Xing and other Jiangxia Electronics Factory cadres to the chip workshop, watching Zhang Bensong and them make chips through projection lithography machines in the clean room, and this time the luck was very good, and the yield rate reached an unprecedented 45%.

Zheng Nan clenched his fists hard: "This shows that you have basically mastered the technology, and the yield rate of 30% is already higher than that of contact lithography, and the next thing you have to do is to continue to be proficient and optimize him." ”

Later, Zheng Nan made work adjustments for Li Xing and them in the office of the workshop.

The first is the technical upgrade: "Now that they have mastered the projection lithography technology, then we don't need to guard the contact lithography machine anymore, although they are the first machine we developed to restart the lithography machine, but now we also want to transform it into a projection lithography machine!" ”

Although Li Xing was a little reluctant to do this, he still said that he would firmly carry out the order, and now he still gave priority to technological upgrading.

The second is market sales, Zheng Nan told the old factory director that he could let go of Huang Pinchao and Zhao Wenhe.

"I believe that they have learned enough lessons during this period of repression, and now that our chip production has increased, we have the ability to produce more learning machines, and we can open up the supply."

The old factory director nodded to indicate that he knew how to do it.